GB 02999 - Edition 04 - Nov 12
1/2
B 330
Nitrogen purge and air inlet valve
device connections
Characteristics of
filtered dry nitrogen
supply
A filtered dry nitrogen supply with the following characteristics is
required:
- H
2
O concentration : < 1 ppm
- O
2
concentration : < 1 ppm
- Dew point < 22 °C
- Dust < 1
μ
m
- Oil vapor < 0.1 ppm
- Absolute pressure of 100 to 120 kPa.
N
2
purge
Flow reduction device
The purge flow is continuous.
Connect the nitrogen supply to the DN 16 purge fitting*.
The nitrogen flow reduction device controls the pressure and
guarantees a flow rate of 50 sccm at pressure 110 kPa.
Note: N
2
supply can be equipped with a mass flow meter, and in this
case, it is not necessary to install the flow reduction device.
* Different connection accessories can be found in the manufacturer catalog.
Adjust the flow rate
Feed the nitrogen purge
throughout pumping according
to the flow rate and pressure
values in the scale given.
20
1.0
1.1
1.2
1.3
1.4
1.5
70
60
50
40
30
Flow rate (SCCM)
Purge 50 SCCM
Absolute pressure at inlet (kPa)
Purge device
for DN16 port
(50 sccm)
N
2
purge
ATHM
A
A
The nitrogen purge must
be connected directly to
the pump purge port.
The maximum pressure of the purge must not exceed 200 kPa.
adixen Vacuum Products - Operating instructions - ATH 2300 M/MT
