AE VarioMatch
TM
Match Network, VM 1000/1500 P
l
atform
By changing the tap position on this coil, you can adjust the match range for the size
of the load. The more coils that are active between the tap and the load capacitor, the
higher the resulting capacitance. The ideal position of the tap on the load coil depends
on the real part of the load impedance. For examp
l
e
,
lower load impedance requires
more capacitance of load capacitor, which requires more active coils.
The number of turns on the load coil depends on your unit. For examp
l
e
,
if you unit
contains a load coil with 3 tapped positions:
• Use the position closest to the load capacitor for small loads.
• Use t
h
e center position for medium size
l
oads.
• Use the position furthest from the load capacitor for
l
arge loads.
For specific recommendations, contact Global Services.
To Change the Tap Settings on the Load Coil:
1. Tum off RF from the generator.
2. Disconnect AC
MAINS.
3. Disconnect RF in (from the
RF-GENERATOR).
4. Disconnect RF o
u
t
(PLASMA/LOAD).
5. Remove the top cover, being careful to not damage the p
l
ug
l
eading to the fan:
a. Remove the
l
arge top cover (with the fan) from the V ario
M
a
t
ch match network
by unscrewing the twe
l
ve screws on the cover. Leave the small top and side
covers in place.
b. Disconnect the p
l
u
g leading from top lid to the fan.
6. Using a flathead screwdriver, unscrew the bolt from the current tap setting.
7. Move the lugged tap wire to the desired coil and screw the bolt into the tab (for
examp
l
es, see
Figure 5-
1
2
,
Figure 5-13
,
Figure 5-
1
4
).
57020080-00D
I
nstallation
,
Setup, and Ope
r
at
i
on
5-23
Summary of Contents for VarioMatch Match Network VM 1000 Platform
Page 2: ......
Page 6: ...Advanced Energy vi 57020080 00D...
Page 10: ...Advanced Energy X Table of Contents 57020080 00D...
Page 12: ...Advanced Energy xii List of Tables 57020080 00D...
Page 16: ...Advanced Energy 1 xvi 57020080 00D...
Page 30: ...Advanced Energy 2 8 Product Overview and T heory 57020080 00D...
Page 48: ...Advanced Energy 3 18 Specifications 57020080 00D...
Page 56: ...Advanced Energy 4 8 Communication Interfaces and Controls 57020080 00D...
Page 96: ...Advanced Energy 5 40 Installation Setup and Operation 57020080 00D...
Page 102: ...Advanced Energy 6 6 Troubleshooting and Global Services 57020080 00D...
Page 190: ...Advanced Energy 7 88 VarioMatch Match Network Tuning Ranges 57020080 00D...
