Aerotech AGV-14 HP, Hardware Manual

Page 1: ...Revision 2 00 AGV HP O Two Axis Galvo Scanner HARDWARE MANUAL...

Page 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Page 3: ...imensions 27 2 3 Securing the Scan Head to the Mounting Surface 41 2 4 Attaching the Focal Lens to the Scan Head 43 2 5 Air Requirements 45 2 6 Water Requirements 46 Chapter 3 Electrical Specification...

Page 4: ...Figure 2 10 AGV20HP BE2 Galvanometer Scanner Dimensions 36 Figure 2 11 AGV20HPO BE1 Galvanometer Scanner Dimensions 37 Figure 2 12 AGV20HPO BE2 Galvanometer Scanner Dimensions 38 Figure 2 13 AGV30HP...

Page 5: ...rror Specifications 22 Table 3 1 Motor and Feedback Connector Pinouts 49 Table 3 2 Mating Connector Part Numbers for the Motor and Feedback Connector 49 Table 3 3 Aerotech Motor and Feedback Cable Par...

Page 6: ...This page intentionally left blank List of Tables AGV HP O Hardware Manual 6 www aerotech com...

Page 7: ...e impaired l The life expectancy of the product could be decreased Safety notes and symbols are placed throughout this manual to warn you of the potential risks at the moment of the safety note or if...

Page 8: ...ional ground and safety precautions are required for applications that require access to the AGV HP O while it is energized DANGER Use of this product increases the risk of exposure to visible and or...

Page 9: ...assigned a particular hazard level which is indicated by the Laser Class label that is affixed to the device near the location where laser radiation is emitted Brief descriptions of each of the vario...

Page 10: ...a laser device that can generate a sufficiently intense beam a laser area will be produced that includes the aiming volume as well as the reflections from all objects that can be exposed to the radia...

Page 11: ...appropriate shutter as per any and all applicable regulations in order to prevent unwanted emission of the laser beam Place the beam shutter between the laser source and the scan head refer to Figure...

Page 12: ...This page intentionally left blank Laser Shutter AGV HP O Hardware Manual 12 www aerotech com...

Page 13: ...machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national imp...

Page 14: ...This page intentionally left blank EU Declaration of Incorporation AGV HP O Hardware Manual 14 www aerotech com...

Page 15: ...diameter etc may be fed into the beam entrance aperture Contact the factory for mirror and coating details Depending on the options selected for the particular scan head the beam exit aperture may be...

Page 16: ...Figure 1 2 Standard AGV HP Figure 1 3 Standard AGV HPO Chapter 1 Overview AGV HP O Hardware Manual 16 www aerotech com...

Page 17: ...HPO Beam Entry Orientation Required AGV10HP O AGV14HP O AGV20HP O AGV30HP O BE1 Right side standard Right side standard Right side standard Right side standard BE2 Left side Left side Left side N A Wa...

Page 18: ...3 mm 163 mm 255 mm Design Telecentric Telecentric L9 Wavelength 532 nm 1064 nm Focal Length 100 mm 170 mm Design L10 Wavelength 532 nm 1030 nm Focal Length 100 mm 100 mm Design Telecentric Telecentric...

Page 19: ...55 mm Design L21 Wavelength 343 nm Focal Length 53 mm Design Telecentric L22 Wavelength 343 nm Focal Length 163 mm Design Telecentric L23 Wavelength 343 nm Focal Length 255 mm Design 1 Input beam diam...

Page 20: ...lt in a 20 C 68 F environment Extreme temperature changes could cause a decrease in performance or permanent damage to the AGV HP O At a minimum the environmental temperature must be controlled to wit...

Page 21: ...hrs 15 rad 24 hrs Gain 10 ppm 24 hrs Thermal Drift Offset 10 rad C Gain 1 ppm C Mechanical Specifications Mass AGV HP 4 1 kg 4 4 kg 5 1 kg 5 8 kg Mass AGV HPO 2 5 kg 2 6 kg 2 9 kg 3 1 kg Material Alu...

Page 22: ...00 500 150 150 150 150 500 Air Cooling 10 mm 80 10 80 80 80 20 20 20 20 80 14 mm 400 50 400 400 400 100 100 100 100 400 20 mm 600 100 600 600 600 200 200 200 200 600 30 mm 1000 200 1000 1000 1000 300...

Page 23: ...1 4 Vacuum Operation Contact the factory for information about operation in a vacuum environment AGV HP O Hardware Manual 1 4 Vacuum Operation www aerotech com 23...

Page 24: ...This page intentionally left blank 1 4 Vacuum Operation AGV HP O Hardware Manual 24 www aerotech com...

Page 25: ...ntact Aerotech Global Technical Support DANGER Use of this product increases the risk of exposure to visible and or invisible laser radiation l Do not stare into the laser beam put your body parts in...

Page 26: ...owder free gloves when you handle optical components Lift only by the base of the scan head Carefully remove the AGV HP O from its protective shipping container Before operating the AGV HP O it is imp...

Page 27: ...2 2 Dimensions Figure 2 1 AGV10HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 27...

Page 28: ...Figure 2 2 AGV10HP BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 28 www aerotech com...

Page 29: ...Figure 2 3 AGV10HPO BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 29...

Page 30: ...Figure 2 4 AGV10HPO BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 30 www aerotech com...

Page 31: ...Figure 2 5 AGV14HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 31...

Page 32: ...Figure 2 6 AGV14HP BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 32 www aerotech com...

Page 33: ...Figure 2 7 AGV14HPO BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 33...

Page 34: ...Figure 2 8 AGV14HPO BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 34 www aerotech com...

Page 35: ...Figure 2 9 AGV20HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 35...

Page 36: ...Figure 2 10 AGV20HP BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 36 www aerotech com...

Page 37: ...Figure 2 11 AGV20HPO BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 37...

Page 38: ...Figure 2 12 AGV20HPO BE2 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 38 www aerotech com...

Page 39: ...Figure 2 13 AGV30HP BE1 Galvanometer Scanner Dimensions AGV HP O Hardware Manual 2 2 Dimensions www aerotech com 39...

Page 40: ...Figure 2 14 AGV30HPO BE1 Galvanometer Scanner Dimensions 2 2 Dimensions AGV HP O Hardware Manual 40 www aerotech com...

Page 41: ...the AGV HP O housing If you must machine a surface to achieve a required flatness machine the mounting surface l Keep the use of shims to a minimum when you mount the AGV HP O to the mount ing surfac...

Page 42: ...ith precision flatstones to remove any burrs or high spots 3 Clean the mounting flange and the mating surface of the scan head with the appropriate cleaners isopropyl alcohol for the scan head 4 Line...

Page 43: ...igurations that include a focal lens For AGV HP O scan heads that are provided without a focal lens the user is responsible for supplying both the F Theta lens and the necessary lens adapter Contact t...

Page 44: ...of the scan head 5 Make sure that the dowel pin in the lens adapter is aligned with the reference slot in the scan head and attach the lens adapter to the scan head using the appropriate hardware The...

Page 45: ...this feature Gas must be delivered through a polyurethane air hose with an outer diameter OD of l AGV HP 6 mm OD 4 mm ID l AGV HPO 4 mm OD 2 mm ID Unless otherwise specified a gas flow rate of 20 SLPM...

Page 46: ...ct the factory to discuss the specifics of your application A supply of coolant is necessary for AGV HP O models furnished with the WC water cooling option This feature requires a source of distilled...

Page 47: ...nditions that are approved in this manual Electrical installation requirements will depend on the ordered product options Installation instructions in this section are for Aerotech products equipped w...

Page 48: ...arrive from the factory completely wired and assembled The AGV scan heads contain galvano motors with dual analog encoder feedback Both the primary and secondary position feedback signals of each gal...

Page 49: ...4 SIN1 Encoder Sine 1 15 COS1 Encoder Cosine 1 16 5V Common Ground 17 SIN2 Encoder Sine 2 18 COS2 Encoder Cosine 2 19 CCW LMT The limit signal that shows the maximum permitted machine travel in negati...

Page 50: ...factory Contact your Aerotech representative if you have any questions on system configuration For cable drawings refer to the documentation that shipped with your system Table 3 3 Aerotech Motor and...

Page 51: ...Figure 3 1 Motor and Feedback Wiring AGV HP O Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 51...

Page 52: ...coder 1 Vpk pk into 120 Load differential signals SIN SIN COS COS are 5 V pk pk relative to ground Encoder Resolution 4096 lines revolution Motor Specifications AGV10HP O AGV14HP O AGV20HP O AGV30HP O...

Page 53: ...ming direction of a stage is set by the controller that is used to move the stage The galvo motors for each axis have internal electrical limits for both positive and negative machine direction motion...

Page 54: ...Figure 3 4 BE2 Galvo X Axis Machine Direction front Figure 3 5 BE2 Galvo Y Axis Machine Direction side 3 4 Limits Marker and Machine Direction AGV HP O Hardware Manual 54 www aerotech com...

Page 55: ...3 5 Feedback Phasing Figure 3 6 Analog Encoder Phasing Reference Diagram AGV HP O Hardware Manual 3 5 Feedback Phasing www aerotech com 55...

Page 56: ...This page intentionally left blank 3 5 Feedback Phasing AGV HP O Hardware Manual 56 www aerotech com...

Page 57: ...Use the system application s and conditions duty cycle speed and environment to define the inspection interval Monthly inspections should include but not be limited to l Visually inspect the galvo co...

Page 58: ...mponent lifetime The cleaning procedure for the AGV HP O is intended to help prolong the component lifetime IMPORTANT Wear clean powder free gloves when you handle optical components DANGER Make sure...

Page 59: ...sensitive and should only be cleaned when it is absolutely necessary and only by experienced personnel In many cases minor imperfections in the surface of the mirror can be less harmful than the surfa...

Page 60: ...ion 3 2 and the controller documentation Scanners oscillate or squeal Gains not optimized Refer to the controller documentation for tuning instructions Encoder signals not optimized Refer to the contr...

Page 61: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Page 62: ...rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site N...

Page 63: ...lectrical Specifications and Installation with new motor specifications 1 04 Revision changes have been archived If you need a copy of this revision contact Aerotech Global Technical Support 1 03 1 02...

Page 64: ...This page intentionally left blank Appendix B Revision History AGV HP O Hardware Manual 64 www aerotech com...

Page 65: ...Recommended 57 cleaning the turning mirrors 59 compressed air 45 coolant 46 D Dimensions 27 Directive 2006 42 EC 13 E Electrical Installation 47 EN 60204 1 2010 13 EN ISO 12100 2010 13 EU 2015 863 13...

Page 66: ...al number 26 Service and Inspection Schedule 57 solvents 57 stabilizing stage 26 stage stabilizing 26 T Table of Contents 3 Temperature Effects 20 Turning Mirrors 59 U Unpacking and Handling the Scan...