1.3. Basic Specifications
Table 1-3:
AGV3D Series Specifications
AGV3D-20
AGV3D-30
Optical Specifications
Compatible Wavelength
(1)
343 nm, 355 nm, 515 nm, 532 nm, 1030 nm, 1064 nm,
1550 nm, 9.3 µm, 10.6 µm
Aperture
20 mm
30 mm
Input Beam Diameter (1/e
2
)
8 mm
12 mm
Beam Displacement
23.2 mm
35.7 mm
Dynamic Performance
Tracking Error
0 µsec
Peak Acceleration
Galvo Scanners
500,000 rad/s
2
350,000 rad/s
2
Z-Focus
(2)
150 m/s
2
Continuous Acceleration
Galvo Scanners
130,000 rad/s
2
120,000 rad/s
2
Z-Focus
(2)
50 m/s
2
Maximum Positioning
Speed
Galvo Scanners
300 rad/s
40 m/s at 100x100 mm FOV
400 m/s 1000x1000 mm
FOV
125 rad/s
17 m/s at 100x100 mm FOV
170 m/s at 1000x1000 mm
FOV
Z-Focus
1000 mm/s
(2)
3.8 m/s at 160 mm working distance
30 m/s at 500 mm working distance
100 m/s at 1000 mm working distance
Processing Speed
(3)
Galvo Scanners
50 rad/s
at 100x100 mm FOV: 6.5 m/s
at 1000x1000 mm FOV: 65 m/s
Z-Focus
500 mm/s
(2)
1.9 m/s at 160 mm working distance
15 m/s at 500 mm working distance
50 m/s at 1000 mm working distance
Stability
Long-Term Drift
(4)
Galvo Scanners
10 µrad / 12 h
Z-Focus
0.5 μm / 12 h
Thermal Drift
Galvo Scanners
10 µrad / °C
Z-Focus
2.5 μm / °C
NOTE: All angles are optical unless otherwise noted. All specifications are per axis unless noted.
(1) Contact Aerotech to inquire about additional wavelengths.
(2) As measured at the focusing apparatus.
(3) The processing speed is dependent on the allowable tracking error. It is achievable with < 2% velocity error over
continuous velocity portion of the move.
(4) After an initial three hour warm-up, expect an ambient temperature variation of < ±0.5°.
(5) Without -AC air cooling option.
(6) Air specifications: Nitrogen must be 99.99% pure and filtered to 0.25 μm. Compressed air must be filtered to 0.25 μm,
dry to 0º F dew point and oil free.
(7) The working distance is measured from the bottom surface of the scan head.
1.3. Basic Specifications
AGV3D Hardware Manual
20
www.aerotech.com
Summary of Contents for AGV3D Series
Page 1: ...Revision 2 00 AGV3D Three Axis Laser Scan Head HARDWARE MANUAL...
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Page 12: ...This page intentionally left blank Laser Shutter AGV3D Hardware Manual 12 www aerotech com...
Page 16: ...Figure 1 2 Standard AGV3D Chapter 1 Overview AGV3D Hardware Manual 16 www aerotech com...
