ANT95V-3 Hardware Manual
Overview
1.3. Basic Specifications
N O T E :
Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3:
ANT95V-3 Series Specifications
ANT95V-3
Travel
3 mm
Accuracy
(1)
Base
±2 µm
PLUS
(5)
±200 nm
Resolution (Minimum Incremental
Motion)
1 nm
Bidirectional
Repeatability
(1)
Base
±150 nm
PLUS
(5)
±100 nm
Unidirectional Repeatability
±75 nm
Straightness
(1)
±1.0 µm (±40 µin)
Pitch
(1)
20 arc sec
Roll
(1)
10 arc sec
Yaw
(1)
10 arc sec
Maximum Speed
75 mm/s (3 in/s)
Maximum Acceleration (No Load)
0.4 g - 4 m/s
2
Settling Time
See Figure
In-Position Stability
(2)
<1 nm
Maximum Force (Continuous)
71 N
Load Capacity
(3)
1.5 kg (3.3 lb)
Moving Mass
1.1 kg (2.42 lb)
Stage Mass
20 kg (4.4 lb)
Material
Aluminum and Stainless-Steel Body/Black Hardcoat
Finish/Black Anodize Finish
Mean Time Between Failure
30,000 Hours
1. Certified with each stage.
2. Measured perpendicular or parallel to wedge direction.
3. In-Position Jitter listing is 3 sigma value.
4. Assumes loading along axis of travel.
5. Requires the use of an Aerotech controller.
• Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
www.aerotech.com
Chapter 1
11
