Overview
ECO165LM Hardware Manual
1.3. Basic Specifications
N O T E :
Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3:
ECO165LM Series Specifications (-0100 to -0250)
-0100
-0150
-0200
-0250
Travel
100 mm
150 mm
200 mm
250 mm
Accuracy
(1)
Standard
±6 μm
±8 μm
±10 μm
±12 μm
Calibrated
±1.5 μm
±1.5 μm
±2 μm
±2 μm
Resolution (Minimum Incremental Motion)
10 nm
Bidirectional Repeatability
(1)
±0.75 μm
Horizontal Straightness
(1)
±3 μm
±4 μm
±5 μm
±6 μm
Vertical Straightness
(1)
±3 μm
±4 μm
±5 μm
±6 μm
Pitch
40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
50 μrad
(10.3 arc
sec)
55 μrad
(11.3 arc
sec)
Roll
40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
50 μrad
(10.3 arc
sec)
55 μrad
(11.3 arc
sec)
Yaw
40 μrad
(8.2 arc sec)
40 μrad
(8.2 arc sec)
50 μrad
(10.3 arc
sec)
55 μrad
(11.3 arc
sec)
Maximum Speed
(2)
2 m/s
Maximum Acceleration
(2)
1.5 g
Maximum Force,
Continuous
M1
36.5 N
M2
77.7 N
Load Capacity
(3)
Horizontal
45 kg
Side
45 kg
Moving Mass
2.1 kg
Stage Mass
M1
6.4 kg
7.1 kg
7.7 kg
8.3 kg
M2
7.2 kg
8.0 kg
8.8 kg
9.6 kg
Material
Anodized Aluminum
Mean Time Between Failure
20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
14
Chapter 1
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