Mechanical Specifications and Installation
ECO165LM Hardware Manual
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The ECO165LM must be mounted securely. Improper mounting can result in
injury and damage to the equipment.
W A R N I N G : Make sure that all moving parts are secure before moving the ECO165LM.
Unsecured moving parts may shift and cause bodily injury.
W A R N I N G : Do not attempt to manually move the ECO165LM if it is connected to a power
source.
D A N G E R :
PINCH POINT!
Keep Hands Clear while the stage is in motion.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the ECO165LM stage. When it is mounted to a non-flat surface, the stage can be distorted
as the mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E :
The ECO165LM is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the ECO165LM. Shimming should be avoided if possible. If shimming is required, it
should be minimized to retain maximum rigidity of the system.
Table 2-1:
Stage Mounting Surface Flatness Requirement
Stage Travel
Flatness Requirement
All Travels
7.5 µm
If necessary, manually move the stage table to access the mounting holes along the edges of the stage.
This stage is designed to use socket head cap screws (SHCS) to secure the base to the mounting surface.
N O T E :
If the stage is not connected to a power source, the stage should move freely by hand. Do not
attempt to manually move the stage if it is connected to a power source.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in
are typical values and may not be accurate for your
mounting surface. Refer to
for specific model mounting locations and dimensions.
Table 2-2:
Stage to Mounting Surface Hardware
Mounting Hardware
Typical Screw Torque
M6 x 22 mm (or 1/4" x 7/8") SHCS with flat washers
7 N·m [5 ft·lb]
22
Chapter 2
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