PRO560LM Hardware Manual
Overview
Table 1-4:
PRO560LM Series Specifications (-0800 to -1500)
PRO560LM
-0800
-1000
-1200
-1500
Travel
800 mm
1000 mm
1200 mm
1500 mm
Accuracy
(1)
Standard
±17 μm
±18 μm
±21 μm
±22 μm
Calibrated
±1.5 μm
±1.5 μm
±2 μm
±2 μm
Resolution (Minimum Incremental
Motion)
5 nm (-E1 Encoder),
10 nm (-E3 Encoder)
Bidirectional Repeatability
(1)
±0.5 μm
±0.5 μm
±0.5 μm
±0.5 μm
Horizontal Straightness
(1)
±7 μm
±8 μm
±8.5 μm
±9.5 μm
Vertical Straightness
(1)
±7 μm
±8 μm
±8.5 μm
±9.5 μm
Pitch
90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Roll
73 μrad
(15.1 arc sec)
87 μrad
(17.9 arc sec)
97 μrad
(20.0 arc sec)
107 μrad
(22.1 arc sec)
Yaw
90 μrad
(18.6 arc sec)
110 μrad
(22.7 arc sec)
120 μrad
(24.7 arc sec)
130 μrad
(26.8 arc sec)
Maximum Speed
(2)
2 m/s
Maximum Acceleration
(2)
3 g
Maximum Force, Continuous
532.4 N – Standard
792.6 N – With Air Cooling (20 psig)
Load Capacity
(3)
Horizontal
150 kg
Side
150 kg
Moving Mass
25.0 kg
Stage Mass
135.9 kg
154.1 kg
172.3 kg
199.6 kg
Material
Anodized Aluminum
Mean Time Between Failure
20,000 Hours
1. Certified with the PL1 option.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
www.aerotech.com
Chapter 1
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