Aerotech PRO560LM Series, Hardware Manual

Page 1: ...Revision 1 05 00 PRO560LM Hardware Manual ...

Page 2: ...tech com Phone 1 412 967 6440 Fax 1 412 967 6870 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom China Email Support aerotech com Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email Support aerotech com Phone 86 21 5508 6731 Germany Taiwan Email Support aerotech com Phone 49 0 911 967 9370 Fax 49 0 911 967 93720 Email Support aerotech com Phone 886 0 2 8751 6690 France Email ...

Page 3: ...ng and Handling the Stage 17 2 2 Dimensions 20 2 3 Securing the Stage to the Mounting Surface 23 2 4 Attaching the Payload to the Stage 24 2 4 1 Speed Capability 25 Chapter 3 Electrical Specifications and Installation 27 3 1 Motor and Feedback Connectors 28 3 2 Motor and Feedback Wiring 34 3 3 Motor and Feedback Specifications 36 3 4 Limits Marker and Machine Direction 38 3 5 Motor and Feedback Ph...

Page 4: ...Load Capability of PRO560LM Series Stages 25 Figure 2 7 Stage Orientations 25 Figure 3 1 Ground Connection Points for the CMS0 Option 28 Figure 3 2 Motor and Feedback Wiring 34 Figure 3 3 Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage 35 Figure 3 4 Machine Direction 38 Figure 3 5 Hall Phasing 39 Figure 3 6 Analog Encoder Phasing Reference Diagram E1 Incremental Encoder 40 Fi...

Page 5: ...able 3 3 Feedback Connector Pinout E1 and E2 Options 30 Table 3 4 Mating Connector Part Numbers for the Feedback Connector 30 Table 3 5 Feedback Connector Pinout E3 Option 31 Table 3 6 Mating Connector Part Numbers for the Feedback Connector 31 Table 3 7 General Motor Connector Pinout for Z or T Axes 32 Table 3 8 Mating Connector Part Numbers for the Motor Connector 32 Table 3 9 General Feedback C...

Page 6: ...Table of Contents PRO560LM Hardware Manual 6 www aerotech com This page intentionally left blank ...

Page 7: ...be followed 1 Access to the PRO560LM and component parts must be restricted while connected to a power source 2 Do not connect or disconnect any electrical components or connecting cables while connected to a power source 3 Disconnect electrical power before servicing equipment 4 All components must be properly grounded in accordance with local electrical safety requirements 5 Operator safeguardin...

Page 8: ...Safety PRO560LM Hardware Manual 8 www aerotech com This page intentionally left blank ...

Page 9: ...further more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration This is to certify ...

Page 10: ...Declaration of Conformity PRO560LM Hardware Manual 10 www aerotech com This page intentionally left blank ...

Page 11: ...el stage 1500 1500 mm travel stage Mounting Orientation Required Normal mounting orientation MT1 Side mounted or vertical orientation MT2 Inverted mounting orientation Tabletop Required TT1 Tabletop with metric dimension mounting TT2 Tabletop with English dimension mounting TT3 Accessory tabletop with mounting for select rotary stages TT4 Tabletop with metric dimension mounting and wiper brushes T...

Page 12: ...n single or lower axis NOTE An A3200 controller must be used with the TCMP option Metrology Required PL0 No metrology performance plots PL1 Uncalibrated with performance plots PL2 Calibrated with performance plots Accessories To be Ordered as a Separate Line Item ALIGN NPA Non precision XY assembly ALIGN NPAZ Non precision XZ or YZ assembly ALIGN PA10 XY assembly 10 arc sec orthogonality Alignment...

Page 13: ...ronment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating The PRO560LM stages have limited protection against dust but not water This equates to an ingress protection rating of IP50 Use Indoor use only 1 2 Accuracy and Temperature Effects The accuracy specification of PRO560LM series stages i...

Page 14: ... 1 arc sec 60 μrad 12 4 arc sec 70 μrad 14 4 arc sec 78 μrad 16 1 arc sec Roll 39 μrad 8 0 arc sec 44 μrad 9 1 arc sec 53 μrad 10 9 arc sec 58 μrad 12 0 arc sec Yaw 49 μrad 10 1 arc sec 60 μrad 12 4 arc sec 70 μrad 14 4 arc sec 78 μrad 16 1 arc sec Maximum Speed 2 2 m s Maximum Acceleration 2 3 g Maximum Force Continuous 532 4 N Standard 792 6 N With Air Cooling 20 psig Load Capacity 3 Horizontal ...

Page 15: ...ad 22 1 arc sec Yaw 90 μrad 18 6 arc sec 110 μrad 22 7 arc sec 120 μrad 24 7 arc sec 130 μrad 26 8 arc sec Maximum Speed 2 2 m s Maximum Acceleration 2 3 g Maximum Force Continuous 532 4 N Standard 792 6 N With Air Cooling 20 psig Load Capacity 3 Horizontal 150 kg Side 150 kg Moving Mass 25 0 kg Stage Mass 135 9 kg 154 1 kg 172 3 kg 199 6 kg Material Anodized Aluminum Mean Time Between Failure 20 ...

Page 16: ...olyethylene gloves to prevent any contaminants from adhering to the surface of the PRO560LM 3 During installation use cleaned vented stainless steel fasteners when securing the PRO560LM 4 Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vacuum compatible lubricants could result in excessive motor operating temperatures Because of this consider all ...

Page 17: ...mooth flat and clean surface Before operating the PRO560LM it is important to let it stabilize at room temperature for at least 12 hours Allowing it to stabilize to room temperature will ensure that all of the alignments preloads and tolerances are the same as they were when tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during ...

Page 18: ...nual Figure 2 1 Shipping Brackets Used on Single Axis Stages or Upper Axes of XY Systems N OTE After removing the shipping brackets retain them for future use Do not transport or ship the PRO560LM without the shipping brackets attached 18 Chapter 2 www aerotech com ...

Page 19: ...re threaded into the stage base These must be removed for the stage to operate Retain the lifting hardware for future use If the stage must be lifted in the future reattach the shipping brackets and the lifting hardware If the stage is part of a multi axis system attach the lifting features to the lower axis Figure 2 2 PRO560LM Series Stage with Lifting Features N OTE After removing the shipping b...

Page 20: ...Mechanical Specifications and Installation PRO560LM Hardware Manual 2 2 Dimensions Figure 2 3 PRO560LM Dimensions 20 Chapter 2 www aerotech com ...

Page 21: ...PRO560LM Hardware Manual Mechanical Specifications and Installation Figure 2 4 PRO560LM Accessory Tabletop Dimensions TT3 TT6 Options www aerotech com Chapter 2 21 ...

Page 22: ...Mechanical Specifications and Installation PRO560LM Hardware Manual Figure 2 5 Dimensions for Stages without a Cable Management System CMS0 Option 22 Chapter 2 www aerotech com ...

Page 23: ...ly dry Gently place the stage on the mounting surface N OTE The PRO560LM is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the mounting surface rather than the PRO560LM Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigid...

Page 24: ...propriate and servo instability can occur Refer to the controller help file for tuning assistance The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance N OTE For valid system performance the mounting interface should be flat within 12 µm W A R N I N G Refer to the dimensions in Section 2 2 for maximum allowable thread engagement A screw extending thr...

Page 25: ... for the PRO560LM Achievable speeds are application dependent and determined by factors such as travel length payload amplifier sizing and duty cycle The Motor Sizer application supplied by Aerotech at https www aerotech com resources motor sizer aspx can be used to estimate allowable speeds and accelerations based on these parameters Consult with an Aerotech Applications Engineer to specify the s...

Page 26: ...Mechanical Specifications and Installation PRO560LM Hardware Manual 26 Chapter 2 www aerotech com This page intentionally left blank ...

Page 27: ...egration was purchased an electrical drawing showing system interconnects has been supplied with the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the sections that follow for standard motor wiring and connector pinouts W A R N I N G Applications requiring access to the stage while it is energized will require additi...

Page 28: ...his stage into the final application D A N G E R Remove power before connecting or disconnecting electrical components or cables Failure to do so may cause electric shock or damage to the equipment W A R N I N G The protective ground connection must be properly installed to minimize the possibility of electric shock W A R N I N G For stages with the CMS0 option Ground wire connection points are pr...

Page 29: ...se B A3 Motor Phase C 1 Reserved 2 Reserved 3 Reserved 4 Reserved 5 Reserved A4 Frame ground motor protective ground Table 3 2 Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17E 1726 2 Sockets QTY 4 ECK00659 ITT Cannon DM53744 6 Connector ECK00657 ITT Cannon DBM9W4SA197 www aerotech com Chapter 3 29 ...

Page 30: ...Reserved 10 Hall Effect sensor phase A 11 Hall Effect sensor phase C 12 Positive CW hardware limit 13 Reserved 14 Cosine 15 Cosine N 16 5 V power supply 17 Sine 18 Sine N 19 Reserved 20 Common ground to limit switch 21 Common ground to encoder power 22 Reserved 23 Reserved 24 Negative CCW hardware limit 25 Reserved Table 3 4 Mating Connector Part Numbers for the Feedback Connector Mating Connector...

Page 31: ...6 Clock 7 Clock 8 Data 9 Reserved 10 Hall Effect sensor phase A 11 Hall Effect sensor phase C 12 Reserved 13 Reserved 14 Reserved 15 Reserved 16 5 V power supply 17 Reserved 18 Reserved 19 Data 20 Common ground 21 Common ground 22 Reserved 23 Reserved 24 Reserved 25 Reserved Table 3 6 Mating Connector Part Numbers for the Feedback Connector Mating Connector Aerotech P N Third Party P N Backshell E...

Page 32: ...1 31 A2 Motor Phase B 16 1 31 A3 Motor Phase C 16 1 31 1 Reserved 2 Reserved 3 Reserved 4 Reserved 5 Reserved A4 Frame ground motor protective ground 16 1 31 Table 3 8 Mating Connector Part Numbers for the Motor Connector Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17E 1726 2 Sockets QTY 4 ECK00659 ITT Cannon DM53744 6 Connector ECK00657 ITT Cannon DBM9W4SA197 32 Chap...

Page 33: ...9 11 Hall Effect sensor phase C 26 0 129 12 Positive CW hardware limit 26 0 129 13 Reserved Brake 1 26 0 129 14 Cosine 26 0 129 15 Cosine N 26 0 129 16 5 V power supply 26 0 129 17 Sine 26 0 129 18 Sine N 26 0 129 19 Reserved 20 Common ground to limit switch 26 0 129 21 Common ground to encoder power 26 0 129 22 Reserved 23 Reserved 24 Negative CCW hardware limit 26 0 129 25 Reserved Brake 1 26 0 ...

Page 34: ...ifications and Installation PRO560LM Hardware Manual 3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 2 Motor and Feedback Wiring 34 Chapter 3 www aerotech com ...

Page 35: ...PRO560LM Hardware Manual Electrical Specifications and Installation Figure 3 3 Motor and Feedback Wiring for a Typical Vertical or Rotary Axis Stage www aerotech com Chapter 3 35 ...

Page 36: ...ifferential signals SIN SIN COS COS are 5 V pk pk relative to ground Digital Output Incremental Encoder RS422 485 compatible Serial Output Absolute Encoder EnDat 2 2 with 36 bit word Limit Switch Specifications Supply Voltage 5 V 5 Supply Current 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Polarity Normally Closed NC l Sinks current to ground Logic 0 whe...

Page 37: ...ximum Bus Voltage VDC 340 Magnetic Pole Pitch mm in 30 00 1 18 1 Performance is dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms current consult Aerotech 4 Force constant and motor constant specified at stall 5 Al...

Page 38: ...back and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while machine direction is hardwired in the stage Figure 3 4 shows the machine direction of PRO560LM stages Figure 3 4 Machi...

Page 39: ...dware Manual Electrical Specifications and Installation 3 5 Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 5 Hall Phasing www aerotech com Chapter 3 39 ...

Page 40: ...ations and Installation PRO560LM Hardware Manual Figure 3 6 Analog Encoder Phasing Reference Diagram E1 Incremental Encoder Figure 3 7 Encoder Phasing Reference Diagram E2 Incremental Encoder 40 Chapter 3 www aerotech com ...

Page 41: ...peed and environment In general stages operating in a clean environment should be cleaned and lubricated annually or every 500 km whichever comes first For stages operating under conditions involving excessive debris the stage should be cleaned every six months For high speed applications those near max speed at a duty cycle of 50 frequent maintenance with standard lubricants is required Monthly i...

Page 42: ... or making adjustments to the equipment Cleaning If a solvent is necessary for cleaning the stage Aerotech recommends using isopropyl alcohol Harsher solvents such as acetone may damage the plastic and end caps on the bearing trucks W A R N I N G Make sure that all solvent has completely evaporated before attempting to move the stage Lubrication Aerotech recommends that you use only Kluberplex BEM...

Page 43: ...ous film of lubricant to the linear bearing guides A good quality natural bristle artist s brush makes an excellent applicator 7 Manually move the stage to the opposite end of travel This will work the grease into the linear bearing guides 8 Repeat steps 3 through 5 for any areas covered by the original table position 9 Refasten the hardcover First Generation Stages Only Torque the hardcover screw...

Page 44: ...Maintenance PRO560LM Hardware Manual Figure 4 1 Endplate Cover Removal Step 2 Figure 4 2 Hardcover Screw Removal Step 3 44 Chapter 4 www aerotech com ...

Page 45: ...PRO560LM Hardware Manual Maintenance Figure 4 3 Hardcover Removal Step 3 www aerotech com Chapter 4 45 ...

Page 46: ... polarity and compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Chapter 3 and Controller documentation Motor Connections refer to Chapter 3 and the Controller documentation Stage oscillates or squeals Gains misadjusted refer to the Controller documenta...

Page 47: ... such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thir...

Page 48: ... problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an ...

Page 49: ...Product redesign l Safety information updated l Order and part number specifications updated Chapter 1 l Added ThermoComp information l Updated specifications Section 3 3 Motor and Feedback Specifications 1 02 00 Revision changes have been archived If you need a copy of this revision contact Aerotech Global Technical Support 1 01 00 1 00 00 www aerotech com Appendix B 49 ...

Page 50: ...Revision History PRO560LM Hardware Manual 50 Appendix B www aerotech com This page intentionally left blank ...

Page 51: ... Humidity 13 I inspection schedule 41 Inspection Schedule 41 isopropyl alcohol 42 L label 17 Lifting Instructions 19 Limit Switch Specifications 36 lubricants vacuum operation 16 Lubrication 42 lubrication schedule 41 M Maximum Achievable Velocity 25 Motor Specifications 37 mounting surface cleaning 23 securing stage 23 multiaxis combinations 42 P part number 17 Possible Cause 46 Protection Rating...

Page 52: ...17 stage distortion 23 stabilizing 17 Support 2 Symptom 46 T Technical Support 2 Thermistor Specifications 36 U Unpacking and Handling the Stage 17 V vacuum 16 vacuum guidelines 16 Vibration 13 W Warranty and Field Service 47 52 Index www aerotech com ...