Agilent Technologies 4155B, User Manual

Page 1: ...155B Semiconductor Parameter Analyzer Agilent 4156B Precision Semiconductor Parameter Analyzer Agilent Part No 04156 90710 Printed in Japan May 2000 Edition 4 Advanced Test Equipment Rentals www ateco...

Page 2: ...g charges to return the product to Buyer However Buyer shall pay all shipping charges duties and taxes for products returned to Agilent Technologies from another country Agilent Technologies do not wa...

Page 3: ...event will Agilent Technologies or its suppliers be liable for loss of date or for direct special incidental consequential including lost profit or date or other damage whether based in contract tort...

Page 4: ...0 Edition 4 May 2000 Microsoft Windows Windows NT Visial Basic and Visual C C are registered trademarks of Microsoft Corporation Borland C C Builder is registered trademark of International Inc LabWin...

Page 5: ...uirements to use the 4155B 4156B VXIplug play driver and how to install the driver Driver Functions This chapter lists the all driver functions for the 4155B 4156B and Agilent E5250A Low Leakage Switc...

Page 6: ...6 Agilent 4155B 4156B VXIplug play Driver User s Guide Edition 4...

Page 7: ...56B 2 3 hp4156b_abortMeasure 2 6 hp4156b_addSampleSyncIv 2 6 hp4156b_addSampleSyncPulse 2 7 hp4156b_addStressSyncIv 2 8 hp4156b_addStressSyncPulse 2 9 hp4156b_autoCal 2 9 hp4156b_clearSampleSync 2 10...

Page 8: ...156b_init 2 22 hp4156b_measureM 2 23 hp4156b_measureP 2 24 hp4156b_offsetCancel 2 24 hp4156b_opc_Q 2 25 hp4156b_readData 2 25 hp4156b_readStatusByte_Q 2 26 hp4156b_recoverOutput 2 26 hp4156b_reset 2 2...

Page 9: ...utput 2 47 Driver Functions for the E5250A 2 48 hpe5250a_biasChanCard 2 50 hpe5250a_biasChanList 2 50 hpe5250a_biasChanList_Q 2 51 hpe5250a_biasPort 2 52 hpe5250a_biasState 2 52 hpe5250a_close 2 53 hp...

Page 10: ...tect_Q 2 66 hpe5250a_esr_Q 2 67 hpe5250a_func 2 67 hpe5250a_init 2 68 hpe5250a_opc_Q 2 68 hpe5250a_openCard 2 69 hpe5250a_openList 2 69 hpe5250a_openList_Q 2 70 hpe5250a_readStatusByte_Q 2 70 hpe5250a...

Page 11: ...Spot Measurements 3 30 Multi Channel Pulsed Spot Measurements 3 32 Pulsed Sweep Measurements 3 34 Multi Channel Pulsed Sweep Measurements 3 36 Staircase Sweep with Pulsed Bias Measurements 3 39 Sampl...

Page 12: ...9 Program Execution Flow 4 20 Panel Display 4 22 To Execute sample2 vee 4 23 Customizing Sample Programs 4 27 To Change an GPIB Address 4 28 To Change the Vth Measurement Setup 4 29 To Remove a Test D...

Page 13: ...Agilent 4155B 4156B VXIplug play Driver User s Guide Edition 4 1 Installation...

Page 14: ...4155B 4156B Software Requirements Hardware Requirements with HP VEE Installing 4155B 4156B Driver NOTE The hardware required depends on the operating system and programming language used This manual...

Page 15: ...sual Basic Microsoft Visual C Borland C C LabView LabWindows VXIplug play Driver Disk furnished with the 4155B 4156B 4155B 4156B Plug Play Driver Disk E5250A Plug Play Driver Disk NOTE If you use the...

Page 16: ...indows 95 16 Mbyte 24 Mbyte or more is recommended For Windows NT 24 Mbyte 32 Mbyte or more is recommended Hard disk minimum disk space 20 Mbytes for HP VEE version 4 0 2 Mbytes for 4155B 4156B driver...

Page 17: ...umber of the interface card as you may need it to configure the interface in step 3 2 Install VISA I O library Follow the instructions in the I O library s setup program 3 Configure and check the IEEE...

Page 18: ...he interface card is installed properly I_O Config automatically detects the hardware configuration The default names for SICL and VISA are assigned and listed as shown in the Configured Interface lis...

Page 19: ...installed in the directory hp4156b bas hp4156b c hp4156b def hp4156b fp hp4156b GID hp4156b h hp4156b hlp readme txt DelsL1 isu 3 If you are also installing the driver for the E5250A do the following...

Page 20: ...1 8 Agilent 4155B 4156B VXIplug play Driver User s Guide Edition 4 Installation Installing 4155B 4156B Driver...

Page 21: ...Agilent 4155B 4156B VXIplug play Driver User s Guide Edition 4 2 Driver Functions...

Page 22: ...Agilent 41555B 4156B and Agilent E5250A Driver Functions for the 4155B 4156B Driver Functions for the E5250A NOTE For additional information on each function refer to the on line help for the VXIplug...

Page 23: ...rror_message Queries for the driver errors hp4156b_revision_query Queries for the 4155B 4156B firmware driver revisions hp4156b_timeOut Sets the timeout hp4156b_timeOut_Q Queries for the timeout setti...

Page 24: ...tMeas Executes a high speed spot measurement hp4156b_measureM Executes a multi channel spot measurement hp4156b_sweepIv Executes a one channel sweep measurement hp4156b_sweepMiv Executes a multi chann...

Page 25: ...dString_Q Sends a command to read string response hp4156b_cmdInt16_Q Sends a command to read 16 bit integer response hp4156b_cmdInt16Arr_Q Sends a command to read 16 bit integer array response hp4156b...

Page 26: ...ng measurement point Sampling measurement channels are defined by the hp4156b_sample function and sampling measurement timing is defined by the hp4156b_setSample function Syntax ViStatus _VI_FUNC hp41...

Page 27: ...the sampling measurement timing you should define carefully both the hp4156b_addSampleSyncPulse timing parameters count period width delay rise and fall and the hp4156b_setSample timing parameters Syn...

Page 28: ...Instrument handle returned from hp4156b_init source Reference number of the stress source 1 2 3 or 4 channel Channel number of the stress source 1 to 6 SMU1 to SMU6 21 VSU1 22 VSU2 27 PGU1 or 28 PGU2...

Page 29: ...ViReal64 delay ViReal64 rise ViReal64 fall Parameters vi Instrument handle returned from hp4156b_init source Reference number of the stress source 1 2 3 or 4 channel Channel number of the pulse genera...

Page 30: ...the hp4156b_addStressSyncPulse function Syntax ViStatus _VI_FUNC hp4156b_clearStressSync ViSession vi Parameters vi Instrument handle returned from hp4156b_init hp4156b_close This function terminates...

Page 31: ...om hp4156b_init cmd_str Instrument command cannot exceed 256 bytes in length size Length of result in bytes 2 to 32767 result Response from instrument hp4156b_cmdInt This function passes the cmd_str s...

Page 32: ...Int32 count Parameters vi Instrument handle returned from hp4156b_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 res...

Page 33: ...Int32 count Parameters vi Instrument handle returned from hp4156b_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 res...

Page 34: ...nt command cannot exceed 256 bytes in length value Parameter for command 1E 300 to 1E 300 hp4156b_cmdReal64Arr_Q This function passes the cmd_str string to the instrument This command expects a respon...

Page 35: ...and get result Syntax ViStatus _VI_FUNC hp4156b_cmdString_Q ViSession vi ViString cmd_str ViInt32 size ViChar _VI_FAR result Parameters vi Instrument handle returned from hp4156b_init cmd_str Instrume...

Page 36: ...unction returns the error numbers and corresponding error messages in the error queue of a instrument See User s Guide Measurement and Analysis for a listing of the instrument error numbers and messag...

Page 37: ...ntax ViStatus _VI_FUNC hp4156b_errorQueryDetect ViSession vi ViBoolean errorQueryDetect Parameters vi Instrument handle returned from hp4156b_init errorQueryDetect Error checking enable VI_TRUE or dis...

Page 38: ...andle returned from hp4156b_init errstr Response from instrument Bit Value Message 1 ESR_OPC 2 ESR_RQL 4 ESR_QYE 8 ESR_DDE 16 ESR_EXE 32 ESR_CME 64 ESR_URQ 128 ESR_PON hp4156b_execCal This function ex...

Page 39: ...before executing this function If you define VMU for channel the VMU must be set to the differential voltage measurement mode by using the hp4156b_setVm function before executing this function Syntax...

Page 40: ...l number of the source unit 1 to 6 SMU1 to SMU6 21 VSU1 22 VSU2 27 PGU1 or 28 PGU2 mode Output mode 1 current output only for SMU or 2 voltage output range Output range 0 auto ranging or positive valu...

Page 41: ...ViReal64 peak ViReal64 width ViReal64 period ViReal64 delay ViReal64 rise ViReal64 fall Parameters vi Instrument handle returned from hp4156b_init channel Channel number of the pulse generator unit 2...

Page 42: ...he hp4156b_init function encounters an error then the value of the vi output parameter will be VI_NULL Syntax ViStatus _VI_FUNC hp4156b_init ViRsrc InstrDesc ViBoolean id_query ViBoolean do_reset ViPS...

Page 43: ...i ViInt32 channel ViInt32 mode ViReal64 range ViReal64 value ViInt32 status Parameters vi Instrument handle returned from hp4156b_init channel Channel number of the measurement unit Enter 0 zero at th...

Page 44: ...MU or 2 voltage measurement range Measurement range 0 auto ranging positive value limited auto ranging or negative value fixed range See below For current measurement 1E 11 to 1 0 A 1E 11 to 1 0 A or...

Page 45: ...x ViStatus _VI_FUNC hp4156b_readData ViSession vi ViPInt32 eod ViPInt32 data_type ViPReal64 value ViPInt32 status ViPInt32 channel Parameters vi Instrument handle returned from hp4156b_init eod End of...

Page 46: ...stored by the hp4156b_zeroOutput function and clears the stored unit settings Syntax ViStatus _VI_FUNC hp4156b_recoverOutput ViSession vi ViInt32 channel Parameters vi Instrument handle returned from...

Page 47: ...r revision and the instrument firmware revision Syntax ViStatus _VI_FUNC hp4156b_revision_query ViSession vi ViChar_VI_FAR driver_rev ViChar _VI_FAR instr_rev Parameters vi Instrument handle returned...

Page 48: ...lse function Syntax ViStatus _VI_FUNC hp4156b_sample ViSession vi ViInt32 channel ViInt32 mode ViReal64 range ViPInt32 point ViInt32 index ViReal64 value ViInt32 status Parameters vi Instrument handle...

Page 49: ...tup for the unit specified by channel 1 must be entered into mode 1 and range 1 And measurement data and status data of the unit specified by channel 1 will be returned by value M 1 and status M 1 res...

Page 50: ...1 Filter ON hp4156b_setInteg This function sets the integration time and sets the number of samples that are taken and averaged for the measurement Syntax ViStatus _VI_FUNC hp4156b_setInteg ViSession...

Page 51: ...trument handle returned from hp4156b_init channel Channel number of the sweep source 1 to 6 SMU1 to SMU6 21 VSU1 or 22 VSU2 mode Output mode 1 single linear 2 single log 3 double linear or 4 double lo...

Page 52: ...l64 width ViReal64 period ViReal64 hold ViReal64 comp Parameters vi Instrument handle returned from hp4156b_init channel Channel number of the pulse source 1 to 6 SMU1 to SMU6 21 VSU1 or 22 VSU2 mode...

Page 53: ...etPguR This function sets the PGU output impedance Syntax ViStatus _VI_FUNC hp4156b_setPguR ViSession vi ViInt32 channel ViInt32 state Parameters vi Instrument handle returned from hp4156b_init channe...

Page 54: ...r 22 VSU2 mode Output mode 1 single linear 2 single log 3 double linear or 4 double log Use positive value for voltage output use negative value for current output only for SMU range Output range 0 au...

Page 55: ...5 35 seconds interval Sampling interval 60E 6 to 65 534 seconds point Number of sampling points 1 to 10001 hp4156b_setStress This function sets the timing parameters of the stress See hp4156b_stress o...

Page 56: ...chronizes the staircase sweep output by the hp4156b_setIv function and the pulse output by the hp4156b_setPbias function Syntax ViStatus _VI_FUNC hp4156b_setSweepSync ViSession vi ViInt32 channel ViIn...

Page 57: ...vi Instrument handle returned from hp4156b_init channel Channel number of the unit 1 to 6 SMU1 to SMU6 21 VSU1 22 VSU2 23 VMU1 24 VMU2 26 GNDU 27 PGU1 or 28 PGU2 state Output switch setting 0 output...

Page 58: ...ers vi Instrument handle returned from hp4156b_init channel Channel number of the measurement unit 1 to 6 SMU1 to SMU6 23 VMU1 or 24 VMU2 mode Measurement mode 1 current measurement only for SMU or 2...

Page 59: ...2 source Parameters vi Instrument handle returned from hp4156b_init meas_type Measurement type 1 multi spot 2 staircase sweep 3 pulse spot 4 pulse sweep 5 sweep with pulsed bias 10 sampling or 11 stre...

Page 60: ...vf_stop ViInt32 osc_stop ViInt32 last_mode Parameters vi Instrument handle returned from hp4156b_init occ_stop Automatic abort function by compliance of another unit 0 disables this abort mode or 1 en...

Page 61: ...tus 0 no error or 1 to 255 error status Remarks The following parameters must be set within the range shown in the following table The period is a parameter of hp4156b_setStress function And width and...

Page 62: ...tion point parameter Syntax ViStatus _VI_FUNC hp4156b_sweepIv ViSession vi ViInt32 channel ViInt32 mode ViReal64 range ViPInt32 point ViReal64 source ViReal64 value ViInt32 status Parameters vi Instru...

Page 63: ...t handle returned from hp4156b_init channel Channel number of the measurement unit Enter 0 zero at the end of the unit definition for channel For example if you use two units the first and second elem...

Page 64: ...l64 status M N where N Number of channels used for the measurements plus 1 or more M Number of sweep points point parameter value of hp4156b_setIv function or more For the parameter definition the ord...

Page 65: ...ints defined by the hp4156b_setIv function point parameter Syntax ViStatus _VI_FUNC hp4156b_sweepPbias ViSession vi ViInt32 channel ViInt32 mode ViReal64 range ViPInt32 point ViReal64 source ViReal64...

Page 66: ...b_setSweepSync function Syntax ViStatus_VI_FUNC hp4156b_sweepPiv ViSession vi ViInt32 channel ViInt32 mode ViReal64 range ViPInt32 point ViReal64 source ViReal64 value ViInt32 status Parameters vi Ins...

Page 67: ...s the timeout value for driver I O transactions in milliseconds Syntax ViStatus_VI_FUNC hp4156b_timeOut_Q ViSession vi ViPInt32 pTimeOut Parameters vi Instrument handle returned from hp4156b_init pTim...

Page 68: ...code message hpe5250a_error_message Queries for the driver error hpe5250a_revision_query Queries for the E5250A firmware driver revisions hpe5250a_timeOut Sets the timeout hpe5250a_timeOut_Q Queries...

Page 69: ...ec_Q Executes the relay front panel controller test hpe5250a_testClear Clears the test result Passthrough Functions hpe5250a_cmd Sends a command hpe5250a_cmdInt Sends a command with an integer paramet...

Page 70: ...nc hpe5250a_biasChanList This function will enable or disable bias on all the output ports specified by the biaschan_list The parameter biaschan_list is an array of integers with each integer represen...

Page 71: ...h biaschan_list parameter Syntax ViStatus _VI_FUNC hpe5250a_biasChanList_Q ViSession vi ViInt16 bias_disen ViInt32 _VI_FAR biaschan_list ViInt32 _VI_FAR bias_status Parameters vi Instrument handle ret...

Page 72: ...the configuration mode see hpe5250a_func bias_port Input port number to be set to the bias port 1 to 10 input port 1 to input port 10 hpe5250a_biasState This function controls the bias mode for the s...

Page 73: ...the card for the channels closed of the specified card The parameter closechan_list contains the channel numbers returned by the instrument This will be an array of integers terminated by zero to iden...

Page 74: ...the closechan_list should be 0 numeric zero to identify the end of the list The maximum number of channels that can be specified by the list is 100 Syntax ViStatus _VI_FUNC hpe5250a_closeList ViSessi...

Page 75: ...ith closechan_list parameter Syntax ViStatus _VI_FUNC hpe5250a_closeList_Q ViSession vi ViInt32_VI_FAR closechan_list ViInt32 _VI_FAR close_status Parameters vi Instrument handle returned from hpe5250...

Page 76: ...om hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Length of result in bytes 2 to 32767 result Response from instrument hpe5250a_cmdInt This function passes the cmd_str...

Page 77: ...Int32 count Parameters vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 re...

Page 78: ...Int32 count Parameters vi Instrument handle returned from hpe5250a_init cmd_str Instrument command cannot exceed 256 bytes in length size Size of result number of items in the array 1 to 2147483647 re...

Page 79: ...ent command cannot exceed 256 bytes in length value Parameter for command 1E 300 to 1E 300 hpe5250a_cmdReal64Arr_Q This function passes the cmd_str string to the instrument This command expects a resp...

Page 80: ...str Instrument command cannot exceed 256 bytes in length result Response from instrument hpe5250a_cmdString_Q This function passes the cmd_str string to the instrument This entry point will wait for a...

Page 81: ...meters vi Instrument handle returned from hpe5250a_init frequency Measurement frequency 1E3 to 1E6 Hz len_hptrx Agilent 16494A triaxial cable 1 5 or 3 0 m len_usrtrx_h Triaxial cable length in m betwe...

Page 82: ...Int16 cardno_ruleseq ViInt16 rule ViInt16 sequence Parameters vi Instrument handle returned from hpe5250a_init cardno_ruleseq Card number 1 card 1 2 card 2 3 card 3 4 card 4 or 5 all card in the norma...

Page 83: ...nction Syntax ViStatus _VI_FUNC hpe5250a_couplePort ViSession vi ViInt16 coupleport_cardno ViInt16 port1 ViInt16 port3 ViInt16 port5 ViInt16 port7 ViInt16 port9 Parameters vi Instrument handle returne...

Page 84: ...r 0 all card in the automatic configuration mode For the configuration mode see hpe5250a_func couple_state Couple port mode 0 OFF or 1 ON hpe5250a_dcl This function sends a device clear DCL to the ins...

Page 85: ...This function returns the error numbers and corresponding error messages in the error queue of a instrument See Agilent E5250A User s Guide for a listing of the instrument error numbers and messages I...

Page 86: ...ax ViStatus _VI_FUNC hpe5250a_errorQueryDetect ViSession vi ViBoolean errorQueryDetect Parameters vi Instrument handle returned from hpe5250a_init errorQueryDetect Error checking enable VI_TRUE or dis...

Page 87: ...from hpe5250a_init errstr Response from instrument Bit Value Message 1 ESR_OPC 2 ESR_RQL 4 ESR_QYE_ERROR 8 ESR_DEVICE_DEPENDENT_ERROR 16 ESR_EXECUTION_ERROR 32 ESR_COMMAND_ERROR 64 ESR_URQ 128 ESR_PON...

Page 88: ...e5250a_init ViRsrc InstrDesc ViBoolean id_query ViBoolean do_reset ViPSession vi Parameters InstrDesc Instrument description Examples GPIB0 1 INSTR id_query VI_TRUE to perform In System Verification o...

Page 89: ...e configuration mode see hpe5250a_func hpe5250a_openList This function will disconnect the input ports from the output ports specified by the channel list The parameter openchan_list is an array of in...

Page 90: ...nchan_list parameter Syntax ViStatus _VI_FUNC hpe5250a_openList_Q ViSession vi ViInt32_VI_FAR openchan_list ViInt32 _VI_FAR open_status Parameters vi Instrument handle returned from hpe5250a_init open...

Page 91: ...l function Syntax ViStatus _VI_FUNC hpe5250a_reset ViSession vi Parameters vi Instrument handle returned from hpe5250a_init hpe5250a_revision_query This function returns the driver revision and the in...

Page 92: ...emarks If you change the compensation data copy the default data shown below and modify the data for your measurement cable You will need to change the data for DATA05 and 06 and or DATA07 and 08 corr...

Page 93: ...50a_init test_result Numeric result from self test operation 0 No error test_message Self test status message This is limited to 256 characters hpe5250a_testClear This function clears the test result...

Page 94: ...test to 4 card 4 relay test 5 relay test for all card 6 front panel test or 7 controller test exec_result Test result 0 No error hpe5250a_timeOut This function sets a minimum timeout value for driver...

Page 95: ...Agilent 4155B 4156B VXIplug play Driver User s Guide Edition 4 3 Programming Examples Using HP VEE...

Page 96: ...mming examples This chapter contains the following sections Programming Basics High Speed Spot Measurements Multi Channel Spot Measurements Staircase Sweep Measurements Synchronous Sweep Measurements...

Page 97: ...Driver on HP VEE Basic Objects to Control the Instrument To display the To From object To define transactions in the To From object To set input parameters To use the Help function To use input varia...

Page 98: ...4 Enter the device name in the Name field The example shown in Figure 3 1 sets HP4156B 5 Enter the GPIB address for the device in the Address field The example shown in Figure 3 1 sets 717 6 Click Ad...

Page 99: ...er OK Help Cancel Plug play Driver Name Parameter to init call Address eg GPIB VXI 12 INSTR Perform Identification Query Perform Reset HP4156B HPE5250A hpvisa Unknown File Edit View Debug Untitled Mai...

Page 100: ...isplay shown in Figure 3 2 1 Display the To From object for the VXIplug play driver 2 Define the transactions functions of the driver in the To From object 3 Set the input parameters for the transacti...

Page 101: ...urrent hp4156b_spotMeas This function executes a spot measurement hp4156b_zeroOutput This function disables the 4155B 4156B output To display the To From object You can display the To From object as s...

Page 102: ...ailable for the instrument and displays the Help message for the selected function 2 Select the function you want to add to the To From object Figure 3 4 selects the Applying dc Current Voltage functi...

Page 103: ...ou can set the input parameter value using the Edit Function Panel dialog box Figure 3 5 sets the following values for the input parameters of the hp4156b_force function which forces dc current or vol...

Page 104: ...ter in order to enter the parameter value move the mouse pointer to the appropriate entry field then click the right mouse button The context based Help function will be displayed Figure 3 6 shows the...

Page 105: ...value in the Panel tab If you pass the value from another object such as Data Real object click the Parameters tab and use Variable not Constant See Figure 3 7 Figure 3 7 To Use Input Variables NOTE...

Page 106: ...n the To From object You can create the output terminal as shown in the following example 1 Click the Parameters tab 2 Enter the Name output terminal name for the output variable value 3 Enter the Nam...

Page 107: ...ect to the input terminal of the To From HP4156B object NOTE Confirm the data type of the input variable The data type of the Data object must be the same as the data type for the input parameter To d...

Page 108: ...using HP VEE the 4155B 4156B control mode is controlled by the hp4156b_init function which is automatically called and executed by HP VEE when the program first runs after loading However if you pres...

Page 109: ...each function call If this function is enabled 1 of Figure 3 11 and if an error occurs in the function call HP VEE stops the program execution and displays an error dialog box You must then enter the...

Page 110: ...functions automatically when you close the program or HP VEE These functions cannot be called in a program using HP VEE hp4156b_error_message hpe5250a_error_message These functions receive the error s...

Page 111: ...Output Switch Setup hp4156b_setSwitch channel state Output Filter Setup hp4156b_setFilter channel state Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel...

Page 112: ...ot Measurement Table 3 2 Program Explanation Object Title Menu Explanation Vs Vg Vsub Vd Data Constant Real Enters input parameters of hp4156b_force To From HP4156B I O InstrumentManager Plug play Exe...

Page 113: ...Source Setup for Example Program Description Function Parameters Output Switch Setup hp4156b_setSwitch channel state Output Filter Setup hp4156b_setFilter channel state Integration Time Setup hp4156b_...

Page 114: ...asurement Table 3 4 Program Explanation Object Title Menu Explanation Vbe Data Constant Real Enters input parameters of hp4156b_force To From HP4156B I O InstrumentManager Plug play Executes measureme...

Page 115: ...nels Ch1 Ch2 Ch1Mode Ch2Mode Ch1Range Ch2Range Data Constant Integer Data Constant Real Enters data to allocate array and array element for channel mode range of hp4156b_measureM A 1 Device Formula Ca...

Page 116: ...state Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode range value compliance polarity Sweep Source Setup hp4156b_setIv channel mode range start sto...

Page 117: ...Title Menu Explanation Vs Vg Vsub VdStart VdStop MeasPoints Data Constant Real Data Constant Integer Enters input parameters of hp4156b_force hp4156b_setIv and hp4156b_sweepIv To From HP4156B I O Inst...

Page 118: ...on page 3 25 This program measures MOSFET Id Vg characteristics The measurement setup is shown in Figure 3 19 Figure 3 19 Device Connection and Source Setup for Example Program Description Function Pa...

Page 119: ...t Title Menu Explanation Vs Vsub Vstart Vstop MeasPoints Data Constant Real Data Constant Integer Enters input parameters of hp4156b_force hp4156b_setIv and hp4156b_setSweepSync To From HP4156B I O In...

Page 120: ...itch Setup hp4156b_setSwitch channel state Output Filter Setup hp4156b_setFilter channel state Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode rang...

Page 121: ...rement Table 3 11 Program Explanation Object Title Menu Explanation VeStart VeStop MeasPoints Data Constant Real Data Constant Integer Enters input parameters of hp4156b_setIv and hp4156b_sweepMiv To...

Page 122: ...Ch2 Ch1Mode Ch2Mode Ch1Range Ch2Range Data Constant Integer Data Constant Real Enters data to allocate array and array element for channel mode range of hp4156b_sweepMiv A 1 Device Formula Calculates...

Page 123: ...Channel Sweep Measurements Figure 3 24 GetMeasData User Object Table 3 13 Program Explanation Object Title Menu Explanation GetValues Data AccessArray GetValues Gets data from array value status Ic Ib...

Page 124: ...lter channel state pulse channel must be set to OFF Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode range value compliance polarity Forces pulse bi...

Page 125: ...Table 3 15 Program Explanation Object Title Menu Explanation Vs Vg Vsub Vd Data Constant Real Enters input parameters of hp4156b_force and hp4156b_setPbias To From HP4156B I O InstrumentManager Plug p...

Page 126: ...nnel state pulse channel must be set to OFF Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode range value compliance polarity Sends Command String hp...

Page 127: ...nd array element for channel mode range of hp4156b_startMeasure A 1 Device Formula Calculates A 1 to allocate array AllocReal AllocInteger Data AllocateArray Real Data AllocateArray Integer Allocates...

Page 128: ...t be set to OFF Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode range value compliance polarity Sweep Source Setup hp4156b_setPiv channel mode rang...

Page 129: ...le Menu Explanation Vs Vg Vsub VdStart VdStop MeasPoints Data Constant Real Data Constant Integer Enters input parameters of hp4156b_force hp4156b_setPiv and hp4156b_sweepPiv To From HP4156B I O Instr...

Page 130: ...4156b_setFilter channel state pulse channel must be set to OFF Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode range value compliance polarity Send...

Page 131: ...Program Explanation Object Title Menu Explanation VbeStart VbeStop MeasPoints Data Constant Real Data Constant Integer Enters PWV command parameters For Count Flow Repeat ForCount Repeats next action...

Page 132: ...tant Integer Data Constant Real Enters data to allocate array and array element for channel mode range of hp4156b_startMeasure A 1 Device Formula Calculates A 1 to allocate array AllocReal AllocIntege...

Page 133: ..._setFilter channel state pulse channel must be set to OFF Integration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode range value compliance polarity Forces pu...

Page 134: ...lanation VcStart VcStop Vb Ve MeasPoints Data Constant Real Data Constant Integer Enters input parameters of hp4156b_force hp4156b_setPbias and hp4156b_setIv To From HP4156B I O InstrumentManager Plug...

Page 135: ...tegration Time Setup hp4156b_setInteg table time average Forces dc bias hp4156b_force channel mode range value compliance polarity Sampling timing setup hp4156b_setSample hold interval point Sampling...

Page 136: ...rval Bias MeasCh1 MeasCh2 MeasMode MeasRange MeasPoints Data Constant Integer Data Constant Real Enters input parameters of hp4156b_force hp4156b_setSample hp4156b_addSampleSyncIv hp4156b_addSampleSyn...

Page 137: ...ts Figure 3 38 SetArray User Function Table 3 27 Program Explanation Object Title Menu Explanation AllocReal AllocInteger Data AllocateArray Real Data AllocateArray Integer Allocates array for channel...

Page 138: ...User s Guide Edition 4 Programming Examples Using HP VEE Sampling Measurements Figure 3 39 GetData User Function Table 3 28 Program Explanation Object Title Menu Explanation GetValues Data AccessArray...

Page 139: ...56b_setPguR channel state Forces dc bias hp4156b_force channel mode range value compliance polarity Stress timing setup hp4156b_setStress hold mode duration period dc stress setup hp4156b_addStressSyn...

Page 140: ...sestress width delay rise fall Data Constant Real Data Constant Integer Enters input parameters of hp4156b_force hp4156b_setStress hp4156b_addStressSyncIv hp4156b_addStressSyncPulse hp4156b_stress To...

Page 141: ...Agilent 4155B 4156B VXIplug play Driver User s Guide Edition 4 4 Sample Application Programs for HP VEE...

Page 142: ...allation Using sample1 vee Using sample2 vee Customizing Sample Programs CAUTION The program and setup files stored on the Sample Program Disk are examples only and may need to be customized for your...

Page 143: ...ent E5250A low leakage switch mainframe and the Summit series semi auto prober from Cascade Microtech Inc The following files are stored on the disk readme txt This is a text file with a brief introdu...

Page 144: ...two MOSFETs 4 Store the measured data into files and display the results The differences between the two programs are the probing control and the display as shown in Table 4 1 Table 4 1 Differences B...

Page 145: ...points which are the nearest from the targeted point for both higher and lower directions The targeted point Vg_extract Id_target is an ideal point which indicates the Id_target value on the line thr...

Page 146: ...lect this mode if you use the 4155B 4156B only The test device is a single MOSFET as the 4155B 4156B has four SMUs to connect and measure a 4 terminal device simultaneously A test fixture or manual pr...

Page 147: ...he default source setup Figure 4 2 Measurement Connection and Source Setup NOTE To avoid misconnection pay close attention to the die device1 and device2 and the pin assignment of the probe card if us...

Page 148: ...y for HP4155B 4156B Sample Program Mon 15 Jun 1998 14 14 30 Comment Device 1 Vth Table X Index Y Index Vth V 5 7 9 21E 01 7 5 9 19E 01 5 5 7 32E 01 3 5 9 20E 01 5 3 9 22E 01 Device 2 Vth Table X Index...

Page 149: ...ust be connected to your PC via Cascade s interface For the interface and the operating system supported by the PCS contact Cascade Microtech Inc PCS version 2 50 supports Windows 95 only 2 HP VEE Sam...

Page 150: ...ograms using Windows Explorer 2 Create a subdirectory in the working directory The subdirectory will be used to save the measurement data files 3 Insert the HP VEE Sample Program Disk into the flexibl...

Page 151: ...sing sample1 vee This section covers the following topics Program Execution Flow Panel Display To Execute sample1 vee NOTE For the wafer test using the Summit series semi auto prober from Cascade Micr...

Page 152: ...y Driver User s Guide Edition 4 Sample Application Programs for HP VEE Using sample1 vee Program Execution Flow The execution flow of the sample1 vee program is shown in Figure 4 5 and Table 4 2 Figur...

Page 153: ..._meas 1 header lines are written in vth1 txt and vth2 txt See Measurement Data Files on page 8 7 Until Break Repeats the following sequence until a break occurs 8 Start Measurement Triggers the start...

Page 154: ...of device 1 and 2 X Y Index Displays wafer map of Vth value using the following characters Both device 1 and 2 test data are within the allowable range F1 Device 1 test data is out of the allowable r...

Page 155: ...s and the semi auto prober being used if applicable 5 Display the SYSTEM MISCELLANEOUS screen on the 4155B 4156B Select NOT SYSTEM CONTROLLER in the 4155B 4156B is field 6 Run HP VEE If this is the fi...

Page 156: ...he allowable range of device 1 Vth value Min field sets the lower limit Max field sets the upper limit Dev2 Vth Min Max Enter the allowable range of device 2 Vth value Min field sets the lower limit M...

Page 157: ...er s Guide Edition 4 4 17 Sample Application Programs for HP VEE Using sample1 vee Figure 4 7 Running sample1 vee with Cascade Microtech Prober Control Software 1 Figure 4 8 Running sample1 vee with C...

Page 158: ...stop the program click the stop button on the HP VEE menu bar NOTE In Offline mode the program returns the dummy data instead of the raw measurement data in step 8 NOTE A wafer map is also displayed i...

Page 159: ...Using sample2 vee This section covers the following topics Program Execution Flow Panel Display To Execute sample2 vee NOTE For the wafer test using the Summit series semi auto prober from Cascade Mi...

Page 160: ...Driver User s Guide Edition 4 Sample Application Programs for HP VEE Using sample2 vee Program Execution Flow The execution flow of the sample2 vee program is shown in Figure 4 10 and Table 4 4 Figur...

Page 161: ...ruments if used 9 1 Init G 1st meas Sets G_1st_meas value If G_1st_meas 1 the prober sets the first die to probe and header lines are written in vth1 txt and vth2 txt See Measurement Data Files on pag...

Page 162: ...Vg Id Graph Displays Id Vg curve for the device selected Enter the file name then click View to display the graph X Y Index Displays wafer map of Vth value using the following characters Both device 1...

Page 163: ...he semi auto prober being used if applicable 5 Display the SYSTEM MISCELLANEOUS screen on the 4155B 4156B Then select NOT SYSTEM CONTROLLER in the 4155B 4156B is field 6 Run HP VEE If this is the firs...

Page 164: ...field if the semi auto prober is not used Dev1 Vth Min Max Enter the allowable range of Vth value for device 1 Min field sets the lower limit Max field sets the upper limit Dev2 Vth Min Max Enter the...

Page 165: ...r s Guide Edition 4 4 25 Sample Application Programs for HP VEE Using sample2 vee Figure 4 12 Running sample2 vee with Cascade Microtech Prober Control Software 1 Figure 4 13 Running sample2 vee with...

Page 166: ...program click the stop button on the HP VEE menu bar NOTE In Offline mode the program returns the dummy data instead of the raw measurement data in step 8 NOTE A wafer map is also displayed in the Cas...

Page 167: ...ustomizing Sample Programs Customizing Sample Programs This section offers examples of modifications to the sample1 vee and sample2 vee programs To Change an GPIB Address To Change the Vth Measurement...

Page 168: ...Advanced Device Configuration dialog box 7 Click OK in the Device Configuration dialog box 8 Click Save Config in the Instrument Manager dialog box to register the new address Figure 4 15 To Change an...

Page 169: ...ement in the HP VEE program explorer The Device 1 or 2 Vth Measurement object is displayed 3 Change the Device ID for MOSFET if needed using a string format 4 Change the setup for all terminals for MO...

Page 170: ...the Pre Setup object and then open the Setup4155 object 4 Double click hp4156b_force and display the Edit Function Panel 5 Change the setup value on the panel To Remove a Test Device If your test die...

Page 171: ...2 Vth Dev2 Vth Min Dev2 Vth Max If Vth Pass for device2 If Then Else F2 F3 5 Delete the input terminal Vth2 6 Add the Flow If Then Else object and enter A then connect the lines between If Vth Pass an...

Page 172: ...he substrate terminal of device 1 the example does not modify the objects for device 2 1 Open the Vth Measurement object using the HP VEE program explorer 2 Display the program and cut the following t...

Page 173: ...EE Customizing Sample Programs 5 Open the Pre Setup object and delete the sub_ch and Vsub input terminals 6 Open the Setup 4155 object and delete the sub_ch and Vsub input terminals 7 Delete the hp415...

Page 174: ...th Measurement 2 Change the measurement setup Device ID String pin voltage and so on for the third device on the panel display of the Device 3 Vth Measurement object See To Change the Vth Measurement...

Page 175: ...lse object 8 Change the definition of the If Then Else object as shown in Figure 4 22 9 Copy and paste P F1 F2 and F3 objects and change the title and entry to F4 F5 F6 and F7 respectively 10 Cut the...

Page 176: ...Vth3 terminal of the Show Result object 14 Click the right mouse button on the Show Result object and select the Restore menu The Show Result object panel display is restored on the Main program displ...

Page 177: ...lowable range F7 Test results of all devices are out of the allowable range To Add a Measurement Parameter If you want to add a measurement parameter such as drain current Id modify the program as sho...

Page 178: ...ate Vg input terminal e comp 1m f polarity AUTO hp4156b_spotMeas function a channel Use drain_ch variable b mode CURRENT MEASUREMENT c range 0 d value Use spot_id variable and create spot_id output te...

Page 179: ...t_id_s output terminals in the Meas 4155 Offline object 11 Connect the line between the spot_id object and the spot_id terminal Then connect the line between the spot_id_s object and the spot_id_s ter...

Page 180: ...tle to Vg_spot and enter any value for gate voltage in volts This example enters 3 3 Connect the line between the Vg_spot object and the Vg_spot terminal of the Measurement object 4 Create the spot_id...

Page 181: ...een the spot_id_s terminal of the Vth Id Measurement object and the spot_id_s output terminal 4 Copy and paste Save Vth Table and change the title to Save Id Table 5 Connect the lines between the Devi...

Page 182: ...v Id object is added to the panel display of the Show Result object Adjust the position and size of the object 6 Open the Main program display and connect the line between the Show Result object spot_...