Agilent Technologies 8510XF, Operating And Service Manual

Page 1: ...510XF Network Analyzer Systems E7340A E7342A 2 to 85 GHz E7350A E7352A 2 to 110 GHz Operating and Service Manual Agilent Part Number E7350 90001 Printed in USA Print Date April 2002 Supersedes June 2001 ...

Page 2: ...eproduced or translated to another language without prior written consent of Agilent Technologies Restricted Rights Legend Use duplication or disclosure by the U S Government is subject to restrictions as set forth in subparagraph c 1 ii of the Rights in Technical Data and Computer Software clause at DFARS 252 227 7013 for DOD agencies and subparagraphs c 1 and c 2 of the Commercial Computer Softw...

Page 3: ...e 8510XF Chapter 2 How to install the system Chapter 3 How to use the system to make measurements Chapter 4 How to verify the performance of the system Chapter 5 How to maintain the system Chapter 6 How to order replacement parts Chapter 7 How to find information about menus softkeys and commands ...

Page 4: ...EXTENT PERMITTED BY APPLICABLE LAW AGILENT DISCLAIMS ALL WARRANTIES EITHER EXPRESS OR IMPLIED WITH REGARD TO THIS MANUAL AND ANY INFORMATION CONTAINED HEREIN INCLUDING BUT NOT LIMITED TO THE IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE AGILENT SHALL NOT BE LIABLE FOR ERRORS OR FOR INCIDENTAL OR CONSEQUENTIAL DAMAGES IN CONNECTION WITH THE FURNISHING USE OR PERFORMANCE...

Page 5: ...l 1 800 629 485 fax 61 3 9210 5947 Singapore tel 1 800 375 8100 fax 65 836 0252 Malaysia tel 1 800 828 848 fax 1 800 801 664 Philippines tel 632 8426802 tel PLDT subscriber only 1 800 16510170 fax 632 8426809 fax PLDT subscriber only 1 800 16510288 Thailand tel outside Bangkok 088 226 008 tel within Bangkok 662 661 3999 fax 66 1 661 3714 Hong Kong tel 800 930 871 fax 852 2506 9233 Taiwan tel 0800 ...

Page 6: ...es a hazard It calls attention to a procedure practice or the like that if not correctly performed or adhered to could result in personal injury Do not proceed beyond a WARNING notice until the indicated conditions are fully understood and met CAUTION The CAUTION notice denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to...

Page 7: ...secured against any unintended operation When you see this symbol on your instrument you should refer to the instrument s instruction manual for important information This symbol indicates hazardous voltages The laser radiation symbol is marked on products that have a laser output This symbol indicates that the instrument requires alternating current ac input The C Tick mark is a registered tradem...

Page 8: ...nual If this product is to be powered by autotransformer make sure the common terminal is connected to the neutral grounded side of the ac power supply WARNING Danger of explosion if battery is incorrectly replaced Replace only with the same or equivalent type recommended Discard used batteries according to manufacturers s instructions NOTE Please refer to the 8510C On Ssite Service Manual for add...

Page 9: ...er keyboard Press Return Softkey Used for simulated keys that appear on an instrument display Press Prior Menu User Entry Used to indicate text that you will enter using the computer keyboard text shown in this typeface must be typed exactly as printed Type LOAD PARMFILE Used for examples of programming code endif ifndef NO_CLASS Path Name Used for a subdirectory name or file path Edit the file us...

Page 10: ...rmance with the German Regulation on Noise Declaration for Machines Laermangabe nach der Maschinenlaermrerordnung 3 GSGV Deutschand Compliance with EEC Directives See the declaration of conformity on the following page Acoustic Noise Emission Geraeuschemission LpA 70 dB Operator position Normal position per ISO 7779 LpA 70 dB am Arbeitsplatz normaler Betrieb nach DIN 45635 t 19 ...

Page 11: ...8510XF Network Analyzer Systems xi Compliance with Standards ...

Page 12: ...xii 8510XF Network Analyzer Systems Compliance with Standards ...

Page 13: ...es of Information 1 2 8510XF Network Analyzer Systems 1 4 System Description 1 5 Two Versions of the 8510XF 1 5 What s Included 1 5 Frequency Limits 1 5 Partial Systems 1 5 Options 1 8 Option 005 45 MHz to 2 GHz 1 8 Option 006 RF Passthrough 1 8 Option 010 Time Domain 1 9 Option 230 Line Voltage 1 9 Upgrade Paths 1 10 2 Installation Site Preparation 2 2 Power Requirements 2 2 Environmental Require...

Page 14: ... 28 Instruments Without Option 005 2 30 Cable List 2 32 Duplicate Listings 2 32 Turning On the System 2 38 System Operational Test 2 39 Test Procedure 2 40 Operating Notes 2 42 3 Operation 8510XF Operating System 3 2 Checking the Operating System 3 2 Measurement Calibration 3 6 Why Calibration Is Essential 3 6 When to Repeat the Calibration 3 6 Calibration Techniques 3 7 Types of Calibration Kits ...

Page 15: ... 47 4 Performance Verification When to Verify 4 2 Materials Required 4 3 Calibration and Frequency Ranges 4 3 Verification Setup 4 5 General Preparation 4 5 Software Installation 4 5 Software Configuration 4 6 Verification Procedures 4 9 Low Band Verification 50 GHz 4 9 CW Frequency Accuracy Test 4 14 Materials Required 4 14 Procedure 4 14 Performance Test Record 4 16 5 System Maintenance Electros...

Page 16: ...Systems 5 21 Troubleshooting 5 37 Cycle Power 5 37 Hardware Configuration Check 5 37 Firmware Configuration Check 5 38 6 Replaceable Parts Parts Listed 6 2 How to Order 6 2 Frequency Ranges 6 2 Categorization of Components 6 3 110 GHz Systems 6 4 Complete System 6 4 85 GHz Systems 6 7 Complete System 6 7 Millimeter Wave Controller 6 10 7 Menus Commands Menu Maps 7 2 New GPIB Commands 7 43 Unsuppor...

Page 17: ...F Network Analyzer Systems 1 1 1 Introduction In This Chapter Finding System Information page 1 2 8510XF Network Analyzer Systems page 1 4 System Description page 1 5 Options page 1 8 Upgrade Paths page 1 10 ...

Page 18: ... Programming Manual 08510 90281 A detailed operator s guide to the 8510C network analyzer 8510C Introductory User s Guide 08510 90290 A brief introduction to functions menus and measurement setups for the 8510C network analyzer 8510C Quick Reference Guide 08510 90292 An abbreviated pocket sized guide to codes commands and menu maps for the 8510C network analyzer 8510C Keyword Dictionary 08510 9028...

Page 19: ...4 of this manual Chapter 8 8510C On Site Service Manual Maintenance Chapter 5 of this manual Chapters 7 10 8510C On Site Service Manual Also Supplement to 8510C Operating and Programming Manual Operator s Check and Routine Maintenance Ordering replacement parts Chapter 6 of this manual Chapter 5 8510C On Site Service Manual GPIB programming Chapter 7 of this manual Chapter 13 8510C Operating and P...

Page 20: ... GHz and 2 to 110 GHz Both ranges can be optionally extended downward to 45 MHz The 8510XF uses the same test port connections throughout its entire range of test frequencies It is never necessary to make and break connections in order to complete a test The illustration below shows the 8510XF configured for coaxial measurement the system can also be configured for on wafer measurement using a waf...

Page 21: ...85 GHz or E7352R 110 GHz 1 6 meter instrument rack E3661A Frequency Limits As the list above indicates the upper frequency limit of the system is determined by the type of test head that is included in it The lower frequency limit of an 8510XF system is normally 2 GHz With Option 005 installed the lower frequency limit is 45 MHz See Options on page 1 8 Partial Systems Customers who already have th...

Page 22: ... and LO sources are all installed in the rack The test heads are placed on a work surface which is mounted below the millimeter wave controller The test ports feature 1 0 mm coaxial connectors The device under test is typically connected to one test port directly and to the other test port by way of a coaxial cable or it is connected to the ports through two coaxial cables Figure 1 2 8510XF Config...

Page 23: ...r from the instrument rack and place it on a table adjacent to the probe station This makes it easy to see and operate the analyzer No wafer probe station is supplied with the system the illustration below simply shows how the 8510XF combines with a typical probe station to create an on wafer measurement system Figure 1 3 8510XF Configured for Wafer Probe Measurement ...

Page 24: ...put to the controller which is supplied by the 83651B RF source available as an output so that it can be routed to other devices or test sets The RF output on the rear panel of the millimeter wave controller is a 2 4 mm coaxial connector To supply this RF output to another test set you will need a 2 4 mm coaxial cable of adequate length this cable is not supplied with the 8510XF The system is ship...

Page 25: ... possible to use the 8510XF in time domain mode The option is implemented through modification of the network analyzer operating system NOTE Option 010 is available only for complete systems E7340A and E7350A Option 230 Line Voltage This option configures the 8510XF for 220 240 line voltage operation ...

Page 26: ...A B NOTE The upgrade kits for the 85107A B can also be used for an 85109C system which lacks Option 002 To upgrade an 85109C with Option 002 see the upgrade kit described on page 1 12 Item Part Millimeter wave controller E7341A Left test head E7342L 85 GHz or E7352L 110 GHz Right test head E7342R 85 GHz or E7352R 110 GHz LO source 83621B Rack flange kit for LO source 83621B 913 8510XF operating se...

Page 27: ... of Upgrade Kits for the 85106C D Item Part Millimeter wave controller E7341A Left test head E7342L 85 GHz or E7352L 110 GHz Right test head E7342R 85 GHz or E7352R 110 GHz RF source 83651B Rack flange kit for RF source 83651B 913 8510XF operating service manual E7350 90001 E7346A E7356A upgrade kit installation manual E7350 90004 8510XF system software on diskette E7340 10001 8 chips for expandin...

Page 28: ...f Upgrade Kits for the 85109C NOTE To upgrade an 85109C which lacks Option 002 see the upgrade kit described on page 1 10 Item Part Millimeter wave controller E7341A Left test head E7342L 85 GHz or E7352L 110 GHz Right test head E7342R 85 GHz or E7352R 110 GHz 8510XF operating service manual E7350 90001 E7347A E7357A upgrade kit installation manual E7350 90005 8510XF system software on diskette E7...

Page 29: ...the System page 2 5 Precautions page 2 9 Unpacking the System page 2 11 Basic System Configurations page 2 17 Millimeter Wave Controller page 2 23 Test Heads page 2 26 Controller Test Head Interconnections page 2 28 Cable List page 2 32 Other Connections and Settings page 2 37 Turning On the System page 2 38 System Operational Test page 2 39 Operating Notes page 2 42 ...

Page 30: ...ine both the electrical requirements and the air conditioning requirements of the system NOTES 1 Values are based on 120 Vac supplied to each instrument at 60 Hz 2 The millimeter wave controller supplies power to the test heads Table 2 1 Power requirements of the system Standard Equipment Instrument Maximum VA Rating Maximum BTU hour 85101C display processor 250 850 85102B IF detector 210 714 8362...

Page 31: ...wer Requirements on page 2 2 Required conditions for accuracy enhanced measurement Accuracy enhanced error corrected measurements require the ambient temperature of the 8510XF to be maintained within 1 C of the ambient temperature at calibration Temperature Operation 5 C to 40 C 41 F to 104 F Temperature Storage 40 C to 65 C 40 F to 158 F Temperature Measurement Calibration 20 C to 26 C 68 F to 79...

Page 32: ...nd dimensions of a single test head left or right Figure 2 1 Testhead Footprint Dimensions for Mounting left or right Weight Height Width Depth 280 3 kg 618 lbs 162 cm 63 8 in Rack only 60 cm 23 6 in Plus work surface 100 cm 39 4 in Rack Only 90 5 cm 35 6 in Plus work surface 145 4 cm 57 3 in Table 2 4 Test Head Weight and Dimensions Test Head Model Weight Height Width Depth E7342 L R 9 07 kg 20 l...

Page 33: ... you install the system During installation the Customer Engineer will do the following Uncrate the system cabinet see Unpacking the System on page 2 11 Complete the system checklist see System Checklists on page 2 7 Assemble the work surface and connect it to the system cabinet Install the test heads Verify that the GPIB addresses are set properly and power up the system Run a performance verific...

Page 34: ...ied for completeness and the system has been checked mechanically and electrically The crate may be used one more time only to ship the 8510XF cabinet If you need to ship your 8510XF system repackage it in its original shipping crate Make all surface shipments via padded van with an air suspension ride CAUTION Regardless of the crate style all surface shipments must be made via padded van air susp...

Page 35: ... 8510XF System Checklist Standard Items Equipment Serial Number 8510C network analyzer 83621B synthesized source LO source with 83621B 913 rack flange kit 83651B synthesized source RF source with 83651B 913 rack flange kit Millimeter wave controller test heads see Optional Variable Items on page 2 8 See page 2 8 E3661A system rack 1 6 meter Cables for a complete list of cables supplied with the sy...

Page 36: ...riable Items Equipment Included In Serial Number Left test head E7342L E7352L Systems to 85 GHz Systems to 110 GHz Right test head E7342R E7352R Systems to 85 GHz Systems to 110 GHz Millimeter wave controller E7341A E7341A 005 E7341A 006 E7341A 056 Systems without options Systems with Option 005 Systems with Option 006 Systems with Options 005 006 8510C 010 time domain option for network analyzer ...

Page 37: ...4 respectively CAUTION Always use the three prong ac power cord supplied with this product Failure to insure adequate earth grounding by not using this cord may cause product damage CAUTION Before switching on the system make sure that the correct fuse is installed and that the supply voltage is in the specified range CAUTION Ventilation requirements Convection in and out of the system cabinet mus...

Page 38: ...r 120 Vac or 220 Vac 120 Vac is the factory setting CAUTION The cabinet fans may be permanently damaged if a 120V system is plugged into a 220V ac power outlet The cabinet fans can be wired for either 120V or 220V but not both Therefore a system wired for 120V operation cannot be switched to 230V operation simply by changing the voltage selection switches on individual instruments Test Port Inputs...

Page 39: ... off packing clamps CAUTION When you remove the clamps from the packing crates be careful not to bend them they may be reused when the system is repacked Figure 2 2 The Outer Packing Crate NOTE The figures show a double rack crate The unpacking procedure is essentially the same for either a single rack or a double rack crate differences will be noted where they occur ...

Page 40: ...p cover and set it aside 2 Remove the clamps holding the first packing crate wall in place It does not matter which wall you remove first 3 Remove the other walls Make sure you have people holding the last two walls in place when you remove the last set of clamps 4 Set the loading ramp aside for now NOTE In double rack crates the heaviest wall is the loading ramp In single rack crates the loading ...

Page 41: ...tion Unpacking the System Figure 2 4 Removing the Foam Cover and Plastic Wrapping Remove the top cover and plastic wrapping 1 Remove the foam top cover Save the cover for possible future use 2 Remove the plastic wrapping from the system Foam cover ...

Page 42: ...F Network Analyzer Systems Installation Unpacking the System Figure 2 5 Removing the Bolts Figure 2 6 Removing the Anchor Bolt Brace bolts Item A Brace Item B Ramp anchor bolt Item D Hinged slat Item C Ramp Ledge ...

Page 43: ... of the ramp on the ramp ledge See Figure 2 7 above 5 Insert the ramp anchor bolt and fold down the hinged slat To secure the ramp you may place long wood screws through the ramp and into the ramp edge 6 Fold down the ramp s end flap item E WARNING A racked system is tall and top heavy It is easy to tip the rack over while moving it which could result in personal injury or death Unloading the syst...

Page 44: ...ly retracted and that the cabinet casters are rolling freely WARNING Do not stand in front of the rack as it rolls down the ramp 8 Roll the system down the ramp using extreme care 9 In case you must move the system in the future you can retain and reuse these packing materials or you can purchase replacement packing materials from Agilent Technologies ...

Page 45: ... the other test port by way of a coaxial cable CAUTION Do not attempt to connect a test device directly between the two test ports without cables The test heads will not move freely enough to allow such a connection to be made safely Wafer probe measurement This configuration is used for on wafer testing each test port is connected through a 1 0 mm coaxial cable or through an adapter and another t...

Page 46: ...uration The test heads which are placed on the work surface are omitted here in order to give an unobstructed view of the rack instruments Figure 2 9 Rack Diagram for Coaxial Configuration Figure 2 10 on page 2 19 shows rack cabling for the coaxial configuration For cabling between the millimeter wave controller and the test heads see Controller Test Head Interconnections on page 2 28 ...

Page 47: ...8510XF Network Analyzer Systems 2 19 Installation Basic System Configurations Figure 2 10 Rear View Cabling Diagram Coaxial Configuration ...

Page 48: ...below the millimeter wave controller 1 Extend the lock feet located at the bottom of the cabinet to stabilize the rack 2 Attach the work surface support rails to the inside of the cabinet 3 Slide the work surface onto the support rails NOTE The 1 meter table top is included in the E7340A and E7350A complete systems It is optional in the upgrade kits Figure 2 11 Installing the Work Surface ...

Page 49: ... test heads which are placed on X Y positioners mounted to the wafer probe station are omitted here in order to give an unobstructed view of the rack instruments Figure 2 12 Rack Diagram for Wafer Probe Configuration Figure 2 13 shows rack cabling for the wafer probe configuration For cabling between the millimeter wave controller and the test heads see Controller Test Head Interconnections on pag...

Page 50: ...2 22 8510XF Network Analyzer Systems Installation Basic System Configurations Figure 2 13 Rear view Cabling Diagram Wafer Probe Configuration ...

Page 51: ...to 2 GHz range added If the system does not have Option 005 the four RF Input connectors a1 b1 a2 and b2 will be omitted LEDs Four LEDs are used as indicators on the front panel LINE Lights to indicate that line power to the controller is ON ACTIVE Lights to indicate that this is the active test set useful in distinguishing among multiple test sets tied to the same analyzer a1 This LED located at ...

Page 52: ...ctor provides paths for various signals between the controller and the left test head including 20 MHz IFs from mixers in the test head Connectors Port 2 RF OUTPUT This 2 4 mm connector provides the right test head with the RF signal that is used for frequencies up to 50 GHz MM DRIVE This 2 4 mm connector provides the right test head with the RF signal that is used for frequencies above 50 GHz thi...

Page 53: ...MSB on the right not the left so the selected address binary 10111 reads left to right as 11101 Figure 2 15 GPIB Switch Setting Fuse The fuse is located inside the line module on the rear panel of the millimeter wave controller as shown in the illustration below For 110 V operation the fuse rating should be 6 A for 220 V operation it should be 3 A or 3 15 A Review the information on the right of t...

Page 54: ...tor It is usually best to position the left test head slightly forward of the right test head so that the test ports are in line This reduces strain on test cables Power Supply Inputs The test heads do not have their own power supplies each head receives dc power supply inputs from the millimeter wave controller by way of a multi pin interface cable Illustrations The left test head is illustrated ...

Page 55: ...he single connector panel contains test port 2 Figure 2 18 Right Test Head Test Ports The illustration below shows a test port The ON LED to the left of the test port lights to indicate that the test head is receiving the required DC supply voltages from the controller Figure 2 19 Test Port NOTE The model number which appears below the test port refers to the millimeter wave subsystem which consis...

Page 56: ...005 The interconnections between the controller and the test heads are shown below for a system with Option 005 for systems without this option see page 2 30 NOTE The order in which cables are connected to a test head is significant see Sequence of test head connections on page 2 29 Figure 2 20 Controller Test Head Cabling Diagram With Option 005 ...

Page 57: ...gure 2 21 below 1 b RF OUTPUT SMA connector NOTE In systems without Option 005 this connector is not used and should be fitted with a male SMA termination 2 a RF OUTPUT SMA connector NOTE In systems without Option 005 this connector is not used and should be fitted with a male SMA termination 3 LO INPUT 3 5 mm connector 4 MM DRIVE 2 4 mm connector 5 RF INPUT 2 4 mm connector 6 BIAS LEMO multi pin ...

Page 58: ...ion 005 The interconnections between the controller and the test heads are shown below for a system without Option 005 NOTE The order in which cables are connected to a test head is significant see Sequence of test head connections on page 2 31 Figure 2 22 Controller Test Head Cabling Diagram Without Option 005 ...

Page 59: ...ted in Figure 2 23 below 1 b RF OUPTUT In systems without Option 005 this connector is not used Check to see that it is fitted with a male SMA termination 2 a RF OUTPUT In systems without Option 005 this connector is not used Check to see that it is fitted with a male SMA termination 3 LO INPUT 3 5 mm connector 4 MM DRIVE 2 4 mm connector 5 RF INPUT 2 4 mm connector 6 BIAS LEMO multi pin connector...

Page 60: ...ory installed means that the cable was installed prior to shipment generally cables between rack instruments are factory installed cables between the millimeter wave controller and the test heads are not Table 2 7 Cable List Connections from the 8510C From 85101C To Notes Cable Type Part No IF display interconnect 85102B IF display interconnect factory installed Multi pin 08510 60101 8510 intercon...

Page 61: ...1B To Notes Cable Type Part No 10 MHZ ref input 83621B 10 MHz ref output factory installed duplicate listing BNC 8120 1838 10 MHz ref output 85102B 10 MHz in factory installed duplicate listing BNC 8120 5370 Trigger output 85102B trigger in factory installed duplicate listing BNC 8120 5370 GPIB 83621B GPIB factory installed duplicate listing GPIB 8120 3444 Model 10833D GPIB Millimeter wave control...

Page 62: ... head LO input 3 5 mm RF flex E7342 60004 Port 2 RF input a2 Option 005 only Right test head a RF output SMA RF flex E7342 60003 Port 2 RF input b2 Option 005 only Right test head b RF output SMA RF flex E7342 60003 Port 2 bias Right test head bias DC E7342 60009 Port 2 test head interface Right test head controller interface Multi pin 08510 60126 From Millimeter Wave Controller Rear Panel LO inpu...

Page 63: ...mm RF flex E7342 60005 a RF output Option 005 only Millimeter wave controller port 1 RF input a1 duplicate listing SMA RF flex E7342 60003 RF input Millimeter wave controller port 1 RF output duplicate listing 2 4 mm RF flex E7342 60005 Bias Millimeter wave controller port 1 bias duplicate listing DC E7342 60009 Controller interface NOTE includes IF outputs Millimeter wave controller port 1 test h...

Page 64: ... mm RF flex E7342 60005 a RF output Option 005 only Millimeter wave controller port 2 RF input a2 duplicate listing SMA RF flex E7342 60003 RF input Millimeter wave controller port 2 RF output duplicate listing 2 4 mm RF flex E7342 60005 Bias Millimeter wave controller port 2 bias duplicate listing DC E7342 60009 Controller interface NOTE includes IF outputs Millimeter wave controller port 2 test ...

Page 65: ...tch settings for all instruments must match the addresses assigned by the system In 8510XF systems these addresses are set at the factory prior to shipment For reference the instruments and the applicable default addresses are listed in the table below Language Switches The LANG switches of the 83621B and 83651B sources must be set to 111 Table 2 13 8510XF System GPIB Addresses Instrument GPIB Add...

Page 66: ...evice see Visual inspection on page 5 4 for information on recognizing defects in a 1 0 mm connector 3 Turn on power for the system rack 4 Turn on power for all system instruments except the network analyzer display unit the upper portion of the 8510C 5 Wait 10 seconds then turn on the network analyzer display unit 6 The 8510C begins making measurements according to the last recording of instrumen...

Page 67: ...ion of the system During the test you will measure the power levels of the four user parameters User 1 a1 User 2 b2 User 3 a2 and User 4 b1 Measured levels will be compared to the typical levels shown in Table 2 14 on page 2 41 User parameters are measurements of the IF input levels received by the network analyzer Figure 2 24 below shows a typical 8510XF user parameter test plot During normal ope...

Page 68: ...press RESPONSE REF VALUE and adjust the value using the up down arrow keys 20 dB is the recommended setting This adjustment will have to be made repeatedly because each of the user parameters starts out at the default reference level 2 Compare the measured levels with the minimum levels shown in Table 2 14 on page 2 41 3 Measure the b1 IF using the key sequence PARAMETER MENU USER 4 b1 REDEFINE PA...

Page 69: ...own in Figure 2 14 this indicates that the 8510XF is functioning normally and is ready to be used NOTE frequencies below 2 GHz are rolled off sharply owing to the characteristics of the directional couplers in the test heads Table 2 14 Minimum Levels All User Parameters Frequency Range GHz Minimum Level dBm 2 63 2 to 18 38 18 to 50 58 50 to 75 61 75 63 ...

Page 70: ...nternal network analyzer initialization then recalls Instrument State 8 USER PRESET does not send an initialization signal to the other instruments on the system bus Factory Preset To re initialize the network analyzer to the 8510XF factory settings select RECALL MORE FACTORY PRESET This preset initializes all instrument state functions to their default conditions except for the frequency range it...

Page 71: ...age 3 30 LO Power page 3 36 Service page 3 38 Alternative 1 0 mm Calibrations page 3 43 Operation Using a Wafer Probe Station page 3 46 NOTE The functional core of the 8510XF system is the 8510C network analyzer Operating the system mainly means operating the analyzer as described in the 8510C manuals see Finding System Information on page 1 2 This chapter is primarily concerned with operational i...

Page 72: ...ble of running either the 8510XF version or the operating system or the standard 8510C version You can verify that the correct version is installed by using the key sequence SYSTEM MORE SERVICE FUNCTIONS SOFTWARE REVISION The name of the displayed revision should begin with 8510XF not 8510C The appropriate CRT or LCD 8510XF version of the operating system is installed at the factory it can be re l...

Page 73: ...eral menus are illustrated with excerpts from the menu maps which are shown in their entirety in Chapter 7 These menu maps show both the softkeys and to the right of the menu rectangle the equivalent GPIB commands if any In the menu illustration below the softkey names as they are displayed on the screen of the network analyzer are shown within the rectangle the GPIB commands that are equivalent t...

Page 74: ...been developed specifically for the 8510XF the menu maps in Chapter 7 reflect the contents of that kit The CAL menu and its submenus are discussed later in this chapter see Calibration Types on page 3 13 DOMAIN Menu The DOMAIN menu is changed as follows PULSE PROFILE is deleted PARAMETER Menu The PARAMETER menu is changed as follows PHASE LOCK is deleted STIMULUS Menu STIMULUS MENU is changed in t...

Page 75: ...FIG is added see RF Power on page 3 30 LO POWER CONFIG is added see LO Power on page 3 36 IF FREQ is added This function makes it possible to specify the IF frequency nominally 20 MHz that is used by he network analyzer see IF Frequency on page 3 42 The menu called up by SERVICE FUNCTIONS is substantially revised IF GAIN is moved to the 85102 SERVICE menu see below PEEK POKE LOCATION PEEK and POKE...

Page 76: ...s to the measurement conditions may invalidate the calibration as described below A calibration is only valid for the frequency range over which it was performed if the frequency range has changed the calibration must be repeated A calibration is only valid for the number of points over which it was performed if the number of points has been increased the calibration must be repeated If test port ...

Page 77: ... Calibration Techniques A variety of calibration techniques can be used with the 8510XF including the following SOLT Short Open Load Thru Offset Shorts Shorts with different offset lengths TRL Thru Reflect Line TRM Thru Reflect Match The calibration technique used depends in part on the type of calibration kit used The 1 0 mm calibration kit 85059A which was designed specifically for the 8510XF us...

Page 78: ...te adapters are connected to the 1 0 mm test ports However this type of calibration will not cover the entire frequency range of the 8510XF For example a 2 4 mm coaxial calibration kit could be used provided that adapters 1 0 mm to 2 4 mm were connected to the test ports However this would prevent the system from making calibrated measurements above 50 GHz On wafer calibration When the 8510XF is c...

Page 79: ...om the display menu This file is the recommended choice for normal operation the other file CK_1MMA1B is discussed under Broadband Standards on page 3 43 5 Select LOAD FILE This loads the calibration constants into the memory of the network analyzer A screen message indicates when the load process is complete FILE CK_1MMA1A LOADED FROM DISK 6 Remove the disk from the drive Set Up the Analyzer 1 Se...

Page 80: ...cable See Choosing Calibration Standards on page 3 11 2 Starting from the top down connect the first standard that is appropriate to the calibration 3 Select the softkey associated with the standard and wait for the 8510XF to complete its calibration run for that standard the softkey name will be underlined when the calibration run is complete 4 Disconnect the standard unless the same standard con...

Page 81: ...has a female connector F SHORT means a short that connects to a female port in other words the short itself has a male connector Whenever a device is described as M or F without parentheses the letter indicates the sex of the device itself Offset Shorts In the 8510XF at frequencies above 50 GHz offset shorts are used in the place of opens and loads The OPEN category is therefore renamed OPEN SHORT...

Page 82: ...ed at All Frequencies Standard Type 045 to 50 GHz 50 to 75 GHz 75 to 110 GHz Combined Ranges Open Short M OPEN F OPEN M SHORT3 F SHORT3 M SHORT3 F SHORT3 combine the standards shown in the columns to the left as appropriate Shorts M SHORT3 F SHORT3 M SHORT1 F SHORT1 M SHORT1 F SHORT1 combine the standards shown in the columns to the left as appropriate Load Short 50GHZ LOAD M SHORT4 F SHORT4 M SHO...

Page 83: ... or CAL CAL 2 will call up the Calibration Type menu Figure 3 2 CAL TYPE Menu Equivalent GPIB Commands All of these softkeys except for the first represent different types of calibration Each type of calibration requires its own particular set of calibration standards as described in the following pages ...

Page 84: ...gure 3 3 Response Menu Right Equivalent GPIB Commands Select ONE of the Response Standards For Reflection Measurements S11 S22 select one of the following F SHORT3 Refers to offset short No 3 with a male connector that is the short is to be connected to a female port F OPEN Refers to an open with a male connector that is the open is to be connected to a female port M SHORT3 Refers to offset short ...

Page 85: ...s Select ONE of the Response Standards For Reflection Measurements S11 S22 select one of the following F SHORT3 Refers to offset short No 3 with a male connector that is the short is to be connected to a female port F OPEN Refers to an open with a male connector that is the open is to be connected to a female port M SHORT3 Refers to offset short No 3 with a female connector that is the short is to...

Page 86: ...ent GPIB Commands For notes on the three types of standards involved in this calibration see the following Open Short Standards on page 3 21 Shorts Standards on page 3 22 Load Short Standards on page 3 23 S22 1 Port This calibration is for reflection measurements using the right test port within those operational limits however it is a thorough and accurate calibration To perform this calibration ...

Page 87: ...ollowing menu Figure 3 6 One Path 2 Port Menu Equivalent GPIB Commands Notes on the Standards REFLECT N These are the same standards that are used for the S11 and S22 1 port calibrations except that in this case both ports are calibrated The reflection standards are sorted into three categories See Open Short Standards on page 3 21 See Shorts Standards on page 3 22 See Load Short Standards on page...

Page 88: ...sults for measurement over the full frequency range of the 8510XF For this calibration select CAL CAL1 or CAL2 FULL 2 PORT This calls up the following menu Figure 3 7 Full 2 Port Menu Equivalent GPIB Commands Notes on the Standards REFLECT N These are the same standards that are used for the S11 and S22 1 port calibrations except that in this case both ports are calibrated The reflection standards...

Page 89: ...AL1 or CAL2 TRL 2 PORT Figure 3 8 TRL 2 Port Menu Equivalent GPIB Commands Notes on the Standards THRU Connect Port 1 to Port 2 S11 REFLECT SHORT Connect a short to Port 1 You will be prompted to select F SHORT3 or M SHORT3 S22 REFLECT SHORT Connect a short to Port 2 You will be prompted to select F SHORT3 or M SHORT3 ISOLATION LOAD See Full 2 Port Isolation Standards on page 3 27 LINE MATCH MATCH...

Page 90: ...hey are associated Response standards required for Response calibrations are described on page 3 14 Response Isolation standards required for Response Isolation calibrations are described on page 3 15 TRM standards required for Thru Reflect Match calibrations are described on page 3 19 Other Standards The remaining standard types require a more detailed presentation and are described in the follow...

Page 91: ... F OPEN Refers to an open which has a male connector that is the open is to be connected to a female port This standard is used for frequencies up to 50 GHz F SHORT3 Refers to Short No 3 with a male connector that is the short is to be connected to a female port This standard is used for frequencies above 50 GHz M OPEN Refers to an open which has a female connector that is the open is to be connec...

Page 92: ...HORT3 Refers to Short No 3 with a male connector that is the short is to be connected to a female port This standard is used for frequencies up to 50 GHz F SHORT1 Refers to Short No 1 with a male connector that is the short is to be connected to a female port This standard is used for frequencies above 50 GHz M SHORT3 Refers to Short No 3 with a female connector that is the open is to be connected...

Page 93: ...rs as appropriate This standard is used for frequencies up to 50 GHz F SHORT4 Refers to Short No 4 with a male connector that is the short is to be connected to a female port This standard is used for frequencies from 50 to 75 GHz F SHORT2 Refers to Short No 2 with a male connector that is the short is to be connected to a female port This standard is used for frequencies above 75 GHz M SHORT4 Ref...

Page 94: ...n of that type using a 1 0 mm calibration kit you will see the following menu Figure 3 12 One Path Transmission Calibration Menu Equivalent GPIB Commands Notes on the Standards FWD TRANS THRU Make a thru connection that is connect one port to the other through a cable FWD MATCH THRU Make a thru connection that is connect one port to the other through a cable NOTE It is necessary to make both of th...

Page 95: ...brations When you perform a calibration of that type using a 1 0 mm calibration kit you will see the following menu Figure 3 13 One Path Isolation Calibration Menu Equivalent GPIB Commands Note on the Standard FWD ISOL N LOAD Refer to Isolation under Banded Standards in Table 3 1 on page 3 12 NOTE To skip the isolation part of the calibration select OMIT ISOLATION ...

Page 96: ... Port Transmission Calibration Menu Equivalent GPIB Commands Notes on the Standards FWD TRANS THRU Make a thru connection that is connect one port to the other through a cable FWD MATCH THRU Make a thru connection that is connect one port to the other through a cable REV TRANS THRU Make a thru connection that is connect one port to the other through a cable REV MATCH THRU Make a thru connection th...

Page 97: ...on of that type using a 1 0 mm calibration kit you will see the following menu Figure 3 15 Full 2 Port Isolation Calibration Menu Equivalent GPIB Commands Notes on the Standards FWD ISOL N LOAD Refer to Isolation under Banded Standards in Table 3 1 on page 3 12 REV ISOL N LOAD Refer to Isolation under Banded Standards in Table 3 1 on page 3 12 NOTE To skip the isolation part of the calibration sel...

Page 98: ...nd also from Port 2 if the ports are coupled PORT1 POWER followed by a number specifies a power level setting for Port 1 in dBm If the ports are coupled this setting applies also to Port 2 PORT1 SLOPE ON and PORT1 SLOPE OFF are used to enable and disable power slope for Port 1 PORT1 SLOPE ON followed by a number specifies the power slope setting for Port 1 in dB GHz If the ports are coupled this s...

Page 99: ...gs and power slope settings Port 2 Power Functions The last three softkeys control the power level from Port 2 These softkeys are displayed only if the ports are uncoupled PORT2 POWER followed by a number specifies a power level setting for Port 2 in dBm PORT2 SLOPE ON and PORT2 SLOPE OFF are used to enable and disable power slope for Port 2 PORT2 SLOPE ON followed by a number specifies the power ...

Page 100: ...Figure 3 17 RF Power Configuration Menu Submenus and Equivalent GPIB Commands RF Leveling Functions The first four softkeys specify different methods of controlling RF power If RF LEVEL SYSTEM is selected leveling of RF power at the test ports is controlled entirely by the 8510XF system This is the normal operating mode NOTE The remaining RF LEVEL selections are provided as a convenience for use i...

Page 101: ... four softkeys determine how the network analyzer processes error information while it is sweeping This has an impact on sweep speed Explanation In frequency sweeping an RF blanking interval occurs at each frequency change see Blanking circuit on page 5 17 To the RF source this blanking interval looks like an error condition unleveled or overmod To prevent the RF source from generating a spurious ...

Page 102: ...is the default mode If DETECT UNL ONCE is selected the 8510C polls for errors only during the first sweep following a frequency change If DETECT UNL NEVER is selected the 8510C does not poll for errors during any sweep Blanking On Off The softkeys BLANKING ON and BLANKING OFF activate and deactivate port power blanking during frequency or port drive transitions See Blanking circuit on page 5 17 Re...

Page 103: ...MORE RF POWER CONFIG menu see RF Power Configuration on page 3 30 These functions are not used during normal operation of the system they are made available for service use or for unusual measurement situations RF Source Power RF SOURCE POWER followed by a number specifies a power level setting for the 83651B RF source in dBm RF Source Slope SLOPE ON and SLOPE OFF are used to enable and disable po...

Page 104: ...libration takes about one minute For measurements in which absolute power levels are critical perform this calibration before every measurement calibration see page 3 6 If absolute power levels are not important you can perform this calibration infrequently on a monthly basis for example Practical Considerations The detector gain calibration process causes some settings to change and these are not...

Page 105: ...ACT PRST is selected the detector gain calibration routine is run and is followed by a factory preset If RUN CAL NO PRESET is selected the detector gain calibration routine is run but is not followed by a preset system settings that are altered by the calibration routine will not be restored to their original conditions afterward Use CANCEL to exit the menu without running the calibration routine ...

Page 106: ...lent GPIB Commands LO Leveling Functions The first four softkeys specify different methods of leveling for the 83621B LO source If LO LEVEL SYSTEM is selected leveling of the LO source 83621B is controlled entirely by the 8510XF system This is the normal operating mode NOTE The remaining LO LEVEL selections are provided as a convenience for use in unusual applications they are not recommended for ...

Page 107: ... the submenu which is shown on the right of Figure 3 20 on the previous page NOTE The functions represented on this submenu will not work if LO LEVEL SYSTEM is selected on the SYSTEM MORE LO POWER CONFIG menu see LO Power Configuration on page 3 36 These functions are not used during normal operation of the system they are made available for service use or for unusual measurement situations LO Sou...

Page 108: ...he network analyzer rather than to the test set These functions are intended to be used only by Agilent service engineers NOTE 85102 refers to the IF detector section of the 8510C network analyzer which is placed below the display processor section IF Gain Submenu The IF GAIN softkey calls up the IF gain submenu which is identical in the 8510XF to the submenu which appears in the standard 8510C op...

Page 109: ...keys make it possible to read from or write to a location within the memory of the network analyzer PEEK POKE LOCATION specifies the memory location to be read from or written to PEEK reads data from the memory location already specified POKE writes data to the memory location already specified ...

Page 110: ...imeter wave controller and the test heads rather than to the network analyzer These functions are intended to be used only by Agilent service engineers Show Hide Configuration The first softkey toggles between two modes If SHOW CONFIGURATION is selected information about the system hardware configuration frequency bands test heads etc is displayed If HIDE CONFIGURATION is selected information abou...

Page 111: ...ure 3 22 on the previous page These functions relate to detector gain calibration see Reset Detector Gain Calibration on page 3 34 They are intended to be used only by Agilent service engineers SET GAIN IF LEVEL makes it possible to specify the gain in dB of the programmable gain portion of the level control circuit Perform a detector gain calibration before selecting this function SET ATTN makes ...

Page 112: ...In the 8510XF the factory preset default value of the IF is 20 000017 MHz in other words an offset of 17 Hz has been added The key sequence SYSTEM MORE IF FREQ followed by a frequency can be used to change the value of the IF frequency The effective range of modification is restricted by hardware performance characteristics typically the IF range is 20 MHz 10 kHz NOTE At measurement frequencies gr...

Page 113: ...cluded on the calibration data disk that is supplied with the 1 0 mm calibration kit 85059A Loading the broadband standards 1 Insert the calibration data disk into the 8510C disk drive 2 Press DISC LOAD The analyzer displays SELECT DATA TYPE TO LOAD 3 Select CAL KIT 1 or CAL KIT 2 The analyzer displays USE KNOB OR STEP KEYS TO SELECT A FILE 4 Select CK_1MMA1B from the display menu This is the file...

Page 114: ...s more important than insuring accuracy Broadband SOLT Standards The broadband SOLT calibration process is a simplification of the SOLT process already described under Full 2 Port on page 3 18 there are simply fewer standards to choose from and no frequency bands OPEN You will be prompted to select F OPEN or M OPEN SHORT You will be prompted to select F SHORT3 or M SHORT3 LOAD The broadband load s...

Page 115: ...offset short No 1 male or female as appropriate S22 REFLECT SHORT Connect a short to Port 2 use offset short No 1 male or female as appropriate ISOLATION LOAD Connect isolation standards to Port 1 and Port 2 The isolation standard is a broadband load which consists of a 50 GHz load male or female as appropriate combined with a lossy delay line from the 1 0 mm calibration kit male or female as appr...

Page 116: ...on a table adjacent to the probe station This allows for easy viewing of the analyzer display and easy access to the analyzer s front panel controls The test heads are placed on X Y positioners on the probe station Locations on a probe station are conventionally referred to in terms of compass points accordingly the left test head is placed on the west positioner and the right test head is placed ...

Page 117: ...ositioners on the probe station adjust the position of the probe tips in three axes of movement left right motions along the X axis forward back motions along the Y axis and up down motions along the Z axis Motion in the Z axis is typically controlled by a micropositioner to which the wafer probe but not the test head is attached In order to measure an on wafer device you will maneuver the probe t...

Page 118: ... device On Wafer Calibration The measurement calibration process of the 8510XF must be adapted to the particular wafer test probes and on wafer calibration standards that are in use You will need to develop or purchase a calibration program that is appropriate to the equipment and accessories you are using Cascade Microtech provides calibration substrates and calibration software that are compatib...

Page 119: ...s page 4 4 Verification Setup page 4 5 General Preparation page 4 5 Software Installation page 4 5 Software Configuration page 4 6 Printer Selection page 4 8 Verification Procedures page 4 9 Low Band Verification 50 GHz page 4 9 High Band Verification 50 GHz page 4 12 CW Frequency Accuracy Test page 4 14 Materials Required page 4 14 Procedure page 4 14 In Case of Difficulty page 4 15 Performance T...

Page 120: ...operation This initial verification is included with the installation After the initial verification the verification should be repeated once a year This recommended interval assumes that Agilent cables are used with the system If non Agilent cables adaptors or other fixtures are used the verification schedule must be determined by the user as the characteristics of these devices are unknown In es...

Page 121: ...alibration procedure is required for the performance verification of the 8510XF system a measurement calibration is not sufficient There are up to three different calibrations and corresponding frequency ranges required which are stored in suggested locations in the 8510 analyzer Refer to Table 4 1 on page 4 3 For more information refer to the section on Frequency ranges on page 4 4 The parameters...

Page 122: ...1 0 mm 50 GHz 110 GHz Calibration Technique BL Broadband Load Cal OS Offset Short Cal Test Port Cables DIRECTXF for 8510XF verification 1 0 mm 1 0 mm DIRECTXF for 8510XF verification 1 0 mm 1 0 mm Verification Kit 85059AOV 1 0 mm 45 MHz 50 GHz 85059AOV110 1 0 mm above 50 GHz 1 The 85059A 1 0 mm 45MHz 50GHz Use w 8517A B selection is not used for the 8510XF Performance Verification Table 4 3 System...

Page 123: ...nd Performance Verification software on a PC or controller NOTE This manual documents the use of the verification software on a PC Use of the software on a controller is not documented The PC must have an INTEL 486 processor or higher and must have at least eight megabytes of memory available The PC must also have an GPIB card in order to communicate with the 8510XF 1 Install BASIC for Windows Rev...

Page 124: ...icon to re run the program The 8510 software should now load and run 4 Edit the AUTOST program according to the instructions in the warning message However if you do not want to run the verification portion of the software you can skip this step by selecting CONTINUE NOTE For additional information on running the system specifications system uncertainty and edit system specifications portions of t...

Page 125: ...p for Low Band Verification 50 GHz using Table 4 2 on page 4 4 for the E7352A 110 GHz system or Table 4 3 on page 4 4 for the E7342A 85 GHz system a Select NEXT or PREVIOUS to step through the list of selections for each menu item b Use the up and down arrow keys on the PC to advance from one menu item to another c Select DONE when you have made a selection for each menu item 5 The main menu is di...

Page 126: ...b Select Software Config c Select Printer Connected to 2 Select printer output choice refer to Table 4 5 3 Select Done and Previous Menu to return to Main Menu Table 4 5 Printer Table of Selections Printer Connected To GPIB WIN Printer1 LPT1 LPT2 File2 1 Windows default printer 2 Under Printer Redirection File Verify directory path exists before entering name of path ...

Page 127: ... Agilent part number 11500 60001 onto the right test head port 2 prior to calibration This cable is part of the 85059A 1 0 mm Precision Calibration and Verification Kit and is considered to be a test port cable b A full two port calibration is required A table of calibration standards required for each frequency range can be found in the 85059A 1 0 mm precision calibration and verification kit man...

Page 128: ... the verification standard and enter the standard s serial number The verification standards may be measured in any order NOTE It is recommended to connect the Verification Standards to the cable on port 2 prior to attempting to connect to port 1 Then follow the recommended procedure for making a thru connection outlined under step 3 above to avoid damaging the cable 6 Use defaults for Cal Set for...

Page 129: ...mance Verification Verification Procedures 11 Select Select Standard to return to the Standard Selection Menu Repeat steps 5 through 10 above for the other verification standard refer to Table 4 6 12 Select Prior Menu until the Main Menu appears ...

Page 130: ...torage locations refer to step 3 on page 4 9 6 Select Select Standard to go to the Standard Selection Menu 7 To verify the system use the Verification Standards provided with the 85059A 1 0 mm Precision Calibration and Verification Kit refer to Table 4 6 on page 4 10 Using the menu select the verification standard and enter the standard s serial number The verification standards may be measured in...

Page 131: ...eeded the verification standard can be remeasured by selecting Repeat Measure 13 Select Select Standard to return to the Standard Selection Menu Repeat steps 7 through 12 above for the other verification standard refer to Table 4 6 on page 4 10 14 Select Prior Menu until the Main Menu appears 15 Select Quit Program to exit the program then close the program window to finish ...

Page 132: ...equency counter Materials Required The following materials are required to run the tests 5343 Option 001 10 MHz to 26 5 GHz frequency counter 10 dB pad NOTE If the source and test set operate below 500 MHz connect the test set output to the 10 Hz 500MHz BNC connector on the frequency counter The input switch on the frequency counter must also be in the 10 Hz 500 MHz position Procedure 1 Connect th...

Page 133: ...ion 5 From the analyzer front panel enter the frequency per the tables at the end of this section NOTE Be sure to connect RF and LO output to the 500 MHz 26 5 GHz input on the frequency counter Also set the input switch to the 500 MHz 26 5 GHz position 6 Measure the frequency with the counter then record the value on the test record at the end of this section In Case of Difficulty If the measured ...

Page 134: ...e Equipment Required chapter of the On Site Service Manual The quoted uncertainty represents limits of 3 times the equivalent standard deviation 3s and is intended to represent 90 confidence level 2 For 83620A B or 83621A B only Table 4 8 Performance Test Record for CW Frequency Accuracy Test LO Source Instrument Model _________________ Report Number __________________________ Date _______ Frequen...

Page 135: ... shorts calibration for frequencies above 50 GHz This combination of techniques provides the best possible calibration results on the 8510XF SOLT Offset Shorts TRL TRM rr51c 50 GHz Load Lossy Delay Line FWD REV ISOL N LOAD For 50 GHz a lossy delay line is required in addition to a 50 GHz load For 50 GHz use a 50 GHz load only Note If you use a 50 GHz load only a bad calibration will result due to ...

Page 136: ...4 18 8510XF Network Analyzer Systems Performance Verification CW Frequency Accuracy Test ...

Page 137: ...intenance In This Chapter Electrostatic Discharge page 5 2 1 0 mm Connector Care page 5 3 Detector Gain Calibration page 5 6 Conversion Loss Calibration page 5 8 Theory of Operation page 5 9 System Block Diagrams page 5 21 Troubleshooting page 5 37 ...

Page 138: ...described below Always have a grounded anti static mat in front of your test equipment and wear a grounded wrist strap attached to it Ground yourself before you clean inspect or make a connection to a static sensitive device or test port You can for example grasp the grounded outer shell of the test port briefly to discharge static from your body Discharge static electricity from a device before c...

Page 139: ...ector Care In order to accommodate an extremely wide frequency range in a single connect system the 8510XF uses 1 0 mm connectors on its test heads These connectors because of their small dimensions and high replacement cost require careful use and maintenance Figure 5 1 1 0 mm Connectors ...

Page 140: ...nectors must be replaced The more a connector is used the faster it wears and degrades The wear is greatly accelerated when connectors are not kept clean Calibration devices should have a long life if their use is on the order of a few times per week Test port connectors may have many connections each day and are therefore more subject to wear To minimize wear use an adapter available as part of t...

Page 141: ...n the parts to be cleaned and do not allow alcohol to wash down inside the connectors An excessive flow of alcohol may carry residue into the interior of the connectors 4 Gently wipe all connecting surfaces with the end of the cleaning swab 5 Dry with compressed air 6 Inspect the connectors again and repeat the cleaning procedure if necessary Connector care supplies The following supplies can be o...

Page 142: ...r these gain settings are stored in an EEPROM within the millimeter wave controller The correction factors are taken at one fixed frequency and then at another fixed frequency This process is automatic the frequencies are specified in firmware and are chosen so as to give the level control system the greatest possible dynamic range When to Calibrate Running detector gain calibration takes about a ...

Page 143: ...ts entire power range any device connected to the test ports could be at risk of damage from excessive RF input levels 3 Call up the detector gain calibration menu by pressing SYSTEM MORE RF POWER CONFIG MORE RESET DET GAIN CAL 4 Choose one of the options from the menu a If RUN CAL USER PRST is selected the detector gain calibration routine is run and is followed by a user preset This returns the ...

Page 144: ...frequency are stored in an EEPROM within the millimeter wave controller Measurement frequencies occur at intervals of 25 MHz up to 18 GHz Above 18 GHz measurement frequencies occur at intervals of 50 MHz When to Calibrate Calibration is performed at the factory prior to shipment thereafter it should be performed as required NOTE Conversion loss calibration data applies only to the specific combina...

Page 145: ...plers are used to separate incident RF signals a1 and a2 from reflected or transmitted RF signals b1 b2 The separated RF signals are mixed with a common LO signal in order to generate the four IF inputs to the network analyzer This process is typical of 8510C mixer based test sets generally it is not unique to the 8510XF Figure 5 2 Signal Separation and Mixing ...

Page 146: ... model and option selected the 8510XF can have up to 16 mixers Mixer Locations Figure 5 3 shows the locations of the mixers for different frequency bands in an E7350A E7352A with Option 005 For the sake of simplicity the figure shows only half of the test set An actual test set would include another test head and another pair of low band mixers in the controller the total number of mixers would be...

Page 147: ...ignals from the LO source are also multiplied in the sense that the mixers in certain ranges use a harmonic of the LO input and not the fundamental The four basic frequency bands 045 to 2 2 to 50 50 to 75 and 75 to 110 GHz are further subdivided in terms of how the RF and LO frequencies are multiplied in order to achieve the desired test frequency This subdivision of ranges is somewhat different f...

Page 148: ...f the test head 50 to 64 2 2 12 V band mixers in the millimeter wave subassembly of the test head 64 2 to 75 2 14 V band mixers in the millimeter wave subassembly of the test head 75 to 85 5 3 14 W band mixers in the millimeter wave subassembly of the test head 85 5 to 97 7 3 16 W band mixers in the millimeter wave subassembly of the test head 97 7 to 110 3 18 W band mixers in the millimeter wave ...

Page 149: ...ency rather than the fundamental The LO frequency is roughly one third of the RF frequency with a slight frequency offset to create the 20 MHz IF 50 to 75 GHz Band or 50 to 85 GHz Band In the 50 to 75 GHz range the signal from the RF source is applied to a frequency doubler in the test head The mixers for this range are located in the test heads in the lower half of the test head which is designat...

Page 150: ...trol circuit a coupler is placed in the RF path and the coupled RF signal is applied to a detector The detector voltage is fed back to an amplifier which controls the RF source This loop amplifier drives the RF source so as to achieve a particular detected RF level Figure 5 4 Comparing RF and IF Leveling Systems The level control circuit in the 8510XF includes a refinement of this basic leveling l...

Page 151: ... gain circuit a detector a multiplying DAC and a blanking circuit These are described individually below NOTE There is only one feedback path but the IF input to that path can come from any of the reference mixers that is the mixers for the a1 and a2 channels in the active frequency range The active test port and the current test frequency determine which mixer is supplying the IF feedback at any ...

Page 152: ...DAC the multiplier is a digital input from the 8510C and is used to apply correction factors to the detector voltage Correction factors are needed because of 1 imprecision in the step attenuators and 2 variations in RF power across the frequency range of the 8510XF These issues are discussed under Level Calibration on page 5 18 Figure 5 5 8510XF Level Control ...

Page 153: ...m power setting to the requested level The integrator insures that the RF level is brought up smoothly and rapidly Spurious error messages When the blanking circuit drives the modulator so as to minimize the RF level this event is interpreted by the RF source as an error condition unleveled and or overmod and an SRQ is sent over the GPIB to the 8510C If this error detection system were not modifie...

Page 154: ...utput path so as to adjust the output power from the 83651B Level Calibration There are two level calibration processes designed to counteract two different sources of error Imprecision in the step attenuators Frequency related variations in mixer performance NOTE The correction factors taken during these calibration processes are valid only for a particular millimeter wave controller left test he...

Page 155: ...d with a typical accuracy of 0 5 dB The level control range is at least 20 dB if the entire frequency range of the 8510XF is used If a smaller portion of the frequency range is used the level control range is typically greater LO Levels The LO signal from the 83621B is amplified divided and distributed to the various mixers in the test heads and in the millimeter wave controller in the case of the...

Page 156: ...d to the ALC circuit which compares the detector voltage with a reference voltage and feeds back a control signal to the amplifier The gain of the amplifier is adjusted so that the detector voltage matches the reference voltage In this way the LO input to the 50 GHz mixers is maintained at a constant level ...

Page 157: ...he illustrations on the following three pages show block diagrams for the test heads and the millimeter wave controller in a 110 GHz system The test head is subdivided internally into a millimeter wave assembly the bottom half and a microwave assembly the top half These subassemblies are depicted in separate diagrams ...

Page 158: ...5 22 8510XF Network Analyzer Systems System Maintenance System Block Diagrams This page intentionally left blank ...

Page 159: ... Band b2 RF In for 50 Band Millimeter Wave Subassembly Millimeter Wave Subassembly Microwave Subassembly See Page 2 for Block Diagram S1 U12 U11 A2 U14 1 C 2 AR4 AR6 AR5 X2 X3 Combiner Port 1 FL3 DC2 U16 AT6 AT8 AT7 U15 AT5 DC3 Bias Tee Bias Tee In RF Out mm Wave Out U13 LO LO In LO Out RF In mm Wave Input LO LO LO a1 IF In for W Band b1 IF In for W Band a1 IF In for V Band b1 IF In for V Band a1 ...

Page 160: ...5 24 8510XF Network Analyzer Systems System Maintenance System Block Diagrams ...

Page 161: ...1 Millimeter Wave Subassembly See Page 1 for Block Diagram RF In mm Wave In LO In a1 IF Out for W Band b1 IF Out for W Band a1 IF Out for V Band b1 IF Out for V Band a1 RF Out for 50 Band b1 RF Out for 50 Band Port 1 RF Out Port 2 RF Out Port 1 mm Wave Out Port 2 mm Wave Out Port 1 LO Out Port 2 LO Out a1 IF In for 2 50 Band a1 IF In for W Band a1 RF In for 2 Band a1 IF In for V Band b1 IF In for ...

Page 162: ...5 26 8510XF Network Analyzer Systems System Maintenance System Block Diagrams ...

Page 163: ...and b2 IF Out for V Band b2 IF Out for 2 50 Band b2 RF Out for 2 Band Right Test Head See Page 2 for Block Diagram Left Test Head See Page 2 for Block Diagram AR10 AR8 FL8 FL7 S5 S3 IF Outputs to HP 8510C C C U8 U6 R R I I L L RF RF LO LO IF IF a1 IF Out for W Band a1 IF Out for V Band a1 IF Out for 2 50 Band RF In from HP 83651B Source 2 4mm 50 Termination Option 006 Coupled RF Out LO In from HP ...

Page 164: ...5 28 8510XF Network Analyzer Systems System Maintenance System Block Diagrams ...

Page 165: ...tions on the following three pages show block diagrams for the test heads and the millimeter wave controller in an 85 GHz system The test head is subdivided internally into a millimeter wave assembly the bottom half and a microwave assembly the top half These subassemblies are depicted in separate diagrams ...

Page 166: ...5 30 8510XF Network Analyzer Systems System Maintenance System Block Diagrams This page intentionally left blank ...

Page 167: ...or 50 Band mm Wave Out Millimeter Wave Subassembly Millimeter Wave Subassembly Microwave Subassembly See Page 2 for Block Diagram AR4 AR6 A2 A2 X2 Combiner Port 1 FL3 U14 U11 U16 DC2 AT8 DC3 U15 AT7 Bias Tee Bias Tee In RF Out mm Wave Out LO Out RF In mm Wave Input a1 IF In for V Band b1 IF In for V Band a1 RF In for 50 Band b1 RF In for 50 Band a1 a2 b1 b2 Combiner U20 R I L RF 50 85 50 LO IF Com...

Page 168: ...5 32 8510XF Network Analyzer Systems System Maintenance System Block Diagrams ...

Page 169: ...1 AT9 AT4 Millimeter Wave Subassembly See Page 1 for Block Diagram RF In mm Wave In LO In a1 IF Out for V Band b1 IF Out for V Band a1 RF Out for 50 Band b1 RF Out for 50 Band Port 1 RF Out Port 2 RF Out Port 1 mm Wave Out Port 2 mm Wave Out Port 1 LO Out Port 2 LO Out a1 IF In for 2 50 Band a1 RF In for 2 Band a1 IF In for V Band b1 IF In for V Band b1 IF In for 2 50 Band b1 RF In for 2 Band U1 A...

Page 170: ...5 34 8510XF Network Analyzer Systems System Maintenance System Block Diagrams ...

Page 171: ...nd b2 IF Out for V Band b2 IF Out for 2 50 Band b2 RF Out for 2 Band Right Test Head See Page 2 for Block Diagram Left Test Head See Page 2 for Block Diagram AR10 AR8 FL8 FL7 S5 S3 IF Outputs to HP 8510C C C NC NC U8 U6 R R I I L L RF RF LO LO IF IF a1 IF Out for V Band a1 IF Out for 2 50 Band RF In from HP 83651B Source 2 4mm 50 Termination Option 006 Coupled RF Out LO In from HP 83621B Source AL...

Page 172: ...5 36 8510XF Network Analyzer Systems System Maintenance System Block Diagrams ...

Page 173: ...dware Configuration Check If cycling power does not restore normal functioning the next step is to verify that the system hardware has been set up properly Line power Power switches and or power indicators must be ON for 85101C and 85102B Millimeter wave controller 83651B 83621B If the power indicator for any instrument is dark despite the line switch being in the ON position check the power line ...

Page 174: ... 8510XF firmware not the standard 8510C firmware To check press SYSTEM MORE SERVICE FUNCTIONS SOFTWARE REVISION If necessary reload the 8510XF operating system firmware System leveling On the SYSTEM MORE RF POWER CONFIG menu RF LEVEL SYSTEM should be selected This is the normal operating mode for the 8510XF in most applications the system will not function if RF LEVEL SYSTEM is not selected System...

Page 175: ...in a particular operating mode Are all four S parameters affected in the same way Record any error messages Does the network analyzer screen display any error caution messages If so make a note of them Although the significance of a particular message may not be obvious at the time it is displayed the information will later be useful to customer engineers in tracking down the cause of the problem ...

Page 176: ...5 40 8510XF Network Analyzer Systems System Maintenance Troubleshooting ...

Page 177: ...2 How to Order page 6 2 Frequency Ranges page 6 2 Categorization of Components page 6 3 110 GHz Systems page 6 4 Complete System page 6 4 Millimeter Wave Subsystem page 6 6 85 GHz Systems page 6 7 Millimeter Wave Subsystem page 6 9 Complete System page 6 7 Millimeter Wave Controller page 6 10 ...

Page 178: ... parts hardware for example is not included The parts are listed by their Agilent part numbers and or model numbers How to Order To order replacement parts or spares contact your local Agilent office The offices are listed under Contacting Agilent on page v To place an order you will need to know the Agilent part number and the quantity needed Frequency Ranges In the parts lists on the following p...

Page 179: ...c components are grouped together as a millimeter wave subsystem which can be ordered separately In the parts lists on the following pages millimeter wave subsystems and complete systems are listed separately NOTE 8510XF upgrade kits are available for other test systems see Upgrade Paths on page 1 10 An upgrade kit typically consists of the millimeter wave subsystem supplemented by whatever generi...

Page 180: ...E7340 20075 CABLE RF 1 W1 E7340 20076 CABLE RF 1 W2 E7340 60009 CABLE ASSEMBLY DC PLUG 2 E7342 60004 CABLE 3 5 MM 914D 2 E7342 60005 CABLE 2 4 MM 9140 4 7121 4965 LABEL PART OF AUTOMATIC SYSTEM 8 8120 1348 CABLE 03C 03F 03M LINE CORD BLACK 2 8120 1405 CABLE 03C 03F 03M LINE CORD GREY 2 8120 1838 CABLE BNC 1 FOOT 1 8120 1840 CABLE BNC 4 FEET 1 8120 3444 CABLE GPIB 0 5 METER Model 10833D 2 8120 3445...

Page 181: ...86 63007 POWER DISTRIBUTION UNIT 240 V EUROPEAN FOR 1 6 METER CABINET OPTION 230 ONLY 1 E3661A RACK 1 6 METER 1 E3661A AW3 NORTH AMERICAN LOCALIZATION 120V 16 A THIS OPTION DETERMINES PDU AND FAN 1 E3661A AW5 EUROPEAN LOCALIZATION 240V 8A THIS OPTION DETERMINES PDU AND FAN 1 E3663 00001 RAIL INSTRUMENT SUPPORT 12 E7350 80001 LABEL ID E7350A 1 E7350 90001 OPERATING SERVICE MANUAL E7340 E7350A 1 E73...

Page 182: ...08510 60126 CABLE 24C 2 4 MM M F 2 11900B ADAPTER 2 4 MM F F 1 5061 5311 3 5 MM CONNECTOR F F 1 8120 1405 CABLE 03C 03F 03M LINE CORD GREY 1 8120 3447 CABLE GPIB 4 METER Model 10833C 1 E7340 20075 RF CABLE 1 W1 E7340 20076 RF CABLE 1 W2 E7341A MILLIMETER WAVE CONTROLLER 1 E7340 60009 CABLE ASSEMBLY DC PLUG 2 E7342 60004 CABLE 3 5 MM 914D 2 E7342 60005 CABLE 2 4 MM 9140 4 E7350 90001 OPERATING SERV...

Page 183: ...1 4965 LABEL PART OF AUTOMATIC SYSTEM 8 8120 1348 CABLE 03C 03F 03M 120V LINE CORD BLACK 2 8120 1405 CABLE 03C 03F 03M 120V LINE CORD GREY 2 8120 1838 CABLE BNC 1 FOOT 1 8120 1840 CABLE BNC 4 FEET 1 8120 3444 CABLE GPIB 0 5 METER Model 10833D 2 8120 3445 CABLE GPIB 1 METER Model 10833A 3 8120 3447 CABLE GPIB 4 METER Model 10833C 1 8120 5370 CABLE BNC 2438C 2 83621B SYNTHESIZED SWEEPER 45 MHz 20 GH...

Page 184: ... DETERMINES PDU AND FAN 1 E3661A AW5 EUROPEAN LOCALIZATION 240V 8A THIS OPTION DETERMINES PDU AND FAN 1 E3663 00001 RAIL INSTRUMENT SUPPORT 12 E7340 20075 RF CABLE 1 W1 E7340 20076 RF CABLE 1 W2 E7342 60004 CABLE 3 5 MM 914D 2 E7342 60005 CA 2 4 MM 9140 4 E7340 60009 CABLE ASSEMBLY DC PLUG 2 E7341A MILLIMETER WAVE CONTROLLER 1 E7342L TEST HEAD ASSEMBLY LEFT 1 E7342R TEST HEAD ASSEMBLY RIGHT 1 E735...

Page 185: ...60107 CABLE INTERCONNECT 1 08510 60126 CABLE 2 4MM F F 2 11900B ADAPTER 2 4 MM F F 1 5061 5311 3 5 MM F F CONNECTOR 1 8120 1405 CABLE 03C 03F 03M LINE CORD GREY 1 8120 3447 CABLE GPIB 4 METER Model 10833C 1 E7340 20075 RF CABLE 1 W1 E7340 20076 RF CABLE 1 W2 E7340 60009 CABLE ASSEMBLY DC PLUG 2 E7341A MILLIMETER WAVE CONTROLLER 1 E7342L TEST HEAD ASSEMBLY LEFT 1 E7342R TEST HEAD ASSEMBLY RIGHT 1 E...

Page 186: ...ve Controller Millimeter Wave Controller The figure below shows the locations of circuit boards and major assemblies within the millimeter wave controller The parts list for the controller appears on the following page Figure 6 2 Assembly Locations within the Controller ...

Page 187: ...BOARD ASSEMBLY GPIB XF 1 A12 08513 60006 BOARD ASSEMBLY GPIB INTERCONNECT 1 A13 08513 60005 BOARD ASSEMBLY FRONT PANEL 1 A14 9135 0217 FILTER LINE MODULE 1 A15 E7340 60094 BOARD ASSEMBLY LEVELING DAC 1 A16 5086 7530 AMPLIFIER 1 TO 20 GHz 1 AR5 5086 7650 AMPLIFIER INPUT 1 AR1 0955 0612 AMPLIFIER 16 dB 10 MHz TO 2 GHz SMA OPTION 005 ONLY 3 AR6 AR12 AR13 11636B POWER DIVIDER OPTION 005 ONLY 1 U1 0955...

Page 188: ...6 12 8510XF Network Analyzer Systems Replaceable Parts Millimeter Wave Controller ...

Page 189: ...8510XF Network Analyzer Systems 7 1 7 Menus Commands In This Chapter Menu Maps page 7 2 New GPIB Commands on page 7 43 Unsupported GPIB Commands on page 7 47 New Messages on page 7 49 ...

Page 190: ...nary For a review of the differences between the 8510XF menus and standard 8510C menus see 8510XF Operating System on page 3 2 Table 7 1 Sequence of Menu Maps Title Page CAL 7 3 CAL RESPONSE CAL RESPONSE AND ISOLATION CAL 7 5 CAL S11 1 PORT CAL S22 1 PORT CAL 7 7 CAL ONE PATH 2 PORT CAL 7 9 CAL FULL 2 PORT CAL 7 11 CAL TRL 2 PORT 7 13 CAL MODIFY CAL SET 7 15 CAL MODIFY CAL KIT 7 17 COPY 7 19 DISC ...

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Page 211: ...tion table No softkey equivalent Used by Agilent service engineers to load values into the power part of the correction table in the memory of the 8510C LGCATTSET att SYSTEM MORE SERVICE XF TESTSET SERVICE LEVELING SETTINGS SET ATTN Used by Agilent service engineers to set the attenuator in the programmable gain portion of the level control circuit Values range from 0 to 133 LSB 0 5 dB LGCCALGAIN ...

Page 212: ...read values from the power part of the correction table in the memory of the 8510XF POWP1 STIMULUS MENU POWER MENU PORT1 POWER Port 1 power level in dBm can be specified POWP2 STIMULUS MENU POWER MENU PORT2 POWER Port 2 power level in dBm can be specified PPBLANKON SYSTEM MORE RF POWER CONFIG MORE BLANKING ON Enables port power blanking during frequency transitions or port drive transitions PPBLAN...

Page 213: ...pe for Port 1 0 for OFF 1 for ON SLPP2OFF STIMULUS MENU POWER MENU PORT 2 SLOPE OFF Disables power slope for Port 2 SLPP2ON slope dB GHz STIMULUS MENU POWER MENU PORT 2 SLOPE ON Enables power slope for Port 2 value in dB GHz can be specified SLPP2 No softkey equivalent Queries the status of power slope for Port 2 0 for OFF 1 for ON SOU1LEV No softkey equivalent Queries the status of level control ...

Page 214: ...L SYSTEM Places leveling of the 83621B LO source under control of the 8510XF TSPEEK SYSTEM MORE SERVICE XF TESTSET SERVICE PEEK TEST SET Used by Agilent service engineers to read from a location specified by the TSPEEL command in the memory of the millimeter wave controller TSPEEL SYSTEM MORE SERVICE XF TESTSET SERVICE PEEK POKE LOCATION Used by Agilent service engineers to specify a location in t...

Page 215: ... sets NO DEFA Multiple source default equation NO DEFIRECV Multiple source define receiver equation NO DEFISOUR1 Multiple source define RF source 1 NO DEFISOUR2 Multiple source define LO source 2 NO DETENORB Select the 10 KHz IF path and detectors NO DETEWIDB Select the 3 MHz IF bandwidth path and detectors NO DUTC Set the duty cycle of the internally generated trigger YES EDITMULS Edit multiple s...

Page 216: ...source mode NO MULSON Turn ON multiple source mode NO NORMSTEP Select normal data acquisition cycle NO OFFF Multiple source offset frequency YES PULOHIGH Set pulse output active high NO PULOLOW Set pulse output active low NO PULP Select pulse profile domain NO PULW Set width of internally generated pulse YES QUICSTEP Select the quick step phase lock mode NO RAMP Ramp sweep mode NO TRIS Trim sweep ...

Page 217: ...es of the RF and LO sources must be calculated for each step this setup causes a delay CONFIGURING FOR LVL DET GAIN CALIBRATION These messages are displayed in connection with the detector gain cal process CALIBRATING LVL DET GAIN N DONE PLEASE WAIT LVL DET GAIN CAL COMPLETE SAVING GAIN CAL N DONE PLEASE WAIT VERIFYING GAIN CAL N DONE PLEASE WAIT LOADING GAIN CAL N DONE PLEASE WAIT SAVING CONV LOS...

Page 218: ...tatus Message 203 This function cannot be used if SYSTEM leveling is selected on the SYSTEM MORE RF POWER CONFIG menu see RF Power Configuration on page 3 30 GAIN CAL or CONVERSION LOSS CAL LOAD SAVE FROM TESTSET EEPROM FAILED GPIB Status Message 204 The GAIN CAL or CONV LOSS CAL data cannot be loaded from the EEPROM in the millimeter wave controller however no functionality is disabled LVL DET GA...

Page 219: ...6 5 18 full 2 port 3 18 level 5 18 measurement 3 6 to 3 27 offset shorts 3 7 one path 2 port 3 17 on wafer 3 8 3 48 response 3 14 response isolation 3 15 S11 1 port 3 16 S22 1 port 3 16 SOLT 3 7 standards 3 10 3 11 techniques 3 7 TRL 3 7 3 19 TRM 3 7 3 19 types 3 13 care of 1 0 mm connectors 5 3 Cascade Microtech Inc 3 47 caution messages vi 2 9 2 10 2 11 caution notices 5 2 checklist 2 7 optional...

Page 220: ...u 3 5 IF frequency default setting 2 42 IF frequency function 3 42 IF gain menu 3 5 3 38 IF level gain setting 3 41 incomplete shipments 2 5 indicators power 5 37 information sources 1 2 to 1 3 installation millimeter wave controller 2 23 to 2 25 test heads 2 26 to 2 31 work surface 2 20 interconnections controller test head 2 28 to 2 31 L language switches 2 37 5 38 LEDs active 5 37 millimeter wa...

Page 221: ...Y 3 46 power flatness function 3 4 indicators 5 37 leveling function 3 5 LO config 3 5 3 36 LO settings 3 37 menu 3 4 port 3 28 requirements ac power 2 2 RF config 3 5 3 30 RF settings 3 33 unratioed 5 39 power domain default settings 2 42 power slope 3 28 3 29 3 33 precautions 2 9 preset 2 42 pressure altitude 2 3 probe stations 3 47 programmable gain circuit 5 15 pulse config function 3 5 pulse ...

Page 222: ...7 test heads installation 2 26 to 2 31 test port inputs 2 10 test ports 2 27 test sets multiple 1 8 theory of operation 5 9 to time domain 1 9 tools required 2 11 trim sweep function 3 4 TRL calibration 3 7 3 19 TRM broadband calibration 3 45 TRM calibration 3 7 3 19 troubleshooting 5 37 turn on system 2 38 types of standards 3 20 typographical conventions ix U uncoupled channels function 3 4 unle...