Appendix E
427
Theory on Material Measurement
Dielectric Material Measurement
E. Theo
ry on
Ma
teria
l
Me
asur
eme
n
t
Errors Due to Residual Parameters of Text Fixture
Since the 16453A test fixture has errors due to electrical length, residual impedance, and
stray admittance, these errors can be minimized by performing OPEN, SHORT and LOAD
calibrations on the DUT contact surface of the test fixture.
Errors Due to Air Gap
The 16453A test fixture uses the Electrode Contact Method to sandwich a DUT between
electrodes. In this method, even if the DUT is processed as flat as possible, an air gap is
formed between the DUT and the electrodes, affecting the measured capacitance value as
an error component.
Figure E-5
Errors Due to Air Gap
There are several methods to minimize error due to air gap:
•
Form thin film electrodes on a dielectric material.
•
Maximize the spring pressure on the text fixture to the extent that it does not deform the
DUT.
•
When measuring a thin (several hundred
μ
m) and highly-pressure-resistant DUT with a
smooth surface, lay three to four DUTs one on the top of the other.
If the first method is used, it is necessary to process the DUT into a shape suitable for the
positioning of the electrodes formed on the DUT and the 16453A structure.
Summary of Contents for E4991A
Page 6: ......
Page 24: ...18 Contents ...
Page 80: ...74 Chapter3 Setting Measurement Conditions Averaging Measurement Results ...
Page 220: ...214 Chapter9 Setup and Use of Control Management Functions System Recovery ...
Page 338: ...332 AppendixB Probe Station Connection Kit Option 010 OPEN SHORT LOAD Calibration ...
Page 428: ...422 AppendixD Menu References Menu References ...
Page 482: ...476 AppendixI Messages Wait measuring comp standard ...