92
Chapter 4
Calibration and Compensation
Definition of Calibration/Compensation Kit
enter the definition of the calibration kit:
Definition of Calibration Kit in Permittivity Measurement
When the permittivity measurement (
Permittivity
) is selected as the material measurement
type (
Material Type
) in “Setting Material Measurement Parameter (Option 002 only)” on
page 43, the definition of the calibration kit is different from impedance measurement.
Procedure
Step 1.
Right-click to open the shortcut menu and click the
Cal/Comp
button (or press
).
Step 2.
Click the
Cal Kit Menu
button.
When the
permittivity measurement is selected,
PTFE
is selected as the load standard of the
calibration kit
in the
Cal Kit Type
box.
Step 3.
By using the numeric entry dialog box that appears by right-clicking inside the calibration
kit definition box (or using the
ENTRY/NAVIGATION
block keys on the front panel),
enter the definition of the compensation kit:
Definition of Compensation Kit
Figure 4-5 shows the circuit model of the compensation kit adopted in the E4991A.
Calibration Kit Definition Box
Value to be defined
Open G: (S)
Equivalent parallel conductance G of Open
calibration standard (preset state: 0 S)
Open C: (F)
Equivalent parallel capacitance C of Open
Calibration standard (preset state: 82 fF)
Short R: (
Ω
)
Equivalent series resistance R of Short
Calibration standard (preset state: 0
Ω
)
Short L: (H)
Equivalent series inductance L of Short
Calibration standard (preset state: 0 H)
Load R: (
Ω
)
Equivalent series resistance R of Load
Calibration standard (preset state: 50
Ω
)
Load L: (H)
Equivalent series inductance L of Load
Calibration standard (preset state: 0 H)
Load Calibration Standard Definition Box
Load Calibration Standard to be defined
ε
r Real
Real part of permittivity of the load calibration
standard (preset state: 2.1)
ε
r Loss
Imaginary part of permittivity of the load
calibration standard (preset state: 0)
Thickness
Thickness of the load calibration standard
(preset state: 800
μ
m)
Summary of Contents for E4991A
Page 6: ......
Page 24: ...18 Contents ...
Page 80: ...74 Chapter3 Setting Measurement Conditions Averaging Measurement Results ...
Page 220: ...214 Chapter9 Setup and Use of Control Management Functions System Recovery ...
Page 338: ...332 AppendixB Probe Station Connection Kit Option 010 OPEN SHORT LOAD Calibration ...
Page 428: ...422 AppendixD Menu References Menu References ...
Page 482: ...476 AppendixI Messages Wait measuring comp standard ...