2-5
Brooks
®
Model 5860
i
Section 2 Installation
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonically cleaned.
Maximum Flow Rate
Recommended Filter Size
100 sccm
1 micron
500 sccm
2 microns
1 to 5 slpm
7 microns
10 to 30 slpm
15 microns
Note: The above lists the maximum recommended porosity for each flow
range. It is recommended that the minimum micron porosity that does not
limit the full scale flowrate be used.
2-7 Electrical Interfacing
To insure proper operation the Model 5860
i
must be connected per Figures
2-2, 2-3 and 2-4 and configured according to section 2-7.
The following minimum electrical connections must be made for new
installations:
Chassis Ground
Signal Output Return
Voltage or Current Signal Output
+15 - +28 Vdc Supply
Supply Common
Electrical Hook-Up
Signal Output
The flow signal output can be measured as a voltage and a current
simultaneously on two different pins of the D-connector. Pin 2 indicates the
flow rate with a 0-5 Vdc signal proportional to the mass flow rate. Pin 4
indicates the flow rate with either a 0-20mAdc or 4-20mAdc current signal
as determined by jumpers on the printed circuit board ( refer to Section 2-7
for jumper positions ). Both the current and voltage signals are returned on
Pin 10 of the D-connector.
Supply
The power for the mass flow meter is connected to Pin 5 (+15 to +28 Vdc)
and Pin 9 ( supply common ) of the D-connector. Refer to Section 1-3 for
the power requirements.
NOTE:
The length of wire for the power supply connections ( Pins 5&9 )
must be kept as short as possible to insure the minimum voltage (+15 ) is
available at the mass flow meter.
Chassis Ground
Connect earth ground to Pin 14 of the D-connector.
Table 2-1 Recommended Filter Size
