Brooks 5860i, Installation And Operation Manual

Page 1: ...Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860i Model 5860i Mass Flow Meter...

Page 2: ...bstitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qual...

Page 3: ...and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior perform...

Page 4: ...Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Brooks Model 5860i THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 5: ...ns 2 4 2 5 Installation 2 4 2 6 In Line Filter 2 5 2 7 Electrical Interfacing 2 5 2 8 Configuring PC Board 2 6 Section 3 Operation 3 1 Theory of Operation 3 1 3 2 Operating Procedure 3 2 3 3 Zero Adju...

Page 6: ...rical Hook Ups 2 6 3 1 Flow Sensor Operational Diagram 3 2 3 2 Model 5860i Calibration Connections 3 4 3 3 Adjustment Potentiometer Location 3 4 3 4 Fast Response Adjustment 3 4 3 5 PC Board Jumper Lo...

Page 7: ...g to operate or repair the Model 5860i 1 2 Description The Brooks Model 5860i Mass Flow Meter is widely used where manual electronic or computer controlled gas handling occurs The Model 5860i consists...

Page 8: ...SEMI Semiconductor Equipment and Materials International standard 0 C and 101 3 kPa 760 Torr Accuracy 1 full scale including linearity at calibration conditions 1 5 full scale including linearity for...

Page 9: ...Span Less than 1 0 F S shift over 10 50 C range Pressure Sensitivity 0 03 per PSI up to 200 PSIG Power Supply Sensitivity Negligible over the allowable voltage range Mounting Attitude Sensitivity 0 5...

Page 10: ...1 4 Brooks Model 5860i Section 1 Introduction Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 11: ...com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 71...

Page 12: ...15 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 007...

Page 13: ...efer to Figures 2 1 through 2 2 Recommended installation procedures a The Model 5860i should be located in a clean dry atmosphere relatively free from shock and vibration b Leave sufficient room for a...

Page 14: ...nal Output White 3 Not Used 4 Current Signal Output Green 5 15 to 28 Vdc Supply Orange 6 Not Used 7 Current Setpoint Input Wht Blk 8 Voltage Setpoint Input Red Blk 9 Supply Common Grn Blk 10 Signal Ou...

Page 15: ...cal connections must be made for new installations Chassis Ground Signal Output Return Voltage or Current Signal Output 15 28 Vdc Supply Supply Common Electrical Hook Up Signal Output The flow signal...

Page 16: ...or Remove the can The can must be replaced before returning the unit to service Refer to Section 2 6 for the proper electrical hook up Refer to Figure 3 5 for printed circuit board jumper locations an...

Page 17: ...linear 0 5 Vdc signal directly proportional to the gas mass flow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resistor in an electrical ammeter The rest...

Page 18: ...zero flow The adjustment is made in our calibration laboratory which is temperature controlled to 21 1 C 70 F 2 F After initial installation and warm up in the gas system the zero flow indication may...

Page 19: ...r for an output of 0mV 2mV c Increase the flow rate until the flow signal output equals 5 000V Connect the DVM positive lead to the TP2 linearity voltage and the negative lead to TP4 signal common Adj...

Page 20: ...3 Operation Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Figure 3 2 Model 5860i Calibration Connections Figure 3 3 Adjustment Potentiometer Location Figur...

Page 21: ...error recorded in step g is less than 0 5 then the calibration procedure is complete 2 If the error is greater than 0 5 set the flow rate for a flow signal output of 100 5 000V Connect the DVM positi...

Page 22: ...Brooks Model 5860i 3 6 Section 3 Operation Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Figure 3 5 PC Board Jumper Location and Function...

Page 23: ...steady state accuracy of the flowmeter as adjusted in Section 3 4 Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed three samples per second or greater to monito...

Page 24: ...Brooks Model 5860i 3 8 Section 3 Operation Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 25: ...ed malfunction can cause many hours of unnecessary downtime If possible make the following system checks before removing a suspected defective mass flow meter for bench troubleshooting or return espec...

Page 26: ...tive Sensor Replace Sensor Assembly Refer to Section 4 4 Meter grossly out of calibration Partially clogged sensor Clean sensor refer to the cleaning procedure Section 4 2 Flow is higher than indicate...

Page 27: ...fy the accuracy of the mass flowmeter If the mass flowmeter functions as described above it is functioning properly and the problem may lie elsewhere Table 4 1 lists possible malfunctions which may be...

Page 28: ...reassemble Refer to Section 4 4b assembly 7 Purge the assembled controller with dry nitrogen 8 Perform the calibration procedure in Section 3 4 9 When the flowmeter is reinstalled in the system the co...

Page 29: ...15 from the flowmeter body 1 6 Remove the restrictor assembly 9 from the inlet side of the flowmeter body 1 using the restrictor tool part of service tool kit listed in Section 5 Table 5 2 B Assembly...

Page 30: ...ut signal and the mass flow rate This is due to the difference in heat capacities between the two gases This scale shift can be approximated by using the ratio of the molar specific heat of the two ga...

Page 31: ...430 1 985 4 912 Cyanogen CN 2 0 498 1 366 2 322 Cyanogen Chloride CLCN 0 618 1 480 2 730 Cyclobutane C4 H8 0 387 1 413 2 491 Cyclopropane C3 H6 0 505 1 224 1 877 Deuterium D2 0 995 0 379 0 177 Dibora...

Page 32: ...752 1 259 1 964 Octofluorocyclobutane C4 F8 0 169 2 672 8 933 Oxygen O2 0 988 1 067 1 429 Oxygen Difluoride OF2 0 672 1 388 2 402 Ozone O3 0 738 1 310 2 138 Pentafluorethane f 125 C2 HF5 0 287 2 070...

Page 33: ...ory of Operation If the restrictor assembly has been contaminated with foreign matter the pressure drop vs flow characteristics will be altered and it must be cleaned or replaced It may also be necess...

Page 34: ...ould be selected NOTE If the calculated flow rate is such that two different size restrictors could be used always select the larger size If a mixture of two or more gases is being used the restrictor...

Page 35: ...82 M 118 6 167 9 S110Z283 N 166 0 235 2 S110Z284 P 232 5 329 3 S110Z285 Q 325 4 460 9 S110Z286 R 455 7 645 3 S110Z287 S 638 0 903 4 S110Z288 T 893 2 1265 S110Z289 U 1250 1771 S110Z290 V 1750 2479 S110...

Page 36: ...Brooks Model 5860i 4 12 Section 4 Maintenance Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 37: ...allation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 5 1 General When ordering parts please specify Brooks Serial Number Model Number Part Description Part Number Qua...

Page 38: ...Brooks Model 5860i 5 2 Section 5 Parts List Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 Figure 5 1 Model 5860i Parts Drawing...

Page 39: ...or on one end 5 Feet S124Z361AAA with no termination 10 Feet S124Z362AAA on other end 25 Feet S124Z363AAA 50 Feet S124Z435AAA Connector on one end 5 Feet S124Z576AAA with Connector for Model 5870 10 F...

Page 40: ...Brooks Model 5860i 5 4 Section 5 Parts List Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 41: ...venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erf...

Page 42: ...lease refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos...

Page 43: ...c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m me ce c ble vous devez utiliser u...

Page 44: ...en bedekkingsgraad van 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogacht...

Page 45: ...k jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vi...

Page 46: ...ettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE...

Page 47: ...Brooks Model 5860i Installation and Operation Manual X TMF 5860i MFM eng Part Number 541B110AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Page 48: ...ninety 90 days whichever is longer This limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SU...