NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 14 of 20
Example of polishing procedure:
Polishing procedure:
If #300 grinding wheel is used for grinding, the polishing process should be started from
step 1.
If #800 grinding wheel is used for grinding, the polishing process should be started from
TIME
……… Displays the time set for a grinding polishing cycle
SPEED
………
Displays the selected rpms of the platen or power
head
Fluids
………
Selects between fresh water, recirculated water, and
OFF
Head rotation ………
Selects the rotational direction of the head and
specimen holder. (Complementary or Contra)
Force
………
Displays the amount of operational force applied to
the specimens in specimen holder.
Water
………
Activates the water flow for platen cooling and
rinsing
Force mode
………
Selects between Single or Central mode (Central for
large sample)
Increase
………
Increase the parameter value for time, speed, and
force.
Decrease
………
Decrease the parameter value for time, speed, and
force.
Platen only
……… Activates the platen for manual polishing
Dispense
……… Activates a connected dispenser (No use for us)
Pause/stop
……… Pauses or stops a cycle