NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 5 of 20
3. Contact List and How to Become a Qualified User
3.1
Emergency Responses and Communications
1. Security Control Center: 2358-8999 (24hr) & 2358-6565 (24hr)
2. Wing Leong CHUNG - Safety Officer (2358-7211 & 64406238)
3. Preason Man Wai Lee – Deputy Safety Officer (2358-7900),
4. Henry Chun Fai YEUNG – Senior Technician (2358-7896 & 2358-7219)
In case of technical help, please contact NFF staffs,
1. Henry Chun Fai YEUNG – Senior Technician (2358-7896 & 2358-7219))
2. Shuyun ZHAO –Scientific Officer (2358-7212)
3.2
Training to Become a Qualified EcoMet
TM
300
User
Please follow the procedures below to become a qualified user of the EcoMet
TM
300:
1.
Read all materials provided on the NFF website of the EcoMet
TM
300.
2.
E-mail to Mr. Henry Chun Fai YEUNG requesting EcoMet
TM
300 operation
training.
3.
Hands-on operation training for EcoMet
TM
300 is required.
4.
Pass the examination for the equipment operation and the security.
4. Operating Procedures
4.1
System Description
EcoMet
TM
300 silicon polisher is composed of power head, D-shape bowl and
control panel. This system is designed to provide mechanical polish of sample
