NANOSYSTEM
FABRICATION FACILITY (NFF), HKUST
Version 1.0
Page 9 of 20
6) Move the ceramic holder onto the bonder very carefully, and put an oil-paper
(Fig.5a) and a soft silicone pad on the top, as shown in Fig. 5b.
7) Switch the RED pneumatic button to horizontal (position 2), as shown in Fig.
6a, and let the heavy metal drop down to the sample surface. Then switch the
RED pneumatic button to position 3 to add 0.5MPa pressure to heavy metal for
around 5mins until the ceramic holder is cooled down to room temperature (Fig.
6b). DON’T adjust the pressure by yourself.
Oil paper
Silicone pad
Fig. 5
(a)
(b)
Position2
Position3
Fig. 6
(a)
(b)
0.5MPa
Position1
