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P a g e
OPERATION
Turbomolecular Pump Hazards and Precautions
Fragmentation Hazards
Turbopump blades spin at tens of thousands of rotations per minute in a nearly friction-free
environment with ultra-tight tolerances inside the pump housing. Catastrophic damage may result if
the oven turbopump suffers a significant impact or is moved while the blades are spinning. A sudden
and large internal pressure increase while spinning can also induce a catastrophic failure. The pump
blades may disintegrate under these conditions, causing irreparable internal damage. In the worst
failure case, blade fragments can exit the front of the pump housing, entering the oven chamber at
high velocity.
Les aubes de turbopompe tournent à des dizaines de milliers de tours par minute dans un
environnement presque sans frottement avec des tolérances ultra-serrées à l'intérieur du corps de
pompe. Des dommages catastrophiques peuvent survenir si la turbopompe du four subit un impact
important ou est déplacée pendant que les pales tournent. Une augmentation soudaine et importante
de la pression interne pendant la rotation peut également provoquer une défaillance catastrophique.
Les aubes de la pompe peuvent se désintégrer dans ces conditions, provoquant des dommages
internes irréparables. Dans le pire des cas de défaillance, des fragments d'aubes peuvent sortir par
l'avant du boîtier de la pompe et pénétrer dans la chambre du four à grande vitesse.
Possible causes for catastrophic pump failure include:
•
Subjecting the oven or pump to severe external impacts or strong periodic vibrations or
moving the oven while the pump blades are in motion.
•
Using the oven for improper applications that generate abrupt gas pressure increases or
otherwise undermine the integrity of the turbopump. These include:
o
Pumping dust or liquids through the pump
o
Pumping corrosive or explosive media through the pump
o
Attempting to pump vapors that will condense inside the pump
•
Operating the pump in an ambient environment with potentially explosive airborne
particulates, vapors, or gases.
•
Introducing free atmosphere into the pump while spun up.
•
Using the pump in an area with strong magnetic fields or ionizing radiation.
o
These may adversely affect the pump drive or directly destabilize the moving blades
inside the pump housing.
•
Modifying the turbopump or its controllers or altering the factory settings for pump or safety
interlock operations.
Continued next page
Summary of Contents for CTVT1022-H
Page 1: ...Turbo Vacuum Ovens SVO 5 T SVO 10 T Installation and Operation Manual...
Page 6: ...6 P a g e TABLE OF CONTENTS...
Page 8: ...8 P a g e CERTIFICATIONS...
Page 20: ...20 P a g e RECEIVING...
Page 32: ...32 P a g e SYMBOLS...
Page 38: ...38 P a g e CONTROLS...
Page 62: ...62 P a g e SPECIFICATIONS...
