P16.XY20 Piezo Nanopositioning Scanner User Manual
4
3. Product Overview
3.1 Product Introduction
P16.XY20 piezo nanopositioning scanner has the following advantages:
High performance piezo stack:
P16.XY20 piezo nanopositioning scanner is driven by a highly reliable ceramic actuator
with a fully insulated structure, so its performance and service life are far better than the
traditional actuator. The insulating layer can effectively prevent the piezoelectric ceramic
from being damaged when exposed to moisture. Therefore, the stability of piezoelectric
ceramics can be guaranteed under extreme circumstances. Compared with traditional
driving mechanism, there are no transmission parts and friction. Therefore, ceramic
actuator has the characteristics of no rebound, no maintenance, and no wear, etc.
Flexible hinge structure:
P16.XY20 piezo nanopositioning scanner adopting flexible hinge mechanism has
advantages of no friction, high positioning accuracy. Flexible hinge is an element not
affected by static and dynamic friction, based on the elastic deformation of metal material
(e.g., steel) , there is no rolling and sliding parts. Flexible unit has very high load capacity
and stiffness. Hinge guide needs no maintenance and no wear and tear. Suitable for a wide
range of temperatures, no lubricating oil is required.
Strain Sensor：
Strain sensor detects the position information by its own expansion. They are fixed in the
proper position of the transmission part and measure the displacement of the moving
part. This type of position measurement is made by contact and indirect measurement. So
the displacement of the moving platform is measured by measuring lever, guide hinge, or
piezoelectric ceramic stack.
P16.XY20 piezo nanopositioning scanner has a travel range of up to ±10μm/axis in X Y, and
can move in X Y at the same time, the high flexibility ensures that XY dimensional motion
is uncoupled ,and features fast response speed, no mechanical friction, high repeatable
