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Cee® Apogee™ Developer Manual

 

 

 

 

 

 

 

 

 

 

 

 

 

Page 

12

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15

 

3.6. Start Up 

*For detailed software information, please refer to the DataStream™ manual 

 

1. 

Install the tool as shown earlier in Section 4. 

2. 

Press the lighted power switch to turn the tool power on. 

3. 

The display should momentarily show boot screen and then show main screen. 

4. 

Enter the username and password. 

(1) 

The default username and password are “admin” and “admin2” respectively. 

5. 

The tool will login and display the Process page. 

6. 

Navigate to Tools- Manual Control to run system checks to ensure the tool is working properly. 

(1) 

Turn vacuum on. Use your gloved hand to ensure vacuum is coming through the hole 
of the shaft.  

(2) 

Turn vacuum and off and check that the vacuum is turned off at the hole of the shaft. 

(3) 

Close the lid and set the spin speed to 1000 rpm. Make sure that the shaft spins and 
that the tool is reading 1000 rpm.  

(4) 

Raise the lid to check the lid interlock. The tool should stop spinning. 

(5) 

Ensure that the temperature/humidity sensor is reading on the parameter list. 

(6) 

If equipped with optional dispenses, ensure that dispenses are triggering. 

(7) 

If equipped with an optional programmable exhaust, ensure it is working properly. 

7. 

Check that the spin chuck(s) with the tool work properly. 

(1) 

The spin chucks have a slot that mates with the pin of the spin shaft. 

(2) 

Position the spin chuck so the slot and the pin line up and press onto the shaft by 
hand. 

(3) 

Ensure that the pin fully engages the slot. 

(4) 

If equipped with a screw, insert screw and tighten.  

(5) 

Test vacuum of the spin chuck with a substrate using manual control. Set the vacuum 
threshold to 64 kPa. If vacuum is less than 64 kPa, the chuck passes inspection. 

(6) 

Turn vacuum off and remove the substrate. 

(7) 

Removal of spin chuck is reverse of installation. 

8. 

If the tool passes these checks, the tool is ready to operate. Begin by creating a recipe. 

 
 

 

 

Summary of Contents for Apogee

Page 1: ...Owner s Manual Apogee Developer www costeffectiveequipment com 1 573 466 4300 ...

Page 2: ...on 6 1 11 Intended Use of Machine 6 2 Equipment Description 7 2 1 Dimensions 8 2 2 Programmability 8 2 3 Precision 8 2 4 Reliability 8 2 5 Bowl Design 8 2 6 Utilities 9 3 Installation 9 3 1 Floor Space Requirements 9 3 2 Facilities Requirements 10 3 3 Environment 11 3 4 Unpacking Inspection 11 3 5 System Installation and Setup 11 3 6 Start Up 12 4 Developer Use and Operation 13 4 1 Spin Chuck 13 4...

Page 3: ...Cee Apogee Developer Manual Page 3 of 15 5 4 Cleaning 15 ...

Page 4: ...llation of or accident to the equipment b Any major repairs or alterations are made to equipment by anyone other than a duly authorized representative of Cee Representatives of Buyer will be authorized to make repairs to the equipment without voiding warranty on completion of the Cee training program c Replacement parts are used other than those made or recommended by Cee CEE MAKES NO OTHER WARRAN...

Page 5: ... present in the machine Disconnect the power before servicing Stored electrical energy is present in the machine Before servicing allow sufficient time for discharge The servo amp has a charge light do not service the machine until this light has gone out 1 8 Mechanical This machine uses compressed gasses which can provide motive force for components and can expand violently upon decompression Dis...

Page 6: ...per Personal Protective Equipment for the job This includes safety glasses gloves and other equipment as needed to protect from mechanical and chemical hazards 1 10 Lockout Tagout Procedures and Information Before servicing turn off the machine and remove the power inlet cord by disconnecting the plug where it enters the machine 1 11 Intended Use of Machine The Cee Apogee Developer is intended for...

Page 7: ...cal experiments With its convenient compact footprint wide array of chemical compatibility and durability this easy to use benchtop system will provide years of high performance operation making the Cee Apogee Developer purchase a smart and cost effective decision 1 Power Button Used to turn on and off the tool 2 User Presence Button Used for remote access see DataStream Manual 3 Lid Sensor Detect...

Page 8: ...eters with DataStream technology Simultaneous dual automated dispense capability In process dynamic speed acceleration control 2 3 Precision Spin speed repeatability 0 2 rpm Spin speed resolution 0 2 rpm Substrate sizes 1 cm to 200 mm round 7 x 7 square 2 4 Reliability Indirect drive system protects the spin motor from contact with process chemicals and solvents Vacuum and lid interlock Industry l...

Page 9: ...t 0 2 water Nitrogen or CDA for automated dispense 70 psi 3 Installation 3 1 Floor Space Requirements The Apogee Developer is a bench top unit and requires a table or bench top for location In most cases the supporting structure will be larger than the unit itself The recommended freestanding space requirements are 1 0 back to front and 0 3 side to side Dimensions 13 25 L x 19 D x 12 H Weight 120 ...

Page 10: ...and 50 CFM of exhaust is recommended 6 Fuses System protection fuses 7 System Vacuum System vacuum for vacuum chuck Recommended vacuum Supply is 20 in Hg at a flow of 5 l min Port is barb fitting 8 Dispense Trigger This port us used to connect to the optional dispense control box This is used when using automated dispenses 9 Accessory Port This is used to talked to external I O device to support e...

Page 11: ... the top covers or protrusions Do not roll or turn the unit on its side or ends 2 Remove plastic wrap and packing foam 3 Place Cee Apogee Developer on a table of proper height and strength so that the controls and spin chuck are at the proper ergonomic height 4 Level the machine using the feet so that the spin chuck is level front to back and side to side 5 Thoroughly clean the spin bowl and spin ...

Page 12: ...t spins and that the tool is reading 1000 rpm 4 Raise the lid to check the lid interlock The tool should stop spinning 5 Ensure that the temperature humidity sensor is reading on the parameter list 6 If equipped with optional dispenses ensure that dispenses are triggering 7 If equipped with an optional programmable exhaust ensure it is working properly 7 Check that the spin chuck s with the tool w...

Page 13: ...k control Additionally each nozzle features a female luer adapter that houses a disposable tip to be placed at the point of use This tip can easily be changed to clear any dried material residue and or manipulate the volume of the dispense flow 4 3 Lid Adjustment The Apogee Developer is furnished with an adjustable lid This lid allows the operator to regulate the exhaust flow through the bowl regi...

Page 14: ...ness This can be seen visually with a straight edge Small uniformity issues such as a burr can be gently removed with a razor blade or a glass slide Larger deformations such as a damaged area from dropping can be removed with fine sandpaper A non uniform spin chuck can cause vacuum errors Quarterly 3 Bearing wear Rotate the spindle shaft by hand The shaft should easily spin with little noise If no...

Page 15: ...nto the vacuum system Spin the wafer at approximately 200 RPM and use solvent in a wash bottle to flush out the spin bowl Keep solvent from going down the spin shaft or the spin shaft tube Shields and seals will protect the bearings from a small amount of solvent but they will not be able to handle large doses Do not direct the solvent stream down the shaft or tube Avoid getting solvent of any kin...

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