Cee® Apogee™ Developer Manual
Page
13
of
15
4. Developer Use and Operation
4.1. Spin Chuck
1. Locate Spin Chuck Flat head Cap Screw (Located in the center of Vacuum chuck).
2. Use a 3/32" hex key wrench and remove the spin chuck screw from the spindle.
3. Grasp the spin chuck and pull up and remove vertically.
4. Place new spin chucks in the same orientation as old and ensure that the spindle key
aligns with chuck slot.
5.
Use a 3/32” hex key wrench to secure spin chuck screw in the center of new chuck.
4.2. 5- Hole Dispense Nozzle Hub
All Cee® Developer utilize a standard multi-nozzle dispense center hub. This design allows up to
five (center-positioned) dispense nozzles to be mounted into the lid simultaneously and triggered
independently in any sequence or combination. The auto-dispense nozzles are all angled to the
center of the wafer and utilize precision suck-back control. Additionally, each nozzle features a
female luer adapter that houses a disposable tip to be placed at the point of use. This tip can
easily be changed to clear any dried material residue and/or manipulate the volume of the
dispense flow.
4.3. Lid Adjustment
The Apogee
™
Developer is furnished with an adjustable lid. This lid allows the operator to regulate
the exhaust flow through the bowl region. Adjustments to the lid height can be a variable in
optimizing coating results.
To adjust the lid height, use the 3 thumb screws seen from the top of the lid (2 on the rear, and
one in the front). Before adjusting, the two bolts on the back of the equipment that mounts the lid
assembly to the back plate of the tool must be loosened. The lid is raised by rotating the
adjustment knobs counterclockwise and lowered by rotating them clockwise. For best results it is
recommended that each knob be adjusted in sequence and not more than one turn per sequence.
Once the desire adjustment has been made, tighten back the 2 lid assembly bolts on the back of
the equipment.