Cee® Apogee™ Developer Manual
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5. Preventative Maintenance
This maintenance manual provides personnel with procedure and guidelines for maintaining a Cee®
Apogee™ Developer. Below is a chart of recommend maintenance scheduling.
Maintenance Section
Maintenance Schedule
Safety Checks
Before daily tool use
Cleaning
After daily tool use
Mechanical Checklist
See Section 5.2 for Details
Utility Checks
See Section 5.3 For Details
5.1. Safety Checks
Inspect developer lid for the following defects:
(a) Loose assemblies
(b) Improper closure
(c) Improper bowl ring placement
5.2. Mechanical Checklist
1.
Spin chuck cleanliness:
If any material has built up on the spin chuck, it can be wiped clean
with most organic solvents isopropyl alcohol, or acetone. For major buildup of material, a
glass slide can be used to gently scrap the material away. Follow by wiping clean. A dirty spin
chuck could cause vacuum errors. See section 2.1 on detailed cleaning instructions.
Daily
2.
Spin chuck flatness:
This can be seen visually with a straight edge. Small uniformity issues
such as a burr can be gently removed with a razor blade or a glass slide. Larger deformations
such as a damaged area from dropping can be removed with fine sandpaper. A non-uniform
spin chuck can cause vacuum errors.
Quarterly
3.
Bearing wear:
Rotate the spindle shaft by hand. The shaft should easily spin with little noise.
If not bearing should be replaced. If grinding noise is heard during a process, bearing should
be replaced. Bad bearings can cause erratic spin speed and acceleration.
Quarterly
4.
Vacuum liquid trap:
There should be no material in the vacuum trap. Material in the vacuum
trap will cause vacuum issues.
Quarterly
5.
Axial spindle shaft play:
There should be no axial play in the shaft. Axial play will cause
excess bearing wear and possible vacuum error.
Bi-annually
5.3. Utility Checks
1. Check all pressures for ranges specified in tool manual.
Daily
2. Verify that there is a proper drain facility.
Daily
3. Verify that the exhaust is functioning.
Daily
4. Inspect all connections for proper installation.
Bi-Annually
5. Verify that the AC power is of the proper voltage,and is connected.
Bi-Annually