Cee® Apogee™ Developer Manual
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8
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15
2.1. Dimensions
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13.25” (33.65 cm) W × 19” (48.26 cm) D × 12” (30.48 cm) H
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Machine weight: 40 lb (18.14 kg)
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Shipping weight: 100 lb (45.36 kg)
2.2. Programmability
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Touch screen interface and display
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Full-color alphanumeric-capable graphical user interface (GUI)
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A virtually unlimited number of user-defined recipe program steps
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0.1-second resolution for step times (9,999.9 seconds maximum step time)
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Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
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Spin speed acceleration: 0 to 30,000 rpm/s unloaded 0 to 23,000 rpm/s with a 200-mm
substrate 0 to 3,000 rpm/s with a 6” × 6” × 0.250” photomask in a recessed chuck
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Connectivity: USB/Ethernet port for communications for uploading/downloading process
parameters with DataStream™ technology
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Simultaneous dual automated dispense capability
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In-process/dynamic speed/acceleration control
2.3. Precision
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Spin speed repeatability: < 0.2 rpm
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Spin speed resolution: < 0.2 rpm
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Substrate sizes: < 1 cm to 200 mm round; 7” x 7” square
2.4. Reliability
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Indirect drive system protects the spin motor from contact with process chemicals and solvents
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Vacuum and lid interlock
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Industry-leading reliability and uptime
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1-year full warranty on parts and labor
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Free remote technical support (phone, email, fax) for the life of the product
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Application process assistance for life of the product
2.5. Bowl Design
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High-density polyethylene (HDPE) spin bowl for material compatibility
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Optional stainless or Teflon® bowl
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Optional polyethylene disposable liners available
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Versatile lid design allows process flexibility and repeatability
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Optional nitrogen purge for an inert spin environment
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Integrated drain and exhaust ports
