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DAT420_MAN02_EN.docx • V1R1
11
DAT 420
6.4
CALIBRATION CONDITIONS
Gas
Formula
Remarks
Min. Flow rate
(l/min)
Exposure
(minutes)
Ammonia
NH
3
0.250
5
Arsine
A
5
H
3
0.250
2
Carbon monoxide
CO
0.270
2
Chlorine
Cl
2
Generator
0.420
2
Chlorine dioxide
ClO
2
Generator
0.500
4
Diborane
B
2
H
6
0.300
2
Fluorine
F
2
Calibration with Cl
2
generator
-
-
Hydrazine
N
2
H
4
Gaseous permeation
-
5
Hydrochloric acid
HCl
0.300
3
Hydrocyanic acid
HCN
0.250
1
Hydrofluoric acid
HF
0.500
5
Hydrogen
H
2
1 %
0.270
1
Hydrogen
H
2
4 %
0.270
1
Hydrogen sulphide
H
2
S
0.420
1
Nitrogen dioxide
NO
2
0.300
2
Nitrogen monoxide
NO
0.300
2
Ozone
O
3
Generator
-
4
Phosgene
COCl
2
0.500
4
Phosphine
PH
3
Calibration with A
5
H
3
-
-
Silane
SIH
4
0.300
2
Table 2 : Calibration parameters
