1. INTRODUCTION
Page 3
© 2005 DH Instruments, Inc.
1.1.2.3
MASS SET
Masses > 50g
Material
Finish
Uncertainty in
measured values
304L non-magnetic stainless steel
Electropolished
±
5 ppm or 1 mg, whichever is greater
1.1.3
FPG8601 GENERAL SPECIFICATIONS
1.1.3.1
AMBIENT AND PISTON-CYLINDER CONDITION
MEASUREMENTS
Temperature:
Range
Resolution
Accuracy
Lubrication Gas Piston-Cylinder
[
°
C]
[
°
C]
0 to 40
0 to 40
0.1
0.01
±
0.2
±
0.1
Relative Humidity:
Range
Resolution
Accuracy
5 to 95 %RH
1 %RH
±
10 %RH
Vacuum:
Range
Resolution
Accuracy
13.3 Pa (100 mTorr)
0.001 Pa (0.01 mTorr)
±
0.06 Pa (0.45 mTorr)
Ambient and Lubrication
Pressure Sensor:
Range
Resolution
Accuracy
200 kPa
1 Pa
±
0.1 kPa
1.1.4
PRESSURE MEASUREMENT AND CONTROL
SPECIFICATIONS
1.1.4.1
10 TO 380 KPA, PG7601 AND PPC3-700K
Sensitivity
1
Precision
2
Measurement uncertainty
3
Control set point increments
Stability of set pressure
Typical control set point time
0.02 Pa + 0.5 ppm
± (0.01 Pa + 2 ppm)
see the piston-cylinder calibration report and
current revision of DHI Technical Note 7920TN01.
1 kPa
± 1 Pa
60 to 180 seconds
1
Sensitivity: The smallest variation in input detectable in output.
2
Precision: Combined linearity, hysteresis, repeatability.
3 Measurement
uncertainty:
Maximum deviation of the indicated pressure from the true value of applied pressure
including all sources of uncertainty combined and expanded (k=2) following the ISO “Guide to the Expression of
Uncertainty in Measurement.”
Summary of Contents for ADCS-601
Page 10: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page VIII N NO OT TE ES S ...
Page 12: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page X N NO OT TE ES S ...
Page 19: ...2 SYSTEM OVERVIEW Page 7 2005 DH Instruments Inc Figure 2 ADCS 601 system pneumatic schematic ...
Page 114: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 102 N NO OT TE ES S ...
Page 116: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 104 N NO OT TE ES S ...
Page 146: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 134 N NO OT TE ES S ...
Page 168: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 156 N NO OT TE ES S ...
Page 174: ...ADCS 601 OPERATION AND MAINTENANCE MANUAL 2005 DH Instruments Inc Page 162 N NO OT TE ES S ...