Edwards iXL120, Instruction Manual

Page 1: ...A541 11 880 Issue A Original Instruction Manual iXL120 Dry Pump System ...

Page 2: ...End User Other Accessories 0 1 None Water Constant Flow Valve 1 l m Tool Interface 0 1 2 3 4 5 6 7 None MicroTIM C3 MicroTIM SPI MicroTIM E73 MicroTIM TEL MicroTIM LAM MicroTIM Hitachi MicroTIM MCM Water Fittings 0 1 2 3 5 None 3 8 Quick Connect 1 4 Quick Connect 9 16 JIC 1 4 NPT Male 90 120 m3 hr A541 ...

Page 3: ...aboratory Use EMC Requirements Industrial Location Immunity Class A Emissions ANSI UL61010 1 2004 Safety Requirements for Electrical Equipment for Measurement Rev 2008 Control and Laboratory Use Part 1 General Requirements SEMI S2 0709 Environmental Health and Safety Guideline for Semiconductor Manufacturing Equipment and fulfils all the relevant provisions of 2006 42 EC Machinery Directive 2006 9...

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Page 5: ...ystem 18 3 7 Connect the nitrogen supply 18 3 7 1 Flammable pyrophoric materials 18 3 7 2 Gas purges 19 3 8 Connect the electrical supply to the dry pumping system 19 3 8 1 Electrical connector locking mechanism 21 3 9 Connect to your emergency stop circuit 22 3 10 Connect to your control equipment 22 3 10 1 Inputs 23 3 11 Connect the cooling water hoses 23 3 12 Commission the iXL120 system 24 4 O...

Page 6: ... terminator plug 38 7 3 13 Interface modules 38 Appendix A1 Pump Display Terminal PDT 41 A1 1 PDT 41 A1 1 1 LEDs 41 A1 1 2 Pump start stop and control 42 A1 1 3 Warning alarm display and acknowledgement 42 A1 1 4 Menus 43 Appendix A2 Troubleshooting 47 A2 1 Warnings 47 A2 1 1 LED warning indicators 47 A2 1 2 PDT warnings 47 A2 2 Alarms 48 A2 2 1 LED alarm indicators 48 A2 2 2 PDT alarms 48 A2 3 In...

Page 7: ...ol connector kits 23 14 Tool input signals to the pump system 23 15 Pump protection sensors 27 16 Disconnect box 35 17 EMS button 36 18 Accessories modules 36 19 PDT 36 20 PDT adaptor cable 36 21 PDT holster 36 22 PDT extension cable 37 23 Lifting seismic stacking brackets 37 24 Water flow control valve 37 25 Stainless steel water fittings 37 26 Main power connector 37 27 EMS terminator plug 38 28...

Page 8: ...s Associated publications Publication title Publication number Vacuum pump and vacuum system safety P400 40 100 Semiconductor pumping application guide P411 00 090 Trademark credits Han is a registered trademark of Harting Electric GmbH EtherCon is a registered trademark of Neutrik AG Fomblin is a registered trademark of Solvay Solexis SpA ...

Page 9: ...ons are given where failure to observe the instruction could result in damage to the equipment associated equipment and or process The units throughout this manual conform to the SI international system of units of measurement The following warning labels are on the pump and in this manual The following two warning labels Pressurised and Risk of explosion only appear in this manual Material Safety...

Page 10: ...n duty applications as defined in Figure 1 The iXL120 is not intended for use with potentially flammable corrosive toxic or other hazardous gases since these gases or oxygen can mix within the pump system Users must complete their own risk assessment and implement any necessary controls for pumping potentially flammable gases Edwards can offer advice and assistance in matching your pump to your ap...

Page 11: ... 1 Nitrogen purge connection if fitted 2 Cooling water supply connection 3 Transit lifting seismic bracket if fitted 2 off 4 Cooling water return connection 5 Exhaust outlet connection 6 Mains power connection 7 Protective Earth ground stud M5 8 Electrical connector locking mechanism 9 Accessory interface 10 System control PDT connection 11 Ethernet installed LED 12 Ethernet connection 13 Ethernet...

Page 12: ...ce one of these has control of the iXL120 system control requests from the others are denied until control is released by the first An LED is provided on the front panel which illuminates to indicate that the pump is in control An LED is provided on the rear panel which illuminates to indicate that the tool is in control The PDT accessory can identify which source is in control and also has an LED...

Page 13: ...t flange ISO63 NW50 Exhaust gas outlet NW25 Table 2 General technical data Item Description Rating Units Operating conditions Intended use Indoor use Ambient temperature range Operating 5 to 40 C Storage 45 to 55 C Maximum relative humidity 80 for temperatures up to 31 C decreasing linearly to 50 relative humidity at 40 C Maximum operating altitude Up to 2000 m Pollution degree II IEC 61010 Normal...

Page 14: ...erved Edwards and the Edwards logo are trademarks of Edwards Limited Technical data 2 2 Loading Figure 4 Centre of gravity and levelling foot loads Table 3 Levelling foot loads refer to Figure 4 Levelling foot identifier Levelling foot load kg 1 13 2 12 3 18 4 16 ...

Page 15: ... leakage currents may occur i under transient conditions such as power on or pump acceleration or ii with certain supply configurations such as Earthed phase or iii with abnormal supply configurations such as a missing phase or unbalanced supply voltages Contact Edwards for more information about configuration requirements for Earth leakage reduction 3 5 mA Table 5 Electrical ratings ultimate vacu...

Page 16: ...8 9 1 65 1 53 240 50 9 3 35 8 1 65 1 53 240 60 9 0 33 7 1 65 1 53 380 50 5 8 22 5 1 65 1 53 380 60 5 7 21 5 1 65 1 53 460 50 4 8 18 8 1 65 1 53 460 60 4 8 18 1 1 65 1 53 Table 7 Electrical ratings over load condition 175 full load for 60s Electrical sub system over load ratings The electrical sub system ratings detailed in Table 7 assume an input short circuit rating of 30 kA Input supply voltage ...

Page 17: ...EC 60269 low voltage fuses the recommended fuse type gG is a general purpose fuse essentially for conductor protection gG Table 9 Electrical connections Description Mating connector description external supply rating Internal supply rating Mains connection refer to installation section for wiring diagram Han Modular Compact 40 A 2 5 8 mm2 Ethernet connection Standard RJ45 type or Neutrik EtherCon ...

Page 18: ...n 3 10 Nominal voltage rating 24 V The System interface the EMS interface and the Accessory interface give a combined current rating of 750 mA This supply will be disconnected in the event of an emergency stop Table 10 Input supply wire assembly Description Rating Units Minimum conductor cross sectional area 6 0 10 200 240 V a c rms 50 60 Hz 2 5 12 380 460 V a c rms 50 60 Hz mm2 AWG Conductor wire...

Page 19: ... min 1 to prevent condensation at 10 C cooling water 1 l min 1 Cooling water supply temperature range 10 30 C Water type Treated or non corrosive industrial Maximum particle size 0 03 mm2 Acidity 6 5 to 8 0 pH Hardness 100 ppm of CaCO3 100 mg of CaCO3 per litre Resistivity 0 001 ρ 1 Mohm cm Solids turbidity 100 ppm Materials in contact with cooling water Stainless steel polyamide fluoroelastomer n...

Page 20: ...A541 11 880 Issue A Page 12 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Page 21: ...pumping system is to replace an existing pumping system with nitrogen for 15 minutes before you start installation work Refer to Section 3 7 Disconnect the other components in the process system from the electrical supply so that they cannot be operated accidentally Electrical nitrogen and water supplies are all potentially hazardous energy sources Before carrying out any maintenance the supply of...

Page 22: ...ifted with suitable lifting equipment 1 Cut open bag and expose the brackets which are used to fasten the pump to the pallet 2 Remove the fasteners at the brackets securing the pump to the pallet 3 Remove the brackets from the pump 4 Reattach the brackets at the top front right and top rear left corners using 2 fixings for each bracket 5 Lift pump using suitable lifting equipment as shown 6 Wind u...

Page 23: ...thquake take note of the following The iXL120 system lifting brackets retained in Step 3 above can be used for seismic restraint shown in Figure 2 item 3 They are designed to withstand a level 4 earthquake in a ground floor installation and are capable of restraining two systems when stacked The iXL120 system can be secured to the floor by fitting suitable bolts or studs not supplied through the s...

Page 24: ...ifted with suitable lifting equipment 1 Remove the iXL120 system from its packaging as shown in Section 3 2 2 Remove the brackets from their stored position at the base of the pump 3 Reattach the brackets at the front right and rear left corners using two fixings for each bracket 4 Position the pump as required using suitable lifting equipment This is the base pump 5 Attach the brackets to the top...

Page 25: ...ely support vacuum exhaust pipelines to prevent the transmission of stress to pipeline coupling joints Incorporate a pressure gauge in the inlet pipeline as an aid to determining that the iXL120 system operates correctly You must be able to isolate the iXL120 system inlet from the atmosphere and from your vacuum system if you have pumped or produced corrosive chemicals Refer to Figure 2 items 17 a...

Page 26: ...on occurs then the following may happen High pressures could occur within the pump and may not be contained A flame front could travel back up the foreline A flame front could travel downstream from the exhaust of the pump Industry best practice suggests that the following measures will reduce the risks of pumping flammable mixtures and pyrophoric materials but it is the user s responsibility to c...

Page 27: ...current carrying conductors and can be locked in the off position The isolator must be in close proximity to the equipment within easy reach of the operator and identified as the disconnect device for the equipment WARNING The equipment must be permanently Earthed A second protective Earth ground conductor with a cross sectional area at least equal to the phase conductor size must be connected to ...

Page 28: ... supply connector mating half fails the Earth ground conductor will be the last conductor to be pulled from the connector You must fit a secondary protective Earth ground conductor with a cross sectional area at least equal to phase conductor size to the protective Earth ground stud 1 Attach the strain relief Gland 2 to the Cover Housing 3 Refer to Figure 5 2 Pass a suitable cable 1 through the st...

Page 29: ...3 8 1 Electrical connector locking mechanism This product is approved permanently connected equipment and must be used as described below Figure 6 Electrical connector locking mechanism 1 3 Phase mains cable 2 Cable gland 3 Hood M25 4 Gasket 5 Screw Module female 6 Housing 7 Screws x 4 1a Locking mechanism Locked position 1b Locking mechanism Unlocked position 2 Locking screw 3 Lever ...

Page 30: ...cy Stop Control Circuit or the emergency stop button accessory can be used see Section 7 3 Note If you do not connect to your own control equipment you must fit the external EMS plug supplied to the EMS connector Figure 2 item 15 on the rear of the iXL120 system If you do not you will not be able to operate the iXL120 system If required you can connect your own control equipment to the iXL120 syst...

Page 31: ...ensure that your cooling water supply complies with Section 2 and that the dry pump is not connected in series with any other equipment Connect the cooling water supply as follows 1 Connect your supply and return hoses to the pump 2 Turn on the cooling water supply 3 Energise the system to ensure water flows through the pump Table 13 Tool connectors and mating tool connector kits Identification Pa...

Page 32: ... will illuminate Then press the Start button Figure 3 item 1 6 If the iXL120 system starts and continues to operate continue at Step 7 If a warning or alarm condition is indicated Shut down the iXL120 system refer to Section 4 3 Contact Edwards 7 After you have commissioned the iXL120 system If you want to continue to operate the iXL120 system refer to Section 4 1 Step 6 Otherwise shut down the sy...

Page 33: ...perate the system using the front control panel refer to Figure 3 Press and hold the Local Control button Figure 3 item 3 The Green LED will illuminate when control is taken The message Keys in Control will be displayed on the PDT if connected Press and hold the Start button Figure 3 item 1 until pumps starts and the Running LED Figure 3 item 1 is illuminated WARNING Do not operate the system with...

Page 34: ...hut down using either a PDT a MicroTIM or the front control panel Note that only the item in control can stop the pump refer to Section 1 4 If the pump is not going to be required for some time switch off the electrical supply and the cooling water supply Front control panel operation Press and hold the stop button Figure 3 item 2 until the running LED Figure 3 item 1 flashes The running LED will ...

Page 35: ... down the pump in response to warnings and alarms If the iXL120 system has an unplanned shut down or alarm ensure that the cause of the shut down or alarm is identified and rectified before restarting If you have a PDT connected to the pump then you should note and record any warning or alarm codes that are displayed see Appendix A2 to assist with identifying the root cause of the shut down or ala...

Page 36: ...tem as described in Section 3 8 1 When emergency stop is selected The pump is stopped The thermal management system water supply control valve remains active until the pump system control temperature decreases to a defined level The Pump Display Terminal will display STOP ACTIVATED If connected The Running LED will go off refer to Figure 3 item 1 The Alarm LED illuminates refer to Figure 3 item 6 ...

Page 37: ...rge to safe voltage levels 50 V before disconnecting the electrical supply cable WARNING Only personnel specially trained to perform electrical maintenance should attempt troubleshooting inside electrical enclosures These enclosures contain hazardous voltages and are not operator areas WARNING Leak test the system after maintenance and seal any leaks found to prevent leakage of dangerous substance...

Page 38: ... the system for maintenance CAUTION Drain the cooling water from the iXL120 system as stated in Section 5 3 if you will transport or store it in conditions where the cooling water could freeze If you do not cooling water may freeze in the iXL120 system and damage the pump s and or the cooling water pipelines WARNING The substances that accumulate in the exhaust pipe elbow and check valve supplied ...

Page 39: ...nnect a regulated clean dry air supply 1 4 barg or 20 psig to the cooling water supply connection Figure 2 item 2 Do not turn on the air supply yet 3 Connect a drain hose to the cooling water return connection Figure 2 item 4 Position the open end of the drain hose in a suitable collection container 4 Turn on the clean dry air supply 5 Monitor the drain hose outlet until no further cooling water i...

Page 40: ...s pipelines cables and fittings refer to Section 5 5 5 5 Inspect the connections pipelines cables and fittings If the system is not relocated for maintenance ensure all supplies are locked out and tagged out before starting the following procedure 1 Remove the enclosure side panels 2 Check that all the connections are secure tighten any loose connections Inspect all cables pipelines hoses and conn...

Page 41: ...ch Service Centre offers a wide range of options including disposal Refer to Section 7 2 for more information Pump system materials suitable for recycling include cast iron steel SG iron PTFE stainless steel brass aluminium zinc alloy nickel mild steel ABS polyamide Take particular care with the following Fluoroelastomers which may have decomposed as the result of being subjected to high temperatu...

Page 42: ...A541 11 880 Issue A Page 34 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Page 43: ...fers a wide range of options including equipment decontamination service exchange repair rebuild and testing to factory specifications Equipment that has been serviced repaired or rebuilt is returned with a full warranty Your local Service Centre can also provide Edwards engineers to support on site maintenance service or repair of your equipment For more information about service options contact ...

Page 44: ...be connected to the accessory module interface An accessory module extension cable allows the AAM or PAM to be mounted up to 5 m away from the dry pump system 7 3 4 Pump Display Terminal PDT The PDT allows control and monitoring of the iXL120 N 7 3 5 PDT adaptor cable The PDT adaptor cable allows a second PDT to be connected to the iXL120 N 7 3 6 PDT holster The PDT holster retains the PDT and is ...

Page 45: ...eel water fittings pair The stainless steel water fittings are replacement connectors to mate with those fitted to the pump 7 3 11 Main power connector A replacement 3 phase supply and PE connector Table 22 PDT extension cable PDT extension cable Item number 3 m D37370591 5 m D37370592 10 m D37370595 15 m D37370596 25 m D37370597 Table 23 Lifting seismic stacking brackets Item Item number Lifting ...

Page 46: ...minator plug D37207061 Table 28 Interface modules Item Interface type Item number SPI microTIM Monitor and control D37360310 MCM microTIM Monitor and control D37360320 TEL microTIM Monitor and control D37360330 Semi E73 microTIM Monitor and control D37360340 LAM Alliance microTIM Monitor and control D37360350 Hitachi microTIM Monitor and control D37360370 iGateway Module Pump serial to pump LON 2 ...

Page 47: ...and the Edwards logo are trademarks of Edwards Limited Service spares and accessories A541 11 880 Issue A Figure 7 Accessories 1 Disconnect box 2 EMS button 3 Accessory module 4 PDT 5 PDT adaptor cable 6 PDT extension cable Note Some cables omitted for clarity ...

Page 48: ...A541 11 880 Issue A Page 40 Edwards Limited 2010 All rights reserved Edwards and the Edwards logo are trademarks of Edwards Limited This page has been intentionally left blank ...

Page 49: ...EDs Local Control Green continuous on when this PDT has control of the pump Pump ON Green within the Pump Start button illuminates to indicate that the pump is running Warning Yellow illuminates to indicate that a pump warning is present It flashes when a new warning occurs until it is acknowledged by pressing ENTER when it goes continuous until the warning clears Alarm Red illuminates to indicate...

Page 50: ...display will revert to the original text from before the alarm s warning s occurred If there are warnings alarms still present but they are all acknowledged then the corresponding LED remains continuously illuminated The text indicating acknowledged warning alarm conditions still present may be viewed in the Status menu see below Some Alarms such as 1 01 STOP ACTIVATED remain present until the pum...

Page 51: ... SETUP A1 1 4 2 Status menu Press the Status button to enter Scroll by pressing up down keys Press CANCEL to exit back to Normal menu If a device is not fitted the associated parameters will not be displayed Parameters displayed Table A3 Normal menu Description Typical Display Serial Number S N 1234567 Control Holder NONE IN CONTROL Dry Pump current DP CURRENT 4 0 A Dry Pump speed DP SPEED 150 Hz ...

Page 52: ...ach contains one alarm and one warning where 1 is the most recent Scroll by pressing up down keys Press CANCEL to exit back to the Inverter Fault History menu A1 1 4 6 Software version display menu Under the Setup menu Scroll through the software version loaded in the processors by pressing up down keys Press CANCEL to exit back to the SETUP menu Table A5 Setup menu Description Display Commands me...

Page 53: ...o exit back to the IP Configuration menu Table A8 Fit accessory menu Item Description Gate Valve Water Sensor Analogue water flow Active Gauge Exh Gas Temp Exhaust Gas Temperature Table A9 IP configuration menu Item Description Host_Name display only DHCP Enable Enabled Disabled Press the up down keys to select Enabled or Disabled and press ENTER to accept or CANCEL to exit back to the IP Configur...

Page 54: ...ers by pressing up down keys Press ENTER to select the parameter for display or CANCEL to exit back to the SELECT LINE menu UNITS Units to display Scroll by pressing up down keys Press ENTER to open a sub menu or CANCEL to exit back to the Display Attributes menu In each option scroll through the units available by pressing up down keys Press ENTER to select the displayed units or CANCEL to exit b...

Page 55: ...matically work through the actions listed in Table A13 until the warning is cleared A2 1 2 PDT warnings If a PDT is fitted each warning triggers a warning message to be displayed Refer to Appendix A1 1 3 for more information on how warnings are handled by the PDT Table A13 lists the warning messages that might be displayed on the PDT with possible causes and actions you should take Table A13 Warni...

Page 56: ...e indicated and how they can be acknowledged using the PDT Once all the alarms are cleared the alarm LEDs extinguish If the warning LED is illuminated then connect a PDT to determine the warning message and refer to Table A13 to identify the possible cause and corrective actions If no PDT is available then you will have to systematically work through the actions listed in Table A13 until the alarm...

Page 57: ...hen refer to Table A16 and A17 Table A14 Alarms Warning Message on PDT Action Message on PDT Possible Cause Action Alarm 1 01 Stop Activated The emergency stop has been activated There is a fault with the EMS circuit or the EMS link plug has not been fitted or has come disconnected If the EMS button has been used on the pump refer to Section 4 6 to re set it Otherwise check and reset the EMS circu...

Page 58: ...giving alarm 4 OVERLOAD_TO Alarm given when dry pump speed is below 7Hz for 3 minutes 2 SC_MODE_INTERLOCK Internal fault contact Edwards 1 FLASH_DOWNLOAD_ FAULT Internal fault contact Edwards 2 8 POST_FAULT Internal fault contact Edwards 4 OSTEST _FAULT Internal fault contact Edwards 2 EEPROM_FAULT Internal fault contact Edwards 1 PWM_TRIP Inverter output switched off active when drive not running...

Page 59: ...HTC Controller temperature above upper limit Controller temperature sensor open circuit check water supply 4 HIGHTS Inverter heat sink temperature above upper limit Inverter heat sink temperature sensor open circuit check water supply 2 HIGHTM Motor temperature above upper limit Motor temperature sensor open circuit check water supply 1 MISSING_PHASE The loss of one of the three input phases has b...

Page 60: ...ay be no change in operation initially To minimise impact on process the system will continue to run normally if it was already running when the communication failure occurred The gas valves and Gate valves remain in the state that they were in prior to the communication failure and outputs to the MicroTIM are unaffected It is important to note however that control might be released from the devic...