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17 PROBE CAPABILITIES
17.1 INTEGRAL PROBES
Probe type
Minimum
convex surface
diameter
Minimum
concave
surface radius
Headroom
Minimum
sample
diameter
Cal foil value
a
a.
This is the recommended maximum calibration foil value to achieve the specified accuracy under these measurement
conditions
F1
(or F1 2 set for F1
operation)
4 mm (0.16”)
25 mm (0.98”)
130 mm (5.1”)
4 mm (0.16”)
250 µm (10 mil)
F1 2
(set for F2
operation)
4 mm (0.16”)
25 mm (0.98”)
135 mm (5.3”)
8 mm (0.32”)
1 mm (40 mil)
F3
15 mm (0.59”)
40 mm (1.57”)
150 mm (5.9”)
14 mm (0.55”)
2.5 mm (100mil)
N1 (N)
35 mm (1.38”)
25 mm (0.98”)
130 mm (5.1”)
6 mm (0.24”)
250 µm (10 mil)
FNF1 (N)
38 mm (1.50”)
25 mm (0.98”)
135 mm (5.3”)
8 mm (0.32”)
250 µm (10 mil)
FNF1 (F)
4 mm (0.16”)
25 mm (0.98”)
135 mm (5.3”)
4 mm (0.16”)
250 µm (10 mil)
Op_456_3_English.book Page 45 Thursday, January 22, 2009 7:58 PM