A200 SMIF POD
11
User Manual | Entegris, Inc.
A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN V DOME
—
Check item and visual aid
Result
1. Hand pull the waferlock frame
to make sure it is fully seated and
tightly attach on dome
Lift the pivot and make sure the
retainer moves freely. Perform
three cycles. Rotate the wheel
and make sure it can spin freely.
Waferlock Frame:
o
Tight
o
Loose
Pivot:
o
Moves freely
o
Stuck
Wheel:
o
Spins freely
o
Jammed
Remarks:
2. Make sure the waferlock frame edge is fully
positioned in the dome rib slot
Correct
Incorrect
Waferlock Frame Edge:
o
Slot in
o
Slot out
Remarks:
3. Make sure the waferlock leg is fully inserted
into dome boss hole with
no gap
Correct: no gap
Incorrect: gap
Waferlock Leg:
o
No gap
o
Gap
Remarks:
