entegris A200 SMIF POD User Manual Download | Manualshive

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A200 SMIF POD

User Manual | Entegris, Inc.

TABLE OF CONTENTS

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Overview ......................................................................... 2

90-Day Inspection Guidelines ................................. 2

Six-Month Inspection Guidelines ............................ 3

Annual Inspection Guidelines .................................. 3

90-Day Procedures ...................................................... 4

Pod Cleaning ............................................................... 4

Visual Inspection ......................................................... 4

Functional Inspection ................................................ 7

Six-Month Procedures .................................................. 7

Visual Inspection ......................................................... 7

Functional Inspection ................................................ 7

Annual Procedures ....................................................... 8

Periodic Replacement Parts ..................................... 8

Visual Inspection ....................................................... 10

A200 Waferlock Assembly Checklist
for Gen V Dome ....................................................... 11

A200 Waferlock Assembly Checklist
for Gen IV Dome ...................................................... 13

Limited Warranty ......................................................... 14

For More Information ................................................. 14

Terms and Conditions of Sale ................................... 14

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Summary of Contents for A200 SMIF POD

Page 1: ...ADVANCED MATERIALS HANDLING MANUAL A200 SMIF POD User manual ...

Page 2: ...res 4 Pod Cleaning 4 Visual Inspection 4 Functional Inspection 7 Six Month Procedures 7 Visual Inspection 7 Functional Inspection 7 Annual Procedures 8 Periodic Replacement Parts 8 Visual Inspection 10 A200 Waferlock Assembly Checklist for Gen V Dome 11 A200 Waferlock Assembly Checklist for Gen IV Dome 13 Limited Warranty 14 For More Information 14 Terms and Conditions of Sale 14 ...

Page 3: ...ially release particles from the shell surface Discontinue use due to potential contamination risk and review pod handling procedures Chipping or broken edges Inspect for areas where a section of material is missing potentially causing a functional issue Discontinue use and review pod handling procedures Alignment tabs pins Inspect for pins that are bent or broken off Damaged pins could allow a do...

Page 4: ...or after an incident ACTION TIME CRITERIA DESCRIPTION CUSTOMER ACTION Periodic replacement parts 2 minutes Gasket Replace gasket Gasket Kit 20 gaskets per kit P N 9700 4246 XX last two numbers TBD at order time 1 minute Waferlock and wheel Replace waferlock and wheel Waferlock and Wheel Only Kit 50 per kit P N 9700 9667 01 2 minutes Cassette Hold Down CHD Replace CHD Kit number depends on CHD styl...

Page 5: ... there are also more sophisticated and automatic pod openers available The shell assembly can be cleaned as one piece however some immersion processes may cause water to be forced into areas where parts are screwed to the assembly If testing shows water traps drying conditions may be changed in the tool or disassembly may be required Certain cleaning processes may also affect the waferlock mechani...

Page 6: ...nce or lifetime Chemical attack splash Crazing on outside of shell note how shallow the cracks are 2 Visually inspect for chipped and broken edges Focus on the knife edge where the door seals and the bottom of the shell 3 Visually inspect the CHD for warpage or improper installation There will be no gap between the CHD and the shell in a proper installation See the picture below for an improperly ...

Page 7: ... door surface for cracks scratches and evidence of chemical attack such as crazing or pitting Surface defects in the plastic can make cleaning difficult and be a potential source of particles sloughing off the surface of the plastic Inspect the gasket for proper installation and for cuts and nicks that could compromise the seal The gasket should lay flat against the surface of the door Inspect ant...

Page 8: ... Door Assembly Visually inspect door bottom for loose protruding or missing screws Run a hand over the bottom of the door to feel for protruding screws If less than two screws are found to be loose or missing they can be tightened or replaced with a screwdriver If more than two screws have a problem the door should be removed from service FUNCTIONAL INSPECTION Check the performance of the pod door...

Page 9: ...ures Gasket Installation Procedure 1 Place the seal on the pod door matching the two notches on each of two sides of the seal with the mating slots on the two sides of the pod door This ensures correct orientation of the seal on the pod door 2 Ensuring that the notches in the seal are properly aligned with the mating features in the pod door press the seal into the groove around the perimeter of t...

Page 10: ...3 Place new CHD over the installation holes and push in by hand as far as possible Using a CHD installa tion tool pound the CHD into the holes 4 Make sure new CHD is fully installed It is fully installed when the shoulder on the CHD is flush with the installation hole Correct There is no gap between the CHD and the shell Incorrect Notice the gap between the CHD and the shell Waferlock and Wheel In...

Page 11: ...ne Procedures Shell Assembly Inspect tightness of AK flange installation if one is installed on the pod Inspect the flange for damage or excessive wear Inspect tightness of side handle installation Inspect the handles for damage or excessive wear Door Assembly Inspect door cassette guides for damage or wear Make sure they are installed tightly to the door by looking for a gap around the bottom Ins...

Page 12: ...eely Perform three cycles Rotate the wheel and make sure it can spin freely Waferlock Frame o Tight o Loose Pivot o Moves freely o Stuck Wheel o Spins freely o Jammed Remarks 2 Make sure the waferlock frame edge is fully positioned in the dome rib slot Correct Incorrect Waferlock Frame Edge o Slot in o Slot out Remarks 3 Make sure the waferlock leg is fully inserted into dome boss hole with no gap...

Page 13: ...ed Remarks 5 Make sure the waferlock O ring is present Waferlock O ring o Present o Missing Remarks 6 Make sure the waferlock screw is fully torqued Screw Torque o No gap o Gap Remarks Screw torqued at 6 in lbf 7 Make sure the waferlock pod dowel pin touches the dome wall Waferlock dowel pin o Touching o Gap Remarks A200 WAFERLOCK ASSEMBLY CHECKLIST FOR GEN V DOME CONTINUED ...

Page 14: ...aight Lift the pivot and make sure the retainer moves freely Perform three cycles Rotate the wheel and make sure it can spin freely Waferlock Frame o Tight o Loose o Straight o Tilted Screw o Tight o Loose Retainer o Moves freely o Stuck Wheel o Spins freely o Jammed Remarks Screw torqued at 3 in lbf 2 Make sure the waferlock lock is not tilted 0 06 by using the feeler gauge The gauge must not go ...

Page 15: ...o view and print this information visit entegris com and select the Legal Trademark Notices link in the footer Entegris does not warrant any failure in the case of customers using unapproved foreign components FOR MORE INFORMATION Please call your Regional Customer Service Center today to learn what Entegris can do for you Visit entegris com and select the Contact Us link to find the customer serv...

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