GATEKEEPER GPU OZONE GAS PURIFIERS
3
Installation and Operation Manual | Entegris, Inc.
INSTALLATION PROCEDURES
—
SITE PREPARATION
CAUTION!! Use stainless steel gaskets for fitting
connection. The use of other gaskets may cause
abnormal heat generation of the purifier.
1. Modify the gas line prior to purifier installation using
a qualified high-purity mechanical contractor.
2. Purge the lines upstream of the purifier to remove
any atmospheric contaminants.
3. Do not remove the fittings until indicated in this
instruction manual.
4. Minimize exposure to atmosphere when loosening
or removing the sealing fittings.
5. Use the proper installation tools and unplated
stainless steel face seal gasket. If possible, avoid
using adjustable wrenches, as they often damage
fittings.
6. Please note,
never reuse
face seal gaskets.
INSTALLATION
CAUTION! Take care not to contaminate the
purifier wetted parts with any foreign substances
during installation. The contamination may cause
abnormal heat generation of the purifier.
1. Verify that the gas line has the proper clearance
dimensions for the purifier and adjust if needed,
and all face seals are undamaged.
2. Orient the purifier in the gas line with the flow
arrow pointing in the direction of the gas flow.
3. Prepare two new stainless steel face seal gaskets
before removing purifier caps. Be sure to work
quickly, completing the next five steps without
interruption. This will minimize the purifiers
exposure to atmosphere.
4. Inspect inlet and outlet face seals for damage.
5. Insert a new metal seal gasket for the outlet and
hand tighten the connection.
6. Insert a new metal seal gasket for the inlet and
hand tighten the connection.
NOTE: Take care to not rotate the purifier body. This
may damage the sealing surface, which could lead to
a leak.
7. Using the proper wrenches, tighten the inlet and
then the outlet connections an additional 1⁄8 of a
turn (45°) past finger tight to seal the connection.
The purifier must be held stationary while turning
the mating fitting. Do not over tighten as this may
cause damage to the fittings.
8. Perform the leak test according to procedure that is
defined at site.
BEFORE STARTUP
Ensure the purifier has been leak checked and
installed as recommended. Also ensure the purifier
is being operated within its operating limits, such as
temperature and pressure.
FLOWING OZONE GAS
CAUTION! Monitor the purifier surface tem-
perature when starting service in ozone gas.
If the purifier is contaminated with any foreign
substances during installation, the purifier may
experience abnormal heat generation.
1. Flow a minimum of 20 liters of ozone gas in the
purifier inlet through the outlet for a minimum of
five minutes.
2. Ensure the purifier surface temperature is lower
than 40°C (104°F) while ozone gas is flowing. If
the surface temperature exceeds 40°C (104°F),
immediately turn off ozone gas flow and remove
the purifier according to the following decommis-
sioning procedure.
3. Purifier is now ready for use.
