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GATEKEEPER GPU OZONE GAS PURIFIERS
Installation and Operation Manual | Entegris, Inc.
DECOMMISSIONING PROCEDURE WHEN HEATED
When the purifier generates heat, decommission
the purifier immediately following this procedure.
1. Turn off ozone gas flow.
2. Purge the purifier with a minimum of 20 liters of
inert gas for a minimum of 10 minutes.
3. Ensure the surface temperature goes down to a
safe temperature for handling.
4. Remove the purifier according to the procedure
defined at the operating site.
5. Cap the purifier tightly with metal caps.
CAUTION! DO NOT REUSE the decommissioned
purifier.
MANAGING REPLACEMENT AND PURIFIER LIFETIME
—
Since the series does not have an end-of-life
indicator, it is recommended that they be put on a
Preventative Maintenance (PM) cycle based on the
estimated lifetime.
In order to determine the purifier’s lifetime, please
visit
www.entegris.com
or contact your local Entegris
office for assistance.
DISPOSAL
—
All purifiers should be purged with an inert gas
before disposal.
CAUTION! When the purifier is serviced in ozone
gas that is produced by an ozone generator using
nitrogen as a dopant, nitric acid may accumulate
in the purifier.
