GATEKEEPER GPU OZONE GAS PURIFIERS
5
Installation and Operation Manual | Entegris, Inc.
TROUBLESHOOTING GUIDE
—
SYMPTOM
POSSIBLE CAUSE
SOLUTION
The purifier generates
abnormal heat.
Ozone reactive substances are
captured in the purifier.
Turn off the ozone gas flow and replace the
purifier with a new purifier.
Outlet metal concentration
does not meet specified
performance.
Downstream parts generate metals
after purification.
Install the purifier near the use point to avoid
metal generation by downstream parts.
Purifier flow rate is too high.
Verify that the maximum flow rate is not
exceeded.
Outlet purity level
degrades with time.
Purifier has exceeded its useful life.
Replace the purifier with a new purifier.
Ozone concentration
declines after purification.
The inertness of the purifier is degraded
by ozone reactive substances captured
in the purifier, or by the accumulation
of impurities in the purifier.
Replace the purifier with a new purifier.