ENTEGRIS, INC.
Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300
3
NT® PRESSURE TRAN SDUCER USE R GUIDE
NT® PRESS URE TRANSDUCER USER GUIDE
2
Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300
ENTEGRIS, INC.
Introduction
This manual is for use with NT
®
Pressure Transducers for vacuum
applications, single-port and flow-
through models 4150 and 4250.
These instruments have been
designed for use in high purity
applications in the semiconductor
industry and are compatible with
highly corrosive processes.
These products feature no moving
parts and no filled cavities, which
reduces the possibility of a contami-
nated process. The wetted parts of
these nonmetallic transducers are
constructed with PTFE, sapphire
or other similar high purity inert
materials.
Ordering Information
CODE
BASE MODEL
4150
Single-Port Vacuum Pressure Transducer
CODE
PRESSURE RANGE
030V
-12 to 30 PSIG (-83 to 207 kPa)
060V
-12 to 60 PSIG (-83 to 414 kPa)
100V
-12 to 100 PSIG (-83 to 690 kPa)
CODE
INLET/OUTLET PORT CONNECTION TYPE
F02
1/4
″
Flaretek®
F03
3/8
″
Flaretek®
F04
1/2
″
Flaretek®
N02
1/4
″
FNPT
N04
1/2
″
FNPT
M02
1/4
″
MNPT
CODE
ELECTRICAL CONNECTOR TYPE
B06
FEP-jacketed 6
′
pigtail electrical cable
B12
FEP-jacketed 12
′
pigtail electrical cable
B30
FEP-jacketed 30
′
pigtail electrical cable
D00
3-pin polypropylene connector
D06
3-pin polypropylene connector and 6
′
PVC-jacketed mating cable
D12
3-pin polypropylene connector and 12
′
PVC-jacketed mating cable
D30
3-pin polypropylene connector and 30
′
PVC-jacketed mating cable
CODE
ELECTRICAL OUTPUTS
A
4-20 mA (12-28 VDC input)
CODE
PRIMARY/SECONDARY SEAL
U1
Kalrez® 4079/Viton® (default)
U2
Kalrez® 1050/Viton®
U3
Kalrez® 6375 UP/Viton®
S1
Kalrez® 4079/Kalrez® 4079
S2
Kalrez® 1050/Kalrez® 1050
S3
Kalrez® 6375 UP/Kalrez® 6375 UP
