System Overview
:
System Capabilities
C O N F I D E N T I A L – FEI Limited Rights Data
1-4
Image Viewing and Capture
Because the amplified detector signal is shown synchronously with the beam scanning, there is a relation between
brightness of an image point on the monitor screen and the signal detected at the corresponding point on the
specimen.
Magnification is the ratio of the size of the viewing monitor screen to the size of the area scanned on the specimen.
Higher magnification is achieved by reducing the size of the area scanned on the specimen.
Beams Control
DualBeam systems ideally position the point of interest for simultaneous ion beam cross-sectioning and electron
beam viewing. Separate scan generators for the two beams permit coupled or independent scan patterns and
magnifications.
Imaging while milling aids in defining milled features. Immediate electron beam images of cross sections are
possible without stage motion or sample transfer. Immediate high resolution SEM imaging after FIB milling also
prevents exposure of milled cross sections to atmospheric contaminants.
Gas Injection System (GIS)
Multiple FEI GIS (option) can be installed for material deposition in conjunction with either electron or ion beam
pattern definition. Electron beam-induced deposition offers the advantage of not sputtering the deposited material
or implanting gallium FIB source ions simultaneously.
The GIS can also contain etching precursor for fast material removal with minimal re-deposition, preferential
etching of cross-section surfaces prior to SEM imaging, and rapid milling of TEM sections.
Several GIS chemistries can be installed on the instrument, depending on a system configuration. This self-
contained apparatus allows the material to be contained entirely within the vacuum system for simple, flexible, and
safe operation.
Analysis Capability
Convergence of the SEM, FIB, and X-ray detection
system (e.g. EDX – Energy Dispersive X-ray – option) at
short working distance allows precision “slice-and-view”
cross-sectioning and chemical analysis at high
resolution of surface and subsurface features.
Various vendor options are compatible with the
instrument (see Chapter 7).
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
