Operating Procedures
:
Patterning
C O N F I D E N T I A L – FEI Limited Rights Data
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Advanced Patterning tab Modules
The advanced patterning modules gives visual feedback on the progress of a milling process. It shows the
specimen current (charge absorbed in the specimen) and enables to monitor the specimen current changes as the
ion beam interacts with different materials in the sample. For example the differences encountered when milling
through some dielectric and striking another one are usually very subtle, but once the beam begins milling into
metal, a dramatic difference in absorbed charge can be observed on the
Monitor
tab.
iSPI tab Module
(intermittent Switching between Patterning and Imaging)
•
On
check box – when ticked it starts the iSPI mode, in which
the ion beam is paused during electron imaging to minimize
the interferences
If the
Paterning
menu /
Auto-Start/Stop Electron Acquisition for
iSPI
item is checked the system runs this functionality
automatically, otherwise a user must release the electron
beam display during patterning in another one.
Note
When the On check box is not ticked, system runs in the SPI mode.
•
Pause
check box – when ticked it pauses the patterning process after each electron image acquisition according
to the
Time
(or
CCS Line
)
interval
slider, which sets the interval after which the system acquires an electron image
•
Save
check box – when ticked it starts storing of all images acquired during the patterning process (from all live
displays)
The name, destination and type of stored images are set in the
Preferences
/
Movie
section /
File Settings
area.
•
Time interval
slider – sets the time in seconds after which the system acquires an electron image and pauses the
electron imaging
For all patterns except the Cleaning Cross Section: select a Time Interval to acquire an electron image every “x”
number of seconds.
•
CCS Line interval
slider – sets the number of lines after which the system acquires an electron image and pauses
the electron imaging
For the Cleaning Cross Section only.
Monitor tab Module
illustrates the milling progress as a colored graphics, showing the
accuracy for depth or material changes over the whole milled
area.
The graph of milling progress starts automatically to draw when
patterning starts. When patterning is paused or stopped /
resumed it stops / continues drawing the graph.
Clicking on the black rectangle next the Monitor label provokes /
hides a separate large graph window labelled
Endpoint Monitor
Plot
.
When serial patterning mode is set, there is only one graph, when
parallel one is set, there can be more of them.
Each time patterning is started a new graph is started
automatically. Pausing / resuming of a patterning stops / continues to plot the graph.
Right-clicking on the Endpoint Monitor Plot window provokes the context menu with choices:
•
X-axis
menu (
Dose Accumulated
/
Depth Penetrated
/
Time
Elapsed
): offers the choice for X-axis description. At least and
only one can be selected at a time.
•
Y-axis
menu (
Stage Current
/
Gray Scale
): offers choices for
Y-axis description. No, any or both can be selected.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
