C O N F I D E N T I A L – FEI Limited Rights Data
6-1
6
Maintenance
This section describes necessary and entirely microscope maintenance procedures that can be carried out by a FEI
microscope user. The user maintenance is at a minimum due to the source and column design providing the long
uptime.
C a u t i o n !
Any complicated maintenance and interventions (not mentioned here), normally a part of a service contract, are to be
performed by a FEI authorized service engineer and must not be performed by a user!
At the user level items such as the following can be maintained:
•
Aperture strip module
•
Shutter
•
Stage
•
Water bottle refilling
C a u t i o n !
– Parts that operate in vacuum should be handled carefully using clean powder-free gloves. Parts not in use should be
stored in suitable containers or packed in aluminium foil.
– The EDX window (option) is very fragile and must be protected from large pressure oscillations. It is also
recommended to remove the detector before major cleaning activities.
– Be aware of removing the chamber door locking screw(s), used during an instrument transportation (labelled
REMOVE)! If these are installed, an overpressure over 20 kPa (150 Torr, 0.2 bar) can arise inside the chamber during the
vent procedure (N
2
), which is harmful to the EDX window, if installed.
Note
Gas back fill (N2) should be maintained while the specimen chamber is at ambient pressure. However, to avoid gas waste
it is recommended the chamber should be left vented no longer than necessary.
Cleaning Procedures Overview
Frequency of cleaning is, in most cases, determined by necessity due to poor image quality or gross astigmatism
level. Recommended cleaning procedures are given below for parts which operate in vacuum and which are subject
to possible contamination.
List of Applied Cleaners
•
De-ionized or distilled water – H
2
O
•
Ethanol – C
2
H
5
OH
•
Ethanol p/a (Pro Analysis: 99.8% pure) – C
2
H
5
OH
•
Isopropanol
•
Neutral pH cleaning fluid (soap solution)
•
CIF or Soft Scrub (fine abrasive household cleaner) or 0.05
µm
aluminous powder
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
