System Control
:
Equipment
C O N F I D E N T I A L – FEI Limited Rights Data
2-16
Stage movement limits
The motorised movements of the stage can be operated under software control for more advanced location
mapping. This includes
Shift
,
Get
,
Track
and the
Stage
module functionality. A live imaging can be repositioned
either by the stage movement or by the
Beam Shift
.
Note
When moving the stage or tilting the specimen, the magnification may need to be reduced not to lose the feature of interest
off the screen.
FIGURE 2-8
Stage Movement Schema
C a u t i o n !
The positive Z value direction depends on the Link Z to FWD status (see Chapter 5).
C a u t i o n !
If the maximum sample size is near to the limit, stage tilt can be limited. Beware of hitting the objective pole piece!
Table 2-3
Stage Features and Limits
Item
110 × 110 mm
Note
X
-55 to +55 mm
Y
-55 to +55 mm
Z
66 mm
R
360°
continuous
T
-15° to +90°
maximally
Eucentric distance
7 mm / 19 mm
Electron / Ion beam
Maximum sample weight
No restriction: 500 g
including stub holder
No Tilt: 2 000 g
X and Y movements only: 5 000 g
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
