Software Control
:
Microscope Control Software
C O N F I D E N T I A L – FEI Limited Rights Data
3-24
Electron Beam / Ion Beam / Camera / Nav-Cam
Selecting an item from the drop down list makes the display or single screen active to the
Electron Beam / Ion Beam / Camera / Nav-Cam
with respect to the source, column, scanning,
and detector settings. Only one is active at any time, but can be operated independently for
each display.
Another possibility to change the beam for the particular imaging is clicking on the image
databar beam icon.
Column Use Cases
The electron column can be operated in different column Use Cases optimized for
specific applications. Selection of a desired Use case can be made by the
toolbar
drop
down list and also within the Use Case module (see further).
Magnification (HFW) / High Voltage /
Spot Size (Beam current) List Boxes
Click on the list box to expand a list of pre-set and actually allowed
values. Choose one by clicking on it and it is applied immediately (see
the
Preferences / Presets
section).
•
The
Spot
is defined as the actual electron beam diameter on the
specimen surface and it is expressed by a relative number. The
optional way (representable in the toolbar) to the Spot size number
is the electron
Beam Current
value (see the
Preferences
/
General
section). Both physical quantities are related. The electron beam
current shown in the toolbar list box (and optionally in the image
databar) is approximate and valid only if the microscope is well
aligned.
Imaging Pixel Resolution List Box
This list contains available imaging pixel resolutions (also used for captured images). Selecting a
new resolution results in the immediate change of the scanning raster and since the present dwell
time remains unchanged, the actual scanning frequency (both Line and Frame time) changes.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...