System Overview:
System Capabilities
C O N F I D E N T I A L – FEI Limited Rights Data
1-3
FIGURE 1-1
Column Schematic Overview
Computer Control
The xT microscope Server and Microscope Control (User Interface) software integrate SEM and FIB functionality
within a Windows 7 operating environment.
This software consists of programs defining specific instrument settings for particular applications, ensuring
reproducibility of complex procedures (for instance imaging, management of image capture, storage, and data
output devices etc.). They also control instrument hardware (the column, detector(s), stage, EDX, vacuum
functions etc.).
Vacuum System
The entire particle path from a source to specimen must be under vacuum so that the particles do not collide with
air molecules.
Various levels of vacuum are necessary, so a Turbo Molecular Pump (TMP) backed by a scroll pre-vacuum pump
(PVP) obtains the necessary specimen chamber pressure.
High Vacuum (HiVac)
This is the conventional operating mode associated with all scanning electron microscopes.
Low Vacuum (LoVac)
In the gaseous mode the electron column is under lower pressure than the specimen chamber. This mode can use
water vapours from a built-in water reservoir, or an auxiliary gas which is supplied by a user and connected to the
gas inlet provided for this purpose. Observation of outgassing or highly charging materials can be made using this
mode without the need to metal coat the sample, which would be necessary for conventional HiVac mode.
Stage
The Scios has a computer-controlled high-accuracy five-axis stage for small samples. It offers precision specimen
computer controlled manipulation and automation of all axes for overall spatial orientation on highly repetitive or
extremely irregular samples.
Specimen exchanges take place through a chamber door which exposes the specimen stage when opened or
through the Quick Loader (option). An exchange time takes a few minutes, with the Quick Loader an exchange is
much more faster. Software and interlocks protect the system against a damage and users against an injury.
Electron / Ion
CONDENSER
LENS(ES)
SCAN GENERATOR
M
FINAL LENS
DEFLECTION
SYSTEM
SCAN UNIT
SPECIMEN
DETECTION UNIT
DE
TE
CT
OR
LENS SYSTEM
Source
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
