Alignments
:
E-Column: Supervisor Alignments
C O N F I D E N T I A L – FEI Limited Rights Data
4-10
Source Tilt & Shift
This procedure takes from 2 to 3 hours and should be executed when necessary. It centers the electron beam in the
column using three variables:
•
DPA
(Differential Pumping Aperture – separates high vacuum column part from chamber vacuum) – centers
electron beam to pass through the column without any cutoff.
•
Tilt
– centers the beam on the optical axis.
•
Shift
– centers the beam on the center of the final lens.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...