Alignments:
Pump Buffer
C O N F I D E N T I A L – FEI Limited Rights Data
4-23
Pump Buffer
The vacuum buffer is automatically pumped down after a specific time interval (5 hours approximately) and it can
harm the highest image quality. To prevent this behaviour, user can run
Pump Buffer
alignment in advance (it takes
about a minute) and start image acquiring after the buffer is pumped down.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...