Operating Procedures
:
Microscope Control
C O N F I D E N T I A L – FEI Limited Rights Data
5-6
Microscope Control
It is assumed that the microscope is in the Full operation state (see Chapter 2).
Operation Pre-Check
To ensure correct operation check the following list before continuing. After obtaining a preliminary imaging, you
can then experiment with your own settings.
Table 5-1
Scios Setup Conditions
Adjustment
Electron Beam Setting
Ion Beam Setting
Vacuum mode
High Vacuum
: conductive samples
Low Vacuum
: nonconductive, mixed or
contaminating samples
High Vacuum
Column Use Case
Standard
Standard
Accelerating
Voltage
Select voltage relative to specimen type:
– low kV for surface imaging, beam-sensitive
samples and slightly charging samples
– high voltage for conductors, high resolution,
composite info (BSE, X-ray)
For example:
– biological sample HV = 1–10 kV
– metal sample HV = 1–30 kV
30 kV for imaging, milling, depositing
5 kV for cleaning
5–10 kV for large field of view
Beam Current
Spot size
100 pA at 30 kV
High Vacuum
/
Low Vacuum
: 5–6
100 pA at 30 kV
Scan rate
High Vacuum
: fast scan (dwell time 0.1–0.3
µs
)
Low Vacuum
: slow scan (dwell time about 3
µs
)
Fast scan
Working Distance
(FWD)
Set the highest specimen point
to approximately 7 mm, tilt to 0°
(yellow mark in an optical imaging display)
and press Ctrl + F (set FWD to 7 mm function).
Set the stage into the eucentric
position and tilt to 52°.
Eucentric Position
7 mm
19 mm
Magnification
Set to lowest – from 20× to 200×
Set to lowest – about 210×
Standard
Detector
High Vacuum
: ETD (SE)
Low Vacuum
: LVD / ICE (SE)
ETD (SE) / ICE (SE)
Filtering
High Vacuum
: Average (2–4 frames for fast scans)
Low Vacuum
: Live
Live
Contrast
and Brightness
With contrast at minimum value adjust brightness
to just show a change in intensity to the screen.
Increase the contrast to produce a reasonable
imaging. Increasing brightness and decreasing
contrast produce softer imaging and vice versa.
See Electron beam setting
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...