Operating Procedures
:
Optimizing Imaging
C O N F I D E N T I A L – FEI Limited Rights Data
5-12
Direct Adjustments
This control page serves for fine-tuning the beam geometry to achieve the best focus and brightness.
Electron Beam tab
•
Source Tilt
2D box – serves for correction of signal intensity by
changing an effective angle of the beam coming from the
source into the electron column.
Move the crosshair in order to get the electron beam spot into
the display center.
•
In the
Crossover
mode (activated with the button) the imaging
shows the electron source position instead of the sample
surface.
•
Crossover Zoom
slider – set the Crossover image magnification.
•
Lens Alignment
2D box – optimizes the primary beam passage
through the final lens so the image shift during focusing is sup-
pressed.
Try to minimize the image shift by the crosshair movement.
•
Lens Modulator
(useful for HV > 3 kV) /
HV Modulator
(useful
for HV
3 kV) button – starts automatic objective current /
accelerating voltage oscillation (periodically under- and over-focuses imaging in a narrow range) to facilitate the
above mentioned optimization.
When the accelerating voltage is above 3 kV, Lens Modulator
is automatically selected, otherwise the HV Modulator is. One
can choose any one manually.
•
Amplitude
slider – sets the modulation amplitude.
Electron Stigmator Centering tab
•
Stig. Center X
/
Y
2D box – serves for minimization of image
shift during astigmatism correction. The crosshair indicates
the actual stigmator setting.
Try to minimize the image shift by the crosshair movement.
•
Modulator X
/
Y
button – starts automatic modulation of the
respective stigmator to enable stigmator centering procedure.
Modulation occurs in a narrow range around the current
stigmator setting.
•
Amplitude
slider – sets the modulation amplitude.
Electron Focus tab
•
Focus Centering
2D box – serves for minimization of an imaging
shift during focusing if HV
3 kV. It is a complementary
function to Lens Alignment and it is not applied for HV > 3 kV.
Try to minimize the image shift by the crosshair movement.
•
Modulator
button – starts modulation of corresponding
electron optical components to enable focus centering
procedure.
•
Amplitude
slider – sets the modulation amplitude.
•
Apply Focus Centering
check box – if selected, the result of
focus centering procedure is applied.
Note
Ion beam Direct Adjustments are available only for accelerating
voltages under 8.06 kV.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
