Operating Procedures
:
Standard Detectors
C O N F I D E N T I A L – FEI Limited Rights Data
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Low Vacuum Detector (LVD)
This detector is standard and optimal for general imaging at Low
Vacuum mode in the whole pressure range from 10 to 500 Pa
(0.08 to 4 Torr), its signal contains both secondary and back-
scattered electrons. It is installed permanently inside the
chamber.
The LVD detector limits the field of view to about 1 mm at the
10 mm working distance. The minimum working distance is
limited to about 3 mm.
FIGURE 5-7
Low Vacuum Detector (LVD)
LVD Settings
After pump down and purge process switch on the accelerating
voltage. The modified Detectors module / Bias slider is
automatically activated.
Adjust Bias if necessary to increase signal or to stop possible
discharges. At the lowest possible magnification, adjust the
Contrast and Brightness if necessary, until the bright circle of the
LVD cone can be seen in the center of the image. Increase
magnification and adjust Contrast and Brightness more precisely.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
