System Options
:
I-Beam Charge Neutralizer
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I-Beam Charge Neutralizer
The FEI Charge Neutralizer uses a low energy electron beam to
control charging induced by the ion beam. This allows imaging
and patterning of non-conductive materials and reduces
electrostatic discharge-related sample damage (by spreading
electrons on the sample).
Using Charge Neutralizer
All controls are placed within the
Patterning
page / Advanced
Patterning
Charge Neutralizer
tab module. Values can be
adjusted even while the beam is off in the ranges:
•
Filament current
:
from 0 to 1.43 A
•
Grid voltage
:
from -5 to +5 V
•
Beam energy
:
from 28 to 200 eV
1.
Verify whether the correct detector / detector mode is selected to enable the Charge Neutralizer operation:
•
ET detector
– recommended to use with negative Grid Voltage values (Custom mode). Positive Grid Voltage
values are enabled, but detector can be saturated.
•
ICE detector
– recommended to use in Secondary Ion mode / with negative Grid Voltage values (Custom mode).
Positive Grid Voltage values are enabled, but detector can be saturated.
2.
Click on the
Beam On
button to switch the
Filament Current
on (the filament is heated and starts to generate
electrons).
3.
Start the charge neutralizer by clicking on the
Unblank
button. The
Grid Voltage
is now applied to the grid and (in
case of a positive voltage), electrons will be spread via the grid on to the sample.
4.
Optimize imaging by adjusting the values.
5.
Click on the highlighted
Beam On
button to turn the Charge Neutralizer off.
The software waits for the filament to cool before enabling to vent the chamber which takes about 7 minutes.
Finding the Optimal Operation Range
•
Before adjusting the filament current or beam energy settings, adjust the
Grid Voltage
until the sample is no
longer charging (no drift or flash). Start with the voltage at -5 V, then slowly increase the value until the image
stabilizes.
•
Filament Current
Initial value – should be about 1.15 A
•
Beam Energy
Initial value – should be about 100 eV
•
Beam Current
value – shows the actual compensating current value
Note
The Filament current should be kept at an acceptable minimum to extend the filament lifetime.
If neutralization cannot be reached at these values, first increase the beam energy, then adjust the filament current
if necessary.
It is advisable to adjust settings after any change of the following:
•
Samples
•
Magnification
•
Scan conditions
•
Ion beam current
Otherwise, if conditions and sample types remain constant, you should only have to fine-tune your initial
successful settings.
The last settings are stored and can be recalled when switching the Charge Neutralization off / on and also after
exiting UI software.
Summary of Contents for Scios 2
Page 1: ...User Operation Manual Edition 1 Mar 2017 ...
Page 103: ...Alignments I Column Alignments C O N F I D E N T I A L FEI Limited Rights Data 4 19 ...
Page 110: ...Alignments 254 GIS Alignment option C O N F I D E N T I A L FEI Limited Rights Data 4 26 ...
Page 170: ...Operating Procedures Patterning C O N F I D E N T I A L FEI Limited Rights Data 5 60 ...
Page 178: ...Maintenance Refilling Water Bottle C O N F I D E N T I A L FEI Limited Rights Data 6 8 ...
