ferrotec Temescal CV-12SLX, User Manual

Page 1: ...0101 8292 0 CV 12SLX USER MANUAL Revision C April 2016 Temescal a division of Ferrotec USA Corporation 4569 C Las Positas Road Livermore CA 94551 Tel 1 800 522 1215 Fax 925 449 4096 ...

Page 2: ... for 400 volt units March 2014 IA B On p 2 2 corrected PNs of 2 gun power modules from 0620 1115 0 to 0620 1115 for 208 V models and from 0620 1125 0 to 0620 1125 1 for 400 V models Power module PNs initially entered incorrectly Aug 2014 IA C Changed all occurrences of 0620 9654 0 to 0620 9654 1 and all occurrences of 6024 6112 1 to 0620 8684 1 Pursuant to PN change implemented by ECN 12185 April ...

Page 3: ...quirements 2 4 2 6 Cable Installation 2 9 3 Power Supply Operation 3 1 3 1 Section Overview 3 1 3 2 HVPS Front Panel Controls and Indicators 3 1 3 3 Switches and LEDs on the FPS Front Panel 3 2 3 4 Power Up Procedure 3 3 3 5 Control of Power Supply from TemEBeam EBC Integrated Controller 3 3 3 6 Control of Power Supply by a PLC Based System Controller 3 8 3 7 Responding to Fault Conditions 3 11 4 ...

Page 4: ...CV 12SLX User Manual ii 0101 8292 0 Rev C ...

Page 5: ...Screen when Gun is On and HV is Off 3 5 Figure 3 6 Operations E Beam Screen with Numeric Keypad Displayed 3 5 Figure 3 7 Operations E Beam Screen Beam on at 5 Power 3 6 Figure 3 8 The EBC s Diagnostics Screen 3 6 Figure 3 9 Remote Controller s LOCAL Screen Menu 1 Selected Beam and Sweep Off 3 8 Figure 3 10 HVPS Front Panel LEDs HVPS Powered Up in Nominal State with HV and FPS Off 3 9 Figure 3 11 H...

Page 6: ...nput Power Indicated 5 16 Table 5 2 One or More Interlocks Not Made 5 17 Table 5 3 General Condition HVPS Powered Up But Fails to Achieve HV Ready State 5 17 Table 5 4 HVPS and FPS Are Powered Up but GUN READY State Not Achieved Confirmed 5 18 Table 6 5 HVPS Powered Up but HV Does Not Switch On When Commanded To Do So 5 18 Table 5 6 FPS Powered Up but Gun Does Not Switch On When Commanded To Do So...

Page 7: ...f the public enemy any existing or future laws or acts of the federal or of any state or local government including specifically but not exclusively any orders rules or regulations issued by an official or agency of any such government affecting the conduct of Seller s business with which Seller in its judgment and discretion deems it advisable to comply as a legal or patriotic duty or to any caus...

Page 8: ...e cash payment and to refuse to make delivery except against payment therefore in cash 10 No implied License The sale of any product or material quoted herein does not give or imply any right or license to buyer to analyze or manufacture such product or material or to claim Buyer is an authorized re seller of such material 11 Export Licenses Items quoted herein may constitute a controlled commodit...

Page 9: ...rantor may repair the item at any of its worldwide service locations 5 Exclusions from coverage Warrantor expressly disclaims responsibility for any of the following each of which is expressly EXCLUDED from this limited warranty A Ordinary wear and tear damage or defects due to abuse misuse failure to use according to instruction or exposure to temperatures and conditions in excess of those referr...

Page 10: ...he local electrical codes Refer to the power supply portion of the documentation to determine the proper electrical ground for high voltage components 6 Before servicing any high voltage component switch off the electrical power at the component s main power switch This switch should have a lockout feature Lock the power off and keep the key with you while you are working on the equipment 7 Certai...

Page 11: ...ponsibility to set up suitable systems to safeguard the health and safety of employees according to the Health Safety at Work etc Act 1974 User Responsibility This equipment will perform in accordance with the instructions and information contained in the user s manual and its referenced documents when such equipment is installed operated and maintained in compliance with such instructions The equ...

Page 12: ...The condensates deposited on the tank walls of a vacuum system are generally in the form of extremely fine particles The nature as well as the form of the materials poses the following potential health hazards a Inhaling fine particles powder may cause damage to the lungs To help prevent this wear a protective respirator mask with fine filter that has been approved by the National Institute for Oc...

Page 13: ...f integration and safety and convenience for operating as well as service personnel The main components of CV 12SLX units are the HVPS see Figure 1 1 the filament power supply see Figure 1 2 and the control and high voltage cables required to connect these components to each other and to the system s control computer NOTE In systems without a PLC based system controller a TemEBeam TM Controller se...

Page 14: ...eaker supplying power to the HVPS and include the AC power required for up to two FPS units Power cable s for FPS unit s should always be connected to the HVPS rear panel not to a separate power drop High Voltage Output 12 kW at 10 kV max Fully adjustable 0 10 kV Regulated to within 5 Beam Current Fully adjustable 0 1200 mA dc Regulated to within 5 Environmental Requirements Must be free of corros...

Page 15: ...iscellaneous Hardware and Interconnection Cables For a complete list of the components and cables included with the CV 12SLX see section 2 2 1 5 TemEBeam Controller EBC In systems without a PLC based system controller the TemEBeam Controller see Figure 1 3 provides the sole means of controlling the e beam power supply An EBC is therefore a required accessory for the CV 12SLX in such systems For de...

Page 16: ...1 5 TemEBeam Controller EBC Section 1 Introduction to the CV 12SLX CV 12SLX User Manual 0101 8292 0 Rev C 1 4 ...

Page 17: ... the HV Coaxial Cable s PN 0620 8684 1 Section 2 6 3 Connecting the HV Output Conduit s PN 0620 9654 1 Section 2 6 4 Connecting the Control Data Cables Section 2 6 5 Making I O Connections to the Vacuum System CAUTION Before beginning the installation procedure make sure that the facility circuit breaker supplying power to the CV 12SLX is switched OFF and locked out with an appropriate lockout tag...

Page 18: ...nents and cables supplied with dual gun CV 12SLX units One CV 12SLX HVPS PN 0620 1115 1 208 volt unit or 0620 1125 1 400 volt unit Two filament power supply modules PN 0620 6604 1 Two FPS input power cables PN 6622 0100 20 Two HVPS FPS cables PN 0620 6672 0 One FPS I O cable PN 0620 6672 2 One HVPS I O cable PN 0620 6682 2 Two HV coaxial cables PN 0620 8684 1 Two HV cable conduit assemblies PN 062...

Page 19: ...emperature sensor that will shut down and latch out further operation if an overtemperature condition should occur The customer must ensure a free flow of air is maintained through the cabinet and keep the ambient air temperature at the input to the power supply below 104 F 40 C All air passages must be unobstructed If air filters are used on the cabinet air input they should be checked on a regul...

Page 20: ...able operation of the power supply cannot be ensured unless a good earth ground is provided for the system and the power supply This ground must provide a low impedance path for radio frequency RF as well as direct current dc electricity and it must not be connected to that of any other system or equipment Figure 2 2 shows two different methods of providing the required low impedance ground on the...

Page 21: ... by connecting the vacuum chamber to the steel structure of the building Where copper straps are attached to frame members the copper must be bolted to clean bare patches of metal The length of copper strap connected to the source tray must be securely bolted to a clean site on that part CAUTION Do not use braided wire for any ground connections CAUTION Do not rely on water pipes to establish the ...

Page 22: ...cubicle s main grounding point the source tray to the vacuum cubicle s main grounding point Figure 2 3 shows the low impedance ground connections for a single gun system Low impedance ground connections are identical on two gun units except that an additional length of wide copper strap must connect the system s central grounding point to FPS 2 For an additional diagram relating to low impedance g...

Page 23: ...th the unit Cut off a length of this strap that will easily extend from the grounding lugs on the power module s rear panel to the operator station s frame 2 Secure one end of this strap to the grounding stud labeled RF GND on the power module s rear panel see Figure 2 4 Figure 2 4 Rear Panel of Single Gun CV 12SLX HVPS Figure 2 5 Rear Panel of Dual Gun CV 12SLX HVPS ...

Page 24: ...n the FPS front panel as shown in one of the Quick Start Guides for the CV 12SLX following the procedure described below Step Action 1 Cut a length of 1 2 wide copper strap user supplied that will easily extend from the filament power supply to the vacuum cubicle s central grounding point 2 Secure one end of this strap to the grounding stud labeled RF GND on the FPS front panel see Figure 2 Figure...

Page 25: ...y 2 6 Cable Installation For an illustration of single gun cabling details see Quick Start Guide PN 0101 8300 0 For a diagram of dual gun cabling details see Quick Start Guide PN 0101 8300 1 For detailed instructions on connecting the cables shown in this diagram see sections 2 6 1 through 2 6 5 2 6 1 Connecting the Input Power Cables Connecting the Power Module Input Power Cable CAUTION Make sure...

Page 26: ...eptacle N and the ground wire will connect to the receptacle marked as a ground Then plug the terminal connector into the rear panel INPUT POWER receptacle Figure 2 8 Input Power Connections to 400 Volt HVPS Units Connecting the FPS Input Power Cable s PN 6622 0100 20 An FPS power cable PN 6622 0100 20 is provided for each FPS In one gun installations plug one end of this cable into HVPS rear pane...

Page 27: ...N 0620 9654 1 The cables that conduct the high voltage from the FPS to the source tray are contained in a length of flexible conduit The part number of the HV cable conduit assembly is 0620 9654 1 The instructions below describe how to install the HV conduit in a single gun installation In a dual gun installation the only additional step is determining which gun will be designated as gun 1 The HV ...

Page 28: ...e threaded end of the conduit elbow into the hole in the conduit panel and secure the elbow with the nut provided as shown in Figure 2 Figure 2 11 Conduit Properly Secured to FPS Conduit Panel 3 Figure 2 shows the FPS with its conduit panel removed and with the lugs on the ends of the HV cables properly secured to the studs inside the FPS unit ...

Page 29: ...e that the HV conduit cable connected to FPS 1 gets connected to the source designated as Source 1 and likewise for FPS 2 and Source 2 CAUTION If the vacuum system has previously been in use with a high voltage power supply then before performing this procedure touch the source tray and the terminals on both HV feedthroughs with a properly connected grounding hook Step Action 1 Remove the nut that...

Page 30: ...2 13 Either cable can be connected to either feedthrough as polarity is not an issue 2 6 4 Connecting the Control Data Cables Step Action 1 Plug the male end of the HVPS FPS cable PN 0620 6672 0 into connector J5 on the power module rear panel see Figure 2 4 2 Plug the female end of the HVPS FPS cable for Gun 1 into connector J102 on the front panel of FPS 1 see Figure 2 15 Figure 2 15 Control Dat...

Page 31: ...em NOTE Before performing this portion of the installation procedure perform the mandatory baseline test described in Section III of either document 0101 8300 0 the Quick Start Guide for single gun CV 12SLX units or document 0101 8300 1 the Quick Start Guide for dual gun CV 12SLX units The installer must make connections 1 between the vacuum system and the HVPS I O cable PN 0620 6682 0 and 2 betwe...

Page 32: ...e PN 0620 6682 0 NOTE Because the interlock string is internally supplied with 24 V dc only contact closure must be supplied by the vacuum system Care must be taken not to allow voltages from other sources to affect the external interlock loop as safety could thereby be compromised In addition the application of additional voltage sources to the interlock circuit will damage it ...

Page 33: ...osure between Pins 10 and 11 resets the HVPS RESET 11 DC voltage 24 dc output supplied Pin 10 via a normally open switch controlling HV IS ON INDICATOR 12 Digital output When high 24 V dc this output indicates that the high voltage is ON POWER SUPPLY FAULT INDICATOR 13 Digital output When high this output indicates that a latching power supply fault has occurred For additional details about latchi...

Page 34: ...tem I Os Exchanged via FPS Front Panel Connector J101 and the FPS I O Cable PN 0620 6672 2 NOTE DEPOSITION CONTROLLER INPUT On the CV 12SLX power supply the polarity of the emission current request input J101 Pin 10 must be positive Reversal of this input s polarity may result in damage to the power supply ...

Page 35: ...nterlock switch installed before the normally closed switch required between J101 Pins 6 and 8 GUN READY INDICATOR 7 Digital output This output goes high 24 V dc when the GUN ENABLE OFF COMMAND IN signal is high 24VDC CONTROL POWER 8 DC voltage 24 dc output supplied for the following inputs REMOTE BIAS SELECT Pin 5 GUN ENABLE OFF COMMAND IN Pin 6 and GUN GO ON COMMAND IN Pin 15 NOTE To be used onl...

Page 36: ...2 6 Cable Installation Section 2 Installation CV 12SLX User Manual 0101 8292 0 Rev C 2 20 ...

Page 37: ...S Front Panel Controls and Indicators Figure 3 1 shows the controls and indicators on the front panel of the CV 12SLX HVPS Those features are described in detail below Figure 3 1 CV 12SLX HVPS Front Panel 3 2 1 HVPS Front Panel Controls Main Circuit Breaker Switch Labeled AC MAINS High Voltage Adjustment Pot labeled ADJUST HV OFF Button This button is always active when the HVPS is powered up Note...

Page 38: ... green when the HV is switched on Fault Indicator LEDs For detailed information about fault indicator LEDs see sections 5 2 2 and 5 2 3 3 3 Switches and LEDs on the FPS Front Panel Figure 3 2 shows the switches and LEDs on the FPS front panel Figure 3 2 Filament Power Supply Front Panel The switches and indicators on the FPS front panel are Power ON Off switch Must be switched ON in order for unit...

Page 39: ...r to the CV 12SLX If not proceed to Step 2 1 Set the facility breaker switch to the ON position 2 Set the circuit breaker switch labeled AC MAINS on the power module front panel to the ON position 3 Set the FPS ON OFF switch see Figure 3 2 to the ON position Follow the operating instructions provided below to switch on and to adjust the HV the filament bias current and the emission current 3 5 Con...

Page 40: ...n are off when the HV alone is on and when the gun alone is on Touching the E BEAM button when the beam is on switches the HV and the gun off Figure 3 4 shows the Operations E Beam screen when the beam is on Figure 3 4 Operations E Beam Screen Beam On at 0 0 mA 3 5 3 Switching on the HV and Gun Independently of Each Other Figure 3 5 shows the Operations E Beam screen when the gun is on but the HV ...

Page 41: ...C will then display a keypad screen which you can use to enter a percent power setpoint After you do so and touch Enter to close the keypad the power supply will ramp up to that power setpoint In Figure 3 6 the user has used the keypad to enter 5 Figure 3 7 shows the Ops E Beam screen after the user has closed the numeric keypad with the beam now operating at 5 power 75 mA Note that the beam power...

Page 42: ...kV Set to open a numeric keypad 2 Use the keypad to enter the desired kV value 3 Touch the keypad s Enter button to close it If the HV is on when you perform this procedure the HVPS will begin operating at the new kV value as soon as you touch the OK button If the button is off the HV will begin operating at the new value the next time it is switched on 3 5 6 Using the EBC s Diagnostics Screen The...

Page 43: ...atching power supply fault has occurred For additional information about latching HVPS faults see section 5 2 Gun Section Is Ready LED Status of the IS READY input from the FPS Is ON LED Status of the IS ON input from the FPS Manual Bias LED Off gray when autobias is selected via the Configuration E Beam screen and green when manual bias is selected Auto Bias LED Green when autobias is selected vi...

Page 44: ...ystem Controller 3 6 1 Switching Main Power On Off To switch on three phase input power to the power supply set the HVPS front panel s main power breaker to the ON position i e all the way up To switch off main input power set the main power breaker to the OFF position i e all the way down Press to switch beam On Off Joystick When Pwr Adjust is selected push up down to increase decrease beam power...

Page 45: ...IN signal for two seconds at Pin 8 of HVPS rear panel connector J4 see Table 2 1 Switching On the High Voltage Following a Latching Fault Condition Switching off the HV by pressing the HV OFF button on the power module front panel triggers a latching Power Supply Fault In that event or when any other latching fault has occurred the following signals must supplied in the order given below to switch...

Page 46: ...ult occurs If the REM LOC IN signal supplied via J4 Pin 5 is low the operator can switch off the HV by pressing the HV OFF button on the HVPS front panel see see Figure 3 1 If the REM LOC IN signal is high the external control system can switch off the high voltage in either of two ways 1 The control system can momentarily de assert the HV ON contact supplied via Pins 8 9 of HVPS connector J4 see ...

Page 47: ... and 11 on HVPS rear panel connector J4 an HV ON input supplied via HVPS J4 Pins 8 and 9 The remote HV ON signal can be supplied either from an EBC see section 3 5 or from a PLC based system controller In many cases it will be necessary to trace and correct the cause of a latching fault before the HV can be switched back on Then the RESET and HV ON signals must be supplied as described above Note ...

Page 48: ...turn green and the ART OUT OF REGULATION LED will no longer flash In addition the HV ON LED is extinguished as the fault condition causes the HV to be switched off This latched fault state is illustrated in Figure 3 12 Figure 3 12 HVPS Front Panel LEDs when a Latched OUTPUT ARCING Fault Has Occurred If the OUTPUT ARCING fault occurred solely because intermittent arcing passed one of the threshold ...

Page 49: ... at common levels The load side of LF1 feeds three phase circuit breaker CB1 as well as the J2 the filtered rear panel IEC auxiliary outlet see Figures 4 1 and 4 2 Circuit breaker CB1 is mounted to the front panel and shielded from inadvertent operation by a kick guard CB1 provides overcurrent protection for the three AC line phases and its load side feeds the Inverter board Rear panel AC outlet J...

Page 50: ...beled RF GND provides a ground return for the HV output and must be properly connected to provide a low impedance ground for instructions see section 2 5 1 Internally ground wires are connected together by a ground block mounted to the bottom panel 4 2 3 Temperature Control Temperature inputs come from two separate devices thermostat S2 and IC sensor U1 which are connected to the Inverter board Th...

Page 51: ...ce HV rectification and voltage and current feedback to the Regulator board High frequency AC voltage driven on the primary of the HV transformer by the Inverter is transformed by a fixed ratio 15 225 and connected to the input of the HV Output board at J1 and J2 Regulator Board The Regulator board performs virtually all logic control and analog processing functions However its primary function is...

Page 52: ...nt panel and the Regulator board The Display and Control board houses and handles signals to from an HV OFF pushbutton an output voltage adjustment potentiometer voltage and current LCD displays and the unit s front panel LEDs 4 3 FPS Theory of Operation 4 3 1 Overview of FPS Operation The filament power supply module see Figure 4 3 provides emission current control and measurement filament power ...

Page 53: ...ilament Output section on standard FPS units consists of an HV vacuum relay and a filament transformer On FPS units with PN 0620 6604 2 the Filament Output section consists only of a filament transformer see Figure 4 7 Section 4 3 4 describes the Filament output section in greater detail 4 3 2 Safety Interlocks The safety interlocks insure that circuits are safely connected and that the box is clo...

Page 54: ...ndard FPS Units PN 0620 6604 0 and 1 Filament Power Supply Module HV Control Vacuum Relay Filament Supply PCB Filament Transformer E Beam Gun s Filament CV 6SLX Power Module HV Related I O Signals to from System Gun Related I O Signals to from System Filament Output Section HV ctl and data signals including the Emission Current Monitor signal ...

Page 55: ...y of Operation 4 3 FPS Theory of Operation 0101 8292 0 Rev C 4 7 CV 12SLX User Manual Figure 4 6 Component Location in FPS Units with PN 0620 6604 2 Figure 4 7 Top Level Block Diagram for FPS Units with PN 0620 6604 2 ...

Page 56: ...ered by inductors L 10 and L 11 in combination with rail capacitors C 11 and C 12 Low Voltage DC Supplies Low DC voltages of 24 V 12 V 5 V and 12V are supplied by T 102 via bridge rectifiers DB 14 and DB 14 12 V and 5V are down regulated from 24 V by VR 101 and VR 103 12 V is down regulated from 24 V by VR 102 These supplies provide power for the logic and control circuits on the board Filament DC...

Page 57: ...itch Q 11 The PWM is controlled by the filament current control circuits The filament current feedback circuit utilizes transformer CT 10 to measure the filament transformer primary current The signal is rectified by DB 11 and scaled by A 102 The feedback signal scaling is 4 0 V 50 A Filament Current Control Circuits Filament Current Control Loop Figure 4 9 shows a block diagram of the control and...

Page 58: ... buffer U205A to the summing junction of the emission current loop compensation circuit of U106A via R54 The emission current feedback signal Emission Monitor EM comes from the HV current transducer in the Filament Output Section of the FPS and is scaled by a rotary switch selection of gain values for buffer A101 The output of A101 is also fed to the summing junction of the emission current loop c...

Page 59: ...as the input to the filament current loop compensation summing point Selection by this SBDT switch of the Auto Bias signal also removes the clear from counter U101 and clears the stop from clock oscillator U203 allowing it to clock the counter The counter outputs drive the 8 bit D A converter U202 The D A output is Ref times the count divided by 256 volts This count up process continues until Emis...

Page 60: ...he HV are connected to the filament by a two conductor cable The high voltage 0 10 kV from the HV Power Supply enters the FPS via J301 On standard FPS units PN 0620 6604 0 the high voltage is routed to the vacuum relay K101 On such units K101 either connects the negative HV to the secondary of the filament transformer or applies a ground to the secondary of the filament transformer The relay is dr...

Page 61: ... resolve a given problem by such simple measures as ensuring that cable connections are properly made or ensuring that the turret on multipocket sources can turn freely In other cases the information provided in this section will aid the user to narrow down the source of a problem to a small number of possible causes In some cases it will be necessary to contact Temescal Field Service for assistan...

Page 62: ... off this LED is yellow Turns green when HV is on Turns green when the HVPS is powered up Normally green turns red when a latching power supply fault has occurred 5 2 2 LEDs That Indicate Nonlatching Faults Figures 5 3 and 5 4 point out and describe the front panel LEDs that indicate nonlatching faults i e faults that do not cause the HV to be switched off They are Arc Out of Regulation HV Out of ...

Page 63: ...tead the LEDs described in these illustrations are shown as red merely to highlight them Figure 5 4 Filament Load Fault and Filament Power LEDs LED is normally green when FPS is powered up Turns red to indicate an open on the filament circuit i e filament broken or burned out resistance across emitter is 2 5 Ohms or greater LED is green when FPS is powered up red when FPS is not powered up NOTE Th...

Page 64: ...dervoltage LEDs Turns red one or more interlocks internal or external are not met LED turns red if the rail voltage falls below the value specified below 208 V units 220 VDC Nominal range is 264 to 323 VDC 400 V units 427 VDC Nominal range is 509 to 622 VDC Figure 5 7 HV Overcurrent and HV Overvoltage LEDs LED turns red if output current is more than 105 630 mA 636 HV Overvoltage LED HV Overcurren...

Page 65: ...nt value by more than 5 LED turns red if the arc rate exceeds threshold value of 200 arcs sec or if subthreshold arcing persists for more than 120 sec Figure 5 9 Inverter Overload and Overtemperature LEDs LED turns red if inverter current reaches the maximum allowable value of 100 A LED turns red a when temp of inverter or internal heat exchanger is 67 C or b when cooling fan tachometer detects im...

Page 66: ...a Diagram 3 No Beam After HV and Gun Are Switched ON 8 Ishikawa Diagram 4 HV Output Unstable 8 Ishikawa Diagram 5 HV Out of Regulation LED Lights Frequently 9 Ishikawa Diagram 6 Arc Out of Regulation LED Lights Excessively for the Material Application 9 Ishikawa Diagram 7 Rail Undervoltage Fault 10 Ishikawa Diagram 8 HV Overcurrent Fault 10 Ishikawa Diagram 9 HV Overvoltage Fault 11 Ishikawa Diagr...

Page 67: ...1 Contactor defective not pulling in Mains Phase missing Incorrect mains supply voltage Interface I O cables missing or not correctly plugged in seated Interlock signal to HVPS J4 not correct Pin 24 Interlock IN Pin 25 Interlock OUT Power Supply Covers interlock on HVPS not made FPS Cover interlock on FPS not made Consequence Possible Causes Blown F1 fuse 0 2 A on A3 HV Regulator PCB External inte...

Page 68: ... Emitter incorrectly assembled HV relay defective Consequence Possible Causes HV and gun switched ON but no beam is emitted see Table 6 8 Loose or faulty connections Loose or faulty connections in emitter assembly feedthrough or interconnection path Consequence Possible Causes HV output unstable see Table 6 9 Mains FPS Problem with HV path loose connection shorting Power Supply HV relay defective ...

Page 69: ...maged Consequence Possible Causes Shorts loose connections on HV feedthrough s or HV connection path HV Out of Regulation LED lights frequently see Table 6 11 Other Mains Damaged emitter Short in HV path FPS Faulty loose cable connections Improper grounding HV relay shorting Incorrect linevoltage or phasemissing Faulty loose cable Connections Improper grounding Short in HV path Consequence Possibl...

Page 70: ...verter PCB Mains AC phase missing AC mains input not correct or low phase to phase phase to ground readings Rail to A3 HV Reg PCB incorrect A3 TP29 to ref 10V 1000 VDC for actual rail Blown F3 fuse on A1 HV Inverter PCB R1 misadjusted on A3 HV Regulator PCB TP85 to ref 208 V 2 2 VDC 400 V 4 27 VDC FPS Mains HV relay defective HV relay control voltage missing J103 pin 6 24VDC Power Supply HV output...

Page 71: ... interconnection cable from A2 HV Output PCB to A3 HV Regulator PCB Other Emitter damaged Consequence Possible Causes Loose cables HV Overvoltage LED lights red see Table 6 14 Defective HV Output PCB Incorrect mains input voltage or phase missing HV relay control voltage missing J103 pin 6 24 VDC Interface Power Supply Incorrect nominal request voltage 1V 1kV R7 on A3 HV Regulator PCB misadjusted ...

Page 72: ...n HV path or output path HV feedthrough shorted damaged Faulty loose connections in FPS connections or chamber feedthrough Temp Sensors Connection J6 on inverter not made or brokern Power Supply Ambient temperature too high U1 damaged Power supply blower s intake restricted 24 VDC missing PS1 or T2 defective Connections between inverter and T2 PS1 missing or defective Defective B1 blower fan B1 bl...

Page 73: ...ive F1 F2 on A1 HV Inverter PCB blown Consequence Possible Causes Aux Power Supply Low LED lights red see Table 6 20 A3 HV Regulator PCB defective HV Inverter PCB defective Consequence Possible Causes Power Supply Power Supply A3 HV Regulator PCB defective T2 AC transformer faulty External Control Fault LED lights red see Table 6 21 Fuses F1 F2 on A1 HV Inverter PCB blown Self resetting fuse F1 on...

Page 74: ...ights red see Table 6 22 HV feedthrough damaged or coated Dirty damaged emitter assembly Broken damaged filament Incorrect filament status signal from FPS 24 VDC from J102 Pin 6 Filament Load Fault and Filament Power LEDs both light red see Tables 6 22 and 6 23 Cables FPS Cables No connection between HVPS J5 and FPS J102 Power Supply Fuses F1 F2 on AC input J104 switch blown A5 Interface PCB defec...

Page 75: ...ay 3 Check the emitter assembly the HV leads the HV feedthroughs and the source tray for flakes and debris and clean as necessary 4 Check the emitter s filament for breaks and replace if necessary 5 Check the emitter assembly the HV leads the HV feedthroughs and the atmosphere side HV cables for possible shorts Correct any shorts found 6 Check all cable interconnections between components of the p...

Page 76: ...d up 5 27 Table 5 20 HVPS AUXILIARY SUPPLY LOW LED lights red 5 28 Table 5 21 HVPS EXTERNAL CONTROL FAULT LED lights red 5 28 Table 5 22 HVPS FILAMENT LOAD FAULT LED lights red 5 28 Table 5 23 HV Is Switched On but FPS Front Panel HIGH VOLTAGE ON LED Fails To Light 5 29 Table 5 24 FPS 1 Is Switched On but Its POWER ON LED Fails To Light 5 29 Table 5 25 FPS 2 Is Switched On but Its POWER ON LED Fai...

Page 77: ...e sure that the top covers of the HVPS and the FPS are secured properly in place If so make sure that the HVPS FPS cable PN 0620 6672 0 is securely connected to HVPS rear panel connector J5 and to FPS connector J102 3 Fault condition s whose investigation requires removal of HVPS top cover 3 Contact Temescal Field Service Table 5 3 General Condition HVPS Powered Up But Fails to Achieve HV Ready St...

Page 78: ...Timeout Alarm HVPS Front Panel HV ON LED fails to light Green EBC issues HVPS Go On Failure alarm Possible Causes Procedure 1 HV READY signal is not present 1 See Table 5 3 2 After remote HV GO ON command is issued HV ON signals are not supplied via Pins 8 9 of HVPS J4 2 Verify that the remote HV GO ON signal is supplied by EBC or PLC based system controller If the preceding steps have failed to c...

Page 79: ...ore than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing so will result in the emitter s filament burning out 4 If the symptom is not in evidence during Step 3 troubleshoot the HV path and emitter assembly following the instructions in the e gun manual If the symptom persists...

Page 80: ...GE Before performing the following procedure perform the procedure described in section 5 4 3 Table 5 9 HV Output Unstable Symptom HV fluctuates or sags from requested level For additional information about this fault mode see Ishikawa Diagram 4 Possible Causes Procedure 1 Incorrect or fluctuating line voltage 1 Confirm input line voltage 2 Faulty or loose cable connections 2 Make sure that all po...

Page 81: ...t conditions whose investigation requires removal of FPS top cover 4 Contact Temescal Field Service Table 5 11 HVPS ARC OUT OF REGULATION LED Flashes Excessively Condition indicated Subthreshold arcing is occurring and or HV is intermittently out of regulation NOTE A problem exists only if arcing is excessive for the material or process in question Symptoms HVPS front panel The ARC OUT OF REGULATI...

Page 82: ...s per manual 3 Incorrect line phase 3 Confirm line phase as per specifications 4 Faulty or loose cable connections 4 Make sure that all power module and FPS cable connections are correctly and securely made If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from HVPS J1 3 Switch on the power supply and the ...

Page 83: ...n manual to troubleshoot emitter issues 4 System improperly grounded for HV 4 Make sure that grounding instructions in e gun manual have been correctly implemented If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from HVPS J1 3 Switch on the power supply and the HV and leave them switched on for no more t...

Page 84: ...tions in gun manual to troubleshoot emitter issues 4 System improperly grounded for HV 4 Make sure that grounding instructions in e gun manual have been correctly implemented If preceding steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from HVPS J1 3 Switch on the power supply and the HV and leave them switched on fo...

Page 85: ...ts red Condition indicated Latched PS fault due to either an arc duration 120 ms or arc rate 200 Hz Symptoms TCS issues PSU1_FAIL_ALM Power Supply Control Is On failure alarm HVPS Front Panel OUTPUT ARCING and POWER SUPPLY FAULT LEDs are lit EBC Fault LED lit in High Voltage section of Diagnostics screen For additional information about this fault mode see Ishikawa Diagram 11 Possible Cause Proced...

Page 86: ...g steps have failed to correct the fault perform the following procedure 1 Switch off the power supply 2 Disconnect HV output cable from HVPS J1 3 Switch on the power supply and the HV and leave them switched on for no more than 9 seconds observing whether the symptom persists during that interval CAUTION DO NOT leave the high voltage on for more than 9 seconds with the HV cable disconnected Doing...

Page 87: ...rocedure 1 Incorrect or fluctuating line voltage 1 Check input line voltage 2 Fault condition s whose investigation requires removal of HVPS top cover 2 Contact Temescal Field Service DANGER HIGH VOLTAGE Before performing the following procedure perform the procedure described in section 5 4 3 Table 5 19 Fan fails to rotate when HVPS is powered up Symptoms TCS displays PSU1_FAIL_ALM Power Supply C...

Page 88: ...HVPS J4 is below its minimum value 20 V dc Symptoms TCS displays PSU1_FAIL_ALM Power Supply Control Is On failure alarm HVPS Front Panel EXTERNAL CONTROL FAULT and POWER SUPPLY FAULT LEDs are lit EBC Fault LED lit in High Voltage section of Diagnostics screen For additional information about this fault mode see Ishikawa Diagram 14 Possible Cause Procedure 1 Fault condition s whose investigation re...

Page 89: ...nnector J1 not supplying 208 V ac power 1 Disconnect FPS power cable from HVPS J1 and check J1 for 208 V ac output If no voltage or incorrect voltage is indicated proceed to Step 2 If voltage is correct skip to Step 4 2 HVPS rear panel fuses F1 and or F2 blown 2 Check fuses and replace as necessary After replacing either fuse repeat Step 1 of this procedure If correct voltage is then detected at J...

Page 90: ...sary as described in section 5 5 5 Fault condition s whose investigation requires removal of HVPS top cover 5 Contact Temescal Field Service 5 5 FPS Fuse Replacement Procedure To check the input power fuses and replace them as necessary follow the instructions provided below Step Action 1 Set the FPS ON OFF switch to the OFF position 7 Switch off the facility breaker providing AC power to the FPS ...

Page 91: ...its holder and snap its cover back into place 13 Reconnect the FPS input power cable 14 Switch on facility breaker supplying power to the FPS 15 Set the FPS ON OFF switch to the ON position 5 6 Suggested Spare Parts Table 5 26 Suggested Spare Parts for 208 Volt Units Component Assembly Part Number Fuse 6 3 A 250 VAC 6024 7324 0 Fuse 1 A 600 V CC 6024 7362 0 Diode Fast REC 1 2 kV 17 A to 200 AC 602...

Page 92: ...20 5262 3 Table 5 27 Suggested Spare Parts for 400 Volt Units Component Assembly Part Number Fuse 6 3 A 250 VAC 6024 7324 0 Fuse 1 A 600 V CC 6024 7362 0 Diode Fast REC 1 2 kV 17 A to 200 AC 6024 7364 0 Power Entry Module 6024 7312 0 Power Supply 24 V dc 2 7 A 6024 7352 0 IGBT 1600 V 60 A ESD 6024 7330 0 Aux Transformer 480 VCT In 240 VCT Out 6024 7319 1 Power Choke 6 kW 12 kW 208 V 0620 0933 1 Ci...

Page 93: ... Digital Controls 0 24 V dc 24 V dc Control Power 10 0 10 V dc 0 24 V dc Fault at below 19 5 V dc Overtemp Trip 11 0 24 V dc 0 V dc Fault Inverter temperature overload above 67 C or cooling fan failure External Interlocks 12 0 24 V dc 0 V dc Fault HV Enable ready 13 0 24 V dc 0 V dc Fault HV Go ON 14 0 24 V dc 0 V dc OFF Overcurrent Trip 15 0 24 V dc 0 V dc Fault HV output current above 105 of nom...

Page 94: ...Appendix A Pinout Table for Rear Panel Diagnostic Port J3 CV 12SLX User Manual A 2 0101 8292 0 Rev C ...