M O L B L O C / M O L B O X L O W M A S S F L O W C A L I B R A T I O N S Y S T E M A F M E T C A L
C O N F I G U R A T I O N S
I N S T A L L A T I O N A N D O P E R A T I O N M A N U A L S U P P L E M E N T
©2000-2008
DH Instruments, a Fluke Company
Page 14
- full mod, high pressure
- single P, high pressure
RANGE & SIZE DESIGNATIONS
GAS
10 sccm
(1E1)
50 sccm
(5E1)
500 sccm
(5E2)
5 slm
(5E3)
30 slm
(3E4)
N2
20 100 1
000
10 000
40 000
7 500
Air
20
100
1 000
10 000
40
000
7 200