M O L B L O C / M O L B O X L O W M A S S F L O W C A L I B R A T I O N S Y S T E M A F M E T C A L
C O N F I G U R A T I O N S
I N S T A L L A T I O N A N D O P E R A T I O N M A N U A L S U P P L E M E N T
©2000-2008
DH Instruments, a Fluke Company
Page
ii
3.1.1
MOLBLOC PRESSURE AND Flow ranges 13
3.1.2
gases
15
3.1.3
MOLBLOC supply pressure 15
3.2
operation 16
3.2.1
setting/checking the MOLSTIC regulator 16
3.2.2
Preparing for flow measurements 16
3.2.3
setting DUT back pressure 19
3.2.4
Entry of DUT pressure and temperature measurements 20
4.
Warranty and Recalibration 21
4.1Warranty statement (for deliveries under f33660-99-f7000) 21
4.2
recalibration 22
4.3
Warranty service centers 22