Sensors
8
Freescale Semiconductor
MMA7455L
Note: The response time is between 10% of full scale V
DD
input voltage and 90% of the final operating output voltage.
*The bandwidth for detecting interrupts in level and pulse is 600Hz which is changed from measurement mode.
PRINCIPLE OF OPERATION
The Freescale accelerometer is a surface-micromachined integrated-circuit accelerometer. The device consists of a surface mi-
cromachined capacitive sensing cell (g-cell) and a signal conditioning ASIC contained in a single package. The sensing element
is sealed hermetically at the wafer level using a bulk micromachined cap wafer. The g-cell is a mechanical structure formed from
semiconductor materials (polysilicon) using semiconductor processes (masking and etching). It can be modeled as a set of
beams attached to a movable central mass that move between fixed beams. The movable beams can be deflected from their
rest position by subjecting the system to an acceleration (
As the beams attached to the central mass move, the distance from them to the fixed beams on one side will increase by the
same amount that the distance to the fixed beams on the other side decreases. The change in distance is a measure of accel-
eration. The g-cell beams form two back-to-back capacitors (
). As the center beam moves with acceleration, the distance
between the beams changes and each capacitor's value will change, (C = A
ε
/D). Where A is the area of the beam,
ε
is the di-
electric constant, and D is the distance between the beams.
The ASIC uses switched capacitor techniques to measure the g-cell capacitors and extract the acceleration data from the differ-
ence between the two capacitors. The ASIC also signal conditions and filters (switched capacitor) the signal, providing a digital
output that is proportional to acceleration.
Figure 3. Simplified Transducer Physical Model
Table 4. Function Parameters for Detection
–40°C < T
A
< 85°C, 2.4 V < AV
DD
< 3.6 V, unless otherwise specified
Characteristic
Symbol
Min
Typ
Max
Unit
Level Detection
Detection Threshold Range
0
—
FS
g
Pulse Detection
Pulse detection range (Adjustable range)
Time step for pulse detection
Threshold range for pulses
Detection levels for threshold
Latency timer (Adjustable range)
Time Window (Adjustable range)
Bandwidth for detecting interrupt*
Time step for latency timer and time window
0.5
—
0
—
1
1
—
—
—
0.5
—
127
—
—
600
1
127
—
FS
—
150
250
—
—
ms
ms
g
Counts
ms
ms
Hz
ms
Acceleration